90 Degree Iso-K Elbows - EV series grease lubricating molecular pump – Super Q

Model

EV-300Z

EV-300ZF

Inlet Flange (mm)

100CF

100 ISO-K

100CF

100 ISO-K

Outlet Flange (mm)

25 KF

25 KF

Pumping Speed (L/S)

300

300

Compression Ratio

N²

>10⁸

>10⁸

H²

>1X10³

>1X10³

Ultimate Vacuum(Pa)

<3X10^-7

<2X10^-6

<3X10^-7

<2X10^-6

Rotation Speed(rpm)

30000

30000

Bearing

Grease-lubricated Ceramic Bearing

Grease-lubricated Ceramic Bearing

Run-up Time(min)

<4

<4

Backing Pump

2 L/S

2 L/S

Cooling Method

Air Cooling

WaterCooling

ambient temperature

5-36℃

<38℃

Mounting

Any position

Any position

Weight(kg) (kg)

≈11

≈10.8

Model

EV-650Z

EV-650ZF

EV-1300Z

EV-1300ZF

EV-2000Z

EV-2000ZF

Inlet Flange (mm)

150 CF

160 ISO-K

200 CF

200 ISO-K

250 CF

250 ISO-K

Outlet Flange (mm)

40 KF

40KF

50KF

The flange of protective air

（anticorrosive pump）

16KF

16KF

16KF

Pumping Rate（L/S）

650

1300

2000

Compression Ratio

N²

>10⁹

>10⁹

>10⁹

H²

>8X10³

>1X10⁴

>1X10⁴

Ultimate Pressure（Pa）

<8X10^-8

<5X10^-7

<8X10^-8

<5X10^-7

<8X10^-8

<5X10^-7

Rated Speed（rpm）

24000

24000

24000

Bearing

Grease-lubricated Ceramic Bearing

Grease-lubricated Ceramic Bearing

Grease-lubricated Ceramic Bearing

Vibration

≤0.1 μm

≤0.1 μm

≤0.1 μm

Starting Time（min）

<5

<5

<5

Suggested rotary pump

4-8 L/S

8-15 L/S

8-15 L/S

Cooling Method

Water(Air) Cooling

Water(Air) Cooling

Water(Air) Cooling

Temperature of Water Cooling(℃)

≤20

≤20

≤20

The flow of water cooling（L/min）

1

1

1

Installation Mod

Any position

Any position

Any position

Weight（kg）

≈22

≈27

≈35

Model

EV-650Z

EV-1300Z

EV-2000Z

Inlet Flange (mm)

150 CF

160 ISO-K

200 CF

200 ISO-K

250 CF

250 ISO-K

D1

Φ202

Φ180

Φ253

Φ240

Φ305

Φ290

D2

Φ212

Φ212

Φ243

Φ243

Φ274

Φ274

D3

Φ236

Φ236

Φ266

Φ266

Φ296

Φ296

L1

112

112

150

150

123

123

H1

315

315

339

339

316.5

312

H2

300

300

334

334

299

295

H3

239

239

283

283

252

248

H4

94.5

94.5

103.5

103.5

102.5

102.5