Rianadair sruthadh mòr gas teirmeach (MFC)
Tha anrmalgasmasalfìosalmeter(MFM) isakindofaccuratemeasuremsteachgasflow,the measuredvaluiseagnotcontrolledbyfluctuationsintempeircealltureorpressuill, chan eil feum airthecompensationoftempraturandpressure.
Modail | SQC-100 |
Raon srutha (N2) | 0~5,10, 20, 30, 50, 100, 200, 500SCCM |
0~ 1, 2, 3, 5, 10, 15, 20, 30SLM | |
Cruinneas | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Seòrsa Drive Valve | Dùinte àbhaisteach |
Linearity | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Ath-aithris | ±0.2 FS |
Àm Freagairt | ≤1 diog |
Comharra cuir a-steach / toraidh | 0:5V |
Co-bhanntachd dealain | prìne DB15 (snàthad) |
Operation Tem. | 5 ~ 45 ℃ |
Eadar-dhealachadh ro. | 0.05 ~ 0.5MPa (MFC); 0.03~3.0MPa(MFM) |
Ìre aodion | 1 × 10-8SCCS (He) |
Max.Brùthadh | 3 MPa |
Stuth meadhanach | 316L SS agus stuth ròin |
Stuth ròin | Viton, rubair silicone, NBR, Teflon, Ròn meatailt. |
Meud Co-phàirteach | VCR 1/4"; Swagelok 1/8" , 1/4 ";φ3, φ6mm |
Solar cumhachd | +15V,50mA;-15V,200mA |
Modail | SQC-200 |
Raon srutha (N2) | MFC:0~20, 30, 50, 100, 150, 200SLM |
MFM:0~20, 30, 50, 100, 150, 200, 250, 300SLM | |
Cruinneas | ±2%FS |
Seòrsa Drive Valve | Dùinte àbhaisteach |
Linearity | ±2%FS |
Ath-aithris | ±0.2 FS |
Àm Freagairt | ≤5 diog |
Comharra cuir a-steach / toraidh | 1~5V;4~20mA |
Co-bhanntachd dealain | prìne DB15 (snàthad) |
Operation Tem. | 5 ~ 45 ℃ |
Eadar-dhealachadh ro. | 0.1~0.3MPa(MFC);0.05~3.0MPa (MFM) |
Ìre aodion | 1 × 10-8SCCS (He) |
Max.Brùthadh | 3 MPa |
Stuth meadhanach | 316L SS agus stuth ròin |
Stuth ròin | Viton, rubair silicone, NBR, ERP, Teflon |
Meud Co-phàirteach | Swagelok 3/8 ”, 1/2”; φ8, φ10, φ12mm |
Solar cumhachd | 24V, 0.5A |
Sgrìobh do theachdaireachd an seo agus cuir thugainn e