2021 New Style Electromagnetic Gate Valve - EV series turbo molecular pump – Super Q

Inlet Flange (mm)

400 ISO – K

Outlet Flange (mm)

100 ISO – K

Pumping Rate（L/S）

3600

Compression Ratio

N²

>10⁸

H²

>5X10²

Ultimate Pressure（Pa）

<2X10^-6

Rated Speed（rpm）

13500

Vibration

≤0.15 μm

Starting Time（min）

<11

Stop Time（min）

<20

Suggested rotary pump

30-70 L/S

Cooling Method

Water-cooling

Temperature of Water Cooling(℃)

≤25

The flow of water cooling（L/min）

2

Pump Body Baking Temperature

<120℃

Installation Mode

Vertical ±5°

Weight（kg）

≈100