EV series compound molecular pumps
Application areas
Molecular vacuum pumps are highly efficient vacuum pumps designed specifically to create high vacuum and ultra-high vacuum environments and are widely used across various industries and technological fields. Here is a comprehensive overview of the main applications of molecular vacuum pumps:
1. Scientific Research: In physical, chemical, and materials science experiments, molecular vacuum pumps are essential for providing the necessary ultra-high vacuum environment, which is crucial for conducting fundamental research and experiments.
2. Semiconductor Manufacturing: In the semiconductor industry, processes such as lithography, etching, and thin film deposition require extremely high vacuum levels. Molecular vacuum pumps provide the ideal vacuum environment for these applications.
3. Space Simulation: Molecular vacuum pumps are vital in space environment simulation, used to test and simulate the behavior of spacecraft and satellites in outer space, ensuring their performance in vacuum conditions.
4. Mass Spectrometry: In mass spectrometry instruments, molecular vacuum pumps are used to create high vacuum environments, enhancing the precision and resolution of mass spectral analysis.
5. Nuclear Energy and Particle Accelerators: In nuclear research and particle accelerator applications, molecular vacuum pumps are used to maintain the high vacuum state required for operations, ensuring unimpeded particle flow.
6. Kitchen and Bathroom Equipment Coating: Molecular vacuum pumps are crucial in providing a high vacuum environment for PVD and CVD coating processes. These technologies enhance the corrosion resistance and decorative qualities of bathroom fixtures like faucets and shower equipment, and are also used for the wear resistance and anti-corrosion treatment of kitchen utensils.
EV-series Technical Data
Model |
EV-600 EV-600F |
EV-1200 EV-1200F |
EV-1600 EV-1600F |
||||
Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
|
Outlet Flange(mm) |
40 KF |
40 KF |
50 KF |
||||
Pumping Speed(L/S) |
600 |
1200 |
1600 |
||||
Compression Ratio |
N2 |
>109 |
>109 |
>109 |
|||
H2 |
>8X103 |
>1X104 |
>1X104 |
||||
Ultimate Vacuum(Pa) |
<8X10-8 |
<5X10-7 |
<8X10-8 |
<5X10-7 |
<8X10-8 |
<5X10-7 |
|
Rotation Speed(rpm) |
24000 |
24000 |
24000 |
||||
Vibration |
≤0.1 μm |
≤0.1 μm |
≤0.15 μm |
||||
Run-up Time(min) |
<4.5 |
<5 |
<6 |
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Backing Pump |
4-8 L/S |
8-15 L/S |
15 L/S |
||||
Cooling Method |
Water(air) cooling |
Water(air) cooling |
Water(air) cooling |
||||
Cooling Water Temperature (℃) |
≤20 |
≤20 |
≤20 |
||||
Ambient Temperature(℃) |
≤35 |
≤35 |
≤35 |
||||
Cooling Water Flow quantity |
1-2 L/min |
1-2 L/min |
1-2 L/min |
||||
Bake-out Temperature(℃) |
<120 |
<120 |
<120 |
||||
Heater Power(w) |
<250 |
<300 |
<300 |
||||
Heater Input Voltage(v) |
AC220 |
AC220 |
AC220 |
||||
Mounting |
Vertical ±5° |
Vertical ±5° |
Vertical ±5° |
||||
Weight(kg) |
≈25 |
≈29 |
≈31 |
Atmospheric Pumping Curve of Compound
Molecular Pump
Compressing ratio curve of nitrogen and hydrogen
by compound molecular pump
EV Series Installation Dimension Table of compound Molecular Pump
Model |
EV-600 |
EV-1200 |
EV-1600 |
||||
Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
|
D1 |
Φ202 |
Φ180 |
Φ253 |
Φ240 |
Φ305 |
Φ290 |
|
D2 |
Φ212 |
Φ212 |
Φ237 |
Φ237 |
Φ274 |
Φ274 |
|
D3 |
Φ236 |
Φ236 |
Φ266 |
Φ266 |
Φ296 |
Φ296 |
|
D4 |
¨145.7 |
¨145.7 |
¨167.6 |
¨167.6 |
¨183.9 |
¨183.9 |
|
H1 |
375 |
375 |
405 |
405 |
393 |
393 |
|
H2 |
235 |
235 |
265 |
265 |
250 |
250 |
|
H3 |
238 |
238 |
265 |
265 |
250 |
250 |
|
H4 |
108 |
108 |
113 |
113 |
110 |
110 |
|
H5 |
4 |
4 |
19 |
19 |
16 |
16 |
|
L1 |
130 |
130 |
145 |
145 |
160 |
160 |
|
L2 |
137 |
137 |
152 |
152 |
176 |
176 |
|
Pump leg screw hole |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
|
Outlet Flange(mm) |
KF40 |
KF40 |
KF40 |
KF40 |
KF50 |
KF50 |
EV Series Air-cooling compound Molecular Pumps
EV-series air-cooled compound molecular pump is composed of turbomolecular pump and disc traction pump. It has the characteristics of high pumping speed and compression ratio for molecular flow of turbomolecular pump, high pumping speed and compression ratio for high pressure of traction pump, and expands the application scope of molecular pump.
The compound molecular pump has no selectivity and memory effect on the pumped gas. Because of its high compression ratio to the gas with large molecular weight, the pump can obtain clean high and ultra high vacuum without cold trap and oil baffle. It is widely used in various fields of electronics, metallurgy, chemical industry, scientific research and vacuum technology.
Model |
EV-600F |
EV-1200F |
EV-1600F |
|||
Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
D1 |
Φ202 |
Φ180 |
Φ253 |
Φ240 |
Φ305 |
Φ290 |
D2 |
Φ236 |
Φ236 |
Φ266 |
Φ266 |
Φ274 |
Φ274 |
D3 |
¨145.7 |
¨145.7 |
¨167.6 |
¨167.6 |
¨183.8 |
¨183.8 |
H1 |
455 |
455 |
472 |
472 |
465 |
465 |
H2 |
217.5 |
217.5 |
210 |
210 |
214.5 |
214.5 |
H3 |
151 |
151 |
151 |
151 |
153 |
153 |
L1 |
130 |
130 |
145 |
145 |
161 |
161 |
L2 |
137 |
137 |
152 |
152 |
166 |
166 |
Pump leg screw hole |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
4-M8 |