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factory customized Vacuum Pump - Thermal gas Mass Flow Controller (MFC) – Super Q

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factory customized Vacuum Pump - Thermal gas Mass Flow Controller (MFC) – Super Q Detail:

Thermalgasmassflowmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpressure,donot needthecompensationoftemperatureandpressure.

Model SQC-100
Ranges of Flow (N2) 0~5,10,20,30 ,50 ,100 ,200,500SCCM
0~1, 2, 3, 5, 10, 15, 20, 30SLM
Accuracy ±1%F.S.(≤15SLM);±2%F.S.(>15SLM)
Valve Drive Type Normal Closed
Linearity ±1%F.S.(≤15SLM);±2%F.S.(>15SLM)
Repeatability ±0.2%F.S.
Response Time ≤1sec
Input/output Signal 0~5V
Electric Joint DB15 pin (needle)
Operation Tem. 5~45℃
Differential Pre. 0.05~0.5MPa (MFC); 0.03~3.0MPa (MFM)
Leak Rate 1×10-8SCCS (He)
Max. Pressure 3MPa
Medium Material 316L SS and sealing material
Sealing Material Viton, Silicone rubber, NBR, Teflon, Metal seal.
Joint Size VCR 1/4”;Swagelok 1/8” 、1/4”;φ3、 φ6mm
Power Supply +15V,50mA;-15V,200mA
Model SQC-200
Ranges of Flow (N2) MFC:0~20,30 ,50 ,100 ,150, 200SLM
MFM:0~20 ,30 ,50,100 ,150, 200 ,250,300SLM
Accuracy ±2%F.S.
Valve Drive Type Normal Closed
Linearity ±2%F.S.
Repeatability ±0.2%F.S.
Response Time ≤5sec
Input/output Signal 1~5V;4~20mA
Electric Joint DB15 pin (needle)
Operation Tem. 5~45℃
Differential Pre. 0.1~0.3MPa(MFC); 0.05~3.0MPa (MFM)
Leak Rate 1×10-8SCCS (He)
Max. Pressure 3MPa
Medium Material 316L SS and sealing material
Sealing Material Viton, Silicone rubber, NBR, ERP, Teflon
Joint Size Swagelok 3/8” 、1/2”; φ8、φ10、φ12mm
Power Supply 24V,0.5A
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factory customized Vacuum Pump -
 Thermal gas Mass Flow Controller (MFC) – Super Q detail pictures

factory customized Vacuum Pump -
 Thermal gas Mass Flow Controller (MFC) – Super Q detail pictures


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factory customized Vacuum Pump - Thermal gas Mass Flow Controller (MFC) – Super Q , The product will supply to all over the world, such as: , , ,

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