EV series grease lubricating molecular pump
Application areas
Molecular vacuum pumps are highly efficient vacuum pumps designed specifically to create high vacuum and ultra-high vacuum environments and are widely used across various industries and technological fields. Here is a comprehensive overview of the main applications of molecular vacuum pumps:
1. Scientific Research: In physical, chemical, and materials science experiments, molecular vacuum pumps are essential for providing the necessary ultra-high vacuum environment, which is crucial for conducting fundamental research and experiments.
2. Semiconductor Manufacturing: In the semiconductor industry, processes such as lithography, etching, and thin film deposition require extremely high vacuum levels. Molecular vacuum pumps provide the ideal vacuum environment for these applications.
3. Space Simulation: Molecular vacuum pumps are vital in space environment simulation, used to test and simulate the behavior of spacecraft and satellites in outer space, ensuring their performance in vacuum conditions.
4. Mass Spectrometry: In mass spectrometry instruments, molecular vacuum pumps are used to create high vacuum environments, enhancing the precision and resolution of mass spectral analysis.
5. Nuclear Energy and Particle Accelerators: In nuclear research and particle accelerator applications, molecular vacuum pumps are used to maintain the high vacuum state required for operations, ensuring unimpeded particle flow.
6. Kitchen and Bathroom Equipment Coating: Molecular vacuum pumps are crucial in providing a high vacuum environment for PVD and CVD coating processes. These technologies enhance the corrosion resistance and decorative qualities of bathroom fixtures like faucets and shower equipment, and are also used for the wear resistance and anti-corrosion treatment of kitchen utensils.
EV-300Z and EV-300ZF Technical Data
Model |
EV-300Z |
EV-300ZF |
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Inlet Flange (mm) |
100CF |
100 ISO-K |
100CF |
100 ISO-K |
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Outlet Flange (mm) |
25 KF |
25 KF |
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Pumping Speed (L/S) |
300 |
300 |
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Compression Ratio |
N2 |
>108 |
>108 |
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H2 |
>1X103 |
>1X103 |
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Ultimate Vacuum(Pa) |
<3X10-7 |
<2X10-6 |
<3X10-7 |
<2X10-6 |
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Rotation Speed(rpm) |
30000 |
30000 |
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Bearing |
Grease-lubricated Ceramic Bearing |
Grease-lubricated Ceramic Bearing |
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Run-up Time(min) |
<4 |
<4 |
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Backing Pump |
2 L/S |
2 L/S |
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Cooling Method |
Air Cooling |
WaterCooling |
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ambient temperature |
5-36℃ |
<38℃ |
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Mounting |
Any position |
Any position |
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Weight(kg) (kg) |
≈11 |
≈10.8 |
Compression ratio curve of EV-300ZF grease lubricated air-cooled molecular pump to air
Compression ratio curve of EV-300ZF grease lubricated air-cooled molecular pump for nitrogen and hydrogen
Product dimension, mounting connection dimension
EV-300Z Grease lubricated water-cooled molecular pumps-shape dimensions, mounting connection dimensions
EV-300ZF Grease lubricated water-cooled molecular pumps-shape dimensions, mounting connection dimensions
EV-650Z(ZF), EV-1300Z(ZF), EV-2000Z(ZF) Technical Data
The impeller of EV type grease lubricating compound molecular pump adopts the vane tooth of variable cross section, and the bearing adopts grease lubricated ceramic precision bearing, which realizes the installation of pump body at any angle and cleans the oil-free high vacuum environment with higher reliability.
Model |
EV-650Z EV-650ZF |
EV-1300Z EV-1300ZF |
EV-2000Z EV-2000ZF |
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Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
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Outlet Flange (mm) |
40 KF |
40KF |
50KF |
|||||
The flange of protective air (anticorrosive pump) |
16KF |
16KF |
16KF |
|||||
Pumping Rate(L/S) |
650 |
1300 |
2000 |
|||||
Compression Ratio |
N2 |
>109 |
>109 |
>109 |
||||
H2 |
>8X103 |
>1X104 |
>1X104 |
|||||
Ultimate Pressure(Pa) |
<8X10-8 |
<5X10-7 |
<8X10-8 |
<5X10-7 |
<8X10-8 |
<5X10-7 |
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Rated Speed(rpm) |
24000 |
24000 |
24000 |
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Bearing |
Grease-lubricated Ceramic Bearing |
Grease-lubricated Ceramic Bearing |
Grease-lubricated Ceramic Bearing |
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Vibration |
≤0.1 μm |
≤0.1 μm |
≤0.1 μm |
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Starting Time(min) |
<5 |
<5 |
<5 |
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Suggested rotary pump |
4-8 L/S |
8-15 L/S |
8-15 L/S |
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Cooling Method |
Water(Air) Cooling |
Water(Air) Cooling |
Water(Air) Cooling |
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Temperature of Water Cooling(℃) |
≤20 |
≤20 |
≤20 |
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The flow of water cooling(L/min) |
1 |
1 |
1 |
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Installation Mod |
Any position |
Any position |
Any position |
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Weight(kg) |
≈22 |
≈27 |
≈35 |
EV-650Z, EV-1300Z, EV-2000Z Mounting Dimension Table of Lipid Lubricating Molecular pump
Model |
EV-650Z |
EV-1300Z |
EV-2000Z |
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Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
D1 |
Φ202 |
Φ180 |
Φ253 |
Φ240 |
Φ305 |
Φ290 |
D2 |
Φ212 |
Φ212 |
Φ243 |
Φ243 |
Φ274 |
Φ274 |
D3 |
Φ236 |
Φ236 |
Φ266 |
Φ266 |
Φ296 |
Φ296 |
L1 |
112 |
112 |
150 |
150 |
123 |
123 |
H1 |
315 |
315 |
339 |
339 |
316.5 |
312 |
H2 |
300 |
300 |
334 |
334 |
299 |
295 |
H3 |
239 |
239 |
283 |
283 |
252 |
248 |
H4 |
94.5 |
94.5 |
103.5 |
103.5 |
102.5 |
102.5 |