Fast delivery Kf 90 Elbows - Thermal gas Mass Flow Controller (MFC) – Super Q
Fast delivery Kf 90 Elbows - Thermal gas Mass Flow Controller (MFC) – Super Q Detail:
Thermalgasmassflowmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpressure,donot needthecompensationoftemperatureandpressure.
Model | SQC-100 |
Ranges of Flow (N2) | 0~5,10,20,30 ,50 ,100 ,200,500SCCM |
0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
Accuracy | ±1%F.S.(≤15SLM);±2%F.S.(>15SLM) |
Valve Drive Type | Normal Closed |
Linearity | ±1%F.S.(≤15SLM);±2%F.S.(>15SLM) |
Repeatability | ±0.2%F.S. |
Response Time | ≤1sec |
Input/output Signal | 0~5V |
Electric Joint | DB15 pin (needle) |
Operation Tem. | 5~45℃ |
Differential Pre. | 0.05~0.5MPa (MFC); 0.03~3.0MPa (MFM) |
Leak Rate | 1×10-8SCCS (He) |
Max. Pressure | 3MPa |
Medium Material | 316L SS and sealing material |
Sealing Material | Viton, Silicone rubber, NBR, Teflon, Metal seal. |
Joint Size | VCR 1/4”;Swagelok 1/8” 、1/4”;φ3、 φ6mm |
Power Supply | +15V,50mA;-15V,200mA |
Model | SQC-200 |
Ranges of Flow (N2) | MFC:0~20,30 ,50 ,100 ,150, 200SLM |
MFM:0~20 ,30 ,50,100 ,150, 200 ,250,300SLM | |
Accuracy | ±2%F.S. |
Valve Drive Type | Normal Closed |
Linearity | ±2%F.S. |
Repeatability | ±0.2%F.S. |
Response Time | ≤5sec |
Input/output Signal | 1~5V;4~20mA |
Electric Joint | DB15 pin (needle) |
Operation Tem. | 5~45℃ |
Differential Pre. | 0.1~0.3MPa(MFC); 0.05~3.0MPa (MFM) |
Leak Rate | 1×10-8SCCS (He) |
Max. Pressure | 3MPa |
Medium Material | 316L SS and sealing material |
Sealing Material | Viton, Silicone rubber, NBR, ERP, Teflon |
Joint Size | Swagelok 3/8” 、1/2”; φ8、φ10、φ12mm |
Power Supply | 24V,0.5A |
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