EV series turbo molecular pump
Application areas
Molecular vacuum pumps are highly efficient vacuum pumps designed specifically to create high vacuum and ultra-high vacuum environments and are widely used across various industries and technological fields. Here is a comprehensive overview of the main applications of molecular vacuum pumps:
1. Scientific Research: In physical, chemical, and materials science experiments, molecular vacuum pumps are essential for providing the necessary ultra-high vacuum environment, which is crucial for conducting fundamental research and experiments.
2. Semiconductor Manufacturing: In the semiconductor industry, processes such as lithography, etching, and thin film deposition require extremely high vacuum levels. Molecular vacuum pumps provide the ideal vacuum environment for these applications.
3. Space Simulation: Molecular vacuum pumps are vital in space environment simulation, used to test and simulate the behavior of spacecraft and satellites in outer space, ensuring their performance in vacuum conditions.
4. Mass Spectrometry: In mass spectrometry instruments, molecular vacuum pumps are used to create high vacuum environments, enhancing the precision and resolution of mass spectral analysis.
5. Nuclear Energy and Particle Accelerators: In nuclear research and particle accelerator applications, molecular vacuum pumps are used to maintain the high vacuum state required for operations, ensuring unimpeded particle flow.
6. Kitchen and Bathroom Equipment Coating: Molecular vacuum pumps are crucial in providing a high vacuum environment for PVD and CVD coating processes. These technologies enhance the corrosion resistance and decorative qualities of bathroom fixtures like faucets and shower equipment, and are also used for the wear resistance and anti-corrosion treatment of kitchen utensils.
Profile dimensions and mounting connections of turbo-molecular pumps
The Velocity Curve of Turbo molecular pump
pumping nitrogen and hydrogen
The Velocity Curve of Turbo molecular
pump to the atmosphere
EV-3600 Technical Data
Inlet Flange (mm) |
400 ISO - K |
|
Outlet Flange (mm) |
100 ISO - K |
|
Pumping Rate(L/S) |
3600 |
|
Compression Ratio |
N2 |
>108 |
H2 |
>5X102 |
|
Ultimate Pressure(Pa) |
<2X10-6 |
|
Rated Speed(rpm) |
13500 |
|
Vibration |
≤0.15 μm |
|
Starting Time(min) |
<11 |
|
Stop Time(min) |
<20 |
|
Suggested rotary pump |
30-70 L/S |
|
Cooling Method |
Water-cooling |
|
Temperature of Water Cooling(℃) |
≤25 |
|
The flow of water cooling(L/min) |
2 |
|
Pump Body Baking Temperature |
<120℃ |
|
Installation Mode |
Vertical ±5° |
|
Weight(kg) |
≈100 |