Cryopump
Scope of application
-Semiconductor, integrated circuit, display panel (LCD/LED/OLED) manufacturing processes
Semiconductor coating, thin film growth, ion implantation, solar panels, optoelectronic devices
-Vacuum coating
Optical lens coating, protective coatings, glass film-Research and big science projects
Space environment simulation, vacuum exhaust stands, vacuum furnaces, accelerator vacuum systems, material analysis instruments
CTP series cryopump
Performance parameters