2021 New Style Electromagnetic Gate Valve - EV series turbo molecular pump – Super Q
2021 New Style Electromagnetic Gate Valve - EV series turbo molecular pump – Super Q Detail:
Profile dimensions and mounting connections of turbo-molecular pumps
The Velocity Curve of Turbo molecular pump
pumping nitrogen and hydrogen
The Velocity Curve of Turbo molecular
pump to the atmosphere
EV-3600 Technical Data
|
Inlet Flange (mm) |
400 ISO – K |
|
|
Outlet Flange (mm) |
100 ISO – K |
|
|
Pumping Rate（L/S） |
3600 |
|
|
Compression Ratio |
N2 |
>108 |
|
H2 |
>5X102 |
|
|
Ultimate Pressure（Pa） |
<2X10-6 |
|
|
Rated Speed（rpm） |
13500 |
|
|
Vibration |
≤0.15 μm |
|
|
Starting Time（min） |
<11 |
|
|
Stop Time（min） |
<20 |
|
|
Suggested rotary pump |
30-70 L/S |
|
|
Cooling Method |
Water-cooling |
|
|
Temperature of Water Cooling(℃) |
≤25 |
|
|
The flow of water cooling（L/min） |
2 |
|
|
Pump Body Baking Temperature |
<120℃ |
|
|
Installation Mode |
Vertical ±5° |
|
|
Weight（kg） |
≈100 |
|
Product detail pictures:
Related Product Guide:
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