Mass Flow Controller Mass Flow Mita CS200
Siffofin
1. Babban Daidaito da Amsa Mai Sauri
An inganta daidaito na CS200 MFC zuwa ± 1.0% na SP, kuma mafi yawan samfurori suna da rage lokacin amsawa na kasa da 0.8 sec.
2. Low Zero Drift da Temperature Coefficient
Ƙirƙirar sabuwar fasahar firikwensin yana ba wa CS200 MFC damar kiyaye kwanciyar hankali da jure yanayin zafi.Ba tare da amplifier-sifili na atomatik ba, drift sifili da ake tsammanin bai wuce 0.6% FS / shekara ba, kuma ƙimar zafin jiki bai wuce 0.02% FS/℃ (sifili) ， 0.05% FS/ ℃ (span).
3. Samfuran Ƙarfe-Ƙarfe da Babban Tsarin Tsabta
Hanyar kwararar ruwa ta-da-layi CS200 MFC an gina ta ne daga bakin karfe mai wuce gona da iri.Duk CS200 MFCs an haru a cikin Sevenstar's ultraclean Class 100-aji mai tsabta daidai da ka'idojin SEMI da ISO 9001.
4. Ma'auni masu jituwa
CS200 MFC ya dace da ma'auni masu zuwa, wanda abokin ciniki zai iya zaɓar: ± 8V-± 16V samar da wutar lantarki biyu da + 14V-+ 28V guda-karshen wutar lantarki;shigarwar siginar dijital ko analog da fitarwa;SEMI daidaitattun ma'auni na inji;da RS-485 ko na'urorin sadarwa na DeviceNet.
5. Daban-daban Ayyuka
Software na abokin ciniki mai ƙarfi ya zo daidai da kowane samfuri, yayin da ƙarin ayyuka kamar su Multi-gas ， Multi-Keway ， auto-zero, ƙararrawa, farawa mai laushi, da jinkirta suna samuwa azaman zaɓin abokin ciniki.
Ƙayyadaddun bayanai
| Saukewa: CS200 | |||||||
| Nau'in | Saukewa: CS200A | Saukewa: CS200C | Saukewa: CS200D | ||||
| Cikakken kewayon (N2) | (0～5,10,20,30,50,100,200,300,500)SCCM | (0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Daidaito | ± 1.0% SP (≥35% FS) ± 0.35% FS? (＜35% FS) | ||||||
| Linearity | ± 0.5% FS | ||||||
| Maimaituwa | ± 0.2% FS | ||||||
| Lokacin Amsa | ≤1 dakika | ≤0.8 dakika (SEMI E17-0600) | |||||
| Matsayin Huta Valve | Kullum Rufewa ko | Babu Valve | Kullum Rufewa ko | Babu Valve | Kullum Rufewa ko | Babu Valve | |
| Kullum Bude (100 sccm≤FS≤5 slm) | Kullum Bude (100 sccm≤FS≤5 slm) | Kullum Bude (100 sccm≤FS≤5 slm) | |||||
| Matsi Daban-daban | 0.05 ~ 0.35MPa (Flow≤10slm) | ＜0.02MPa | (0.05 ~ 0.35) MPa (≤10slm) | ＜0.02MPa | (0.05 ~ 0.35) MPa (≤10slm) | ＜0.02MPa | |
| 0.1 ~ 0.35MPa (10slm*Flow≤30slm) | (0.1 zuwa 0.35) MPa (10slm) | (0.1 zuwa 0.35) MPa (10slm) | |||||
| 0.2 ~ 0.45MPa (Yafiya: 30slm) | |||||||
| Matsakaicin Matsin Aiki | 0.45MPa | |||||
| Zazzabi | Sifili: ≤± 0.05% FS/℃; | Sifili: ≤± 0.02% FS/℃;Tsawon lokaci: ≤± 0.05% FS/℃ | ||||
| Coefficient | Tsawon lokaci: ≤± 0.1% FS/℃（Flow≤30slm） | |||||
| Tsawon lokaci: ≤± 0.2% FS/℃（Flow>30slm） | ||||||
| Tabbacin Matsi | 3MPa (pisg 435) | |||||
| Sifili Drift | ＜0.6% FS a kowace shekara ba tare da autozero ba | |||||
| Leak mutunci | 1×10-9 atm·cc / sec Ya | 1 × 10-10atm·cc / sec Ya | ||||
| Kayayyakin da aka jika | Viton; | Karfe? (Bakin Karfe V/V, 5Ra) | Karfe | |||
| Surface Chemistry | -- | rabon Cr/F：2.0;Kauri cro- 20 Angstroms | ||||
| Ƙarshen Sama | 25 Ra | 10 Ra | 25 Ra | |||
| Yanayin Aiki | (5 ℃ | (0 ~ 50 ℃ | ||||
| Siginar shigarwa | Digital: RS485 ko ProfiBus | N/A | Digital: RS485 ko ProfiBus ko DeviceNetTM | N/A | Digital:RS485 ko ProfiBus ko DeviceNetTM | N/A |
| ko DeviceNetTM | Analog: (0～5)VDC ko (4～20)mA ko (0～20)mA | Analog: (0～5)VDC ko (4～20)mA? ko (0～20)mA | |||||
| Analog: (0～5)VDC ko (4～20)mA ko (0～20)mA | |||||||
| Siginar fitarwa | Digital: RS485 ko DeviceNetTM ko ProfiBus Analog:(0～5)VDC ko (4～20)mA ko (0～20)mA | ||||||
| Tushen wutan lantarki | ± 8 ~ ± 16 VDC ko +14 ~ +28 VDC (400mA) | ||||||
| Mai Haɗin Lantarki | 9-pin namiji sub-D , 15 fil sub-D , DeviceNetTM,ProfiBus, Analog | ||||||
| Kayan aiki | VCR1/4" M; VCO1/4" M; | VCR1/4" M; | |||||
| Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙaƙwalwa | Daidaita matsi Φ6, | ||||||
| Matsawa Daidaita 3/8";Matsawa Fitting 1/4"; | Daidaita matsi Φ3, | ||||||
| Matsi Fitting 1/8";Daidaita matsi Φ3; | Matsawa Fitting 1/4" | ||||||
| Ф6 (na ciki) × 1 tiyo; ф5 (na ciki) × 1.5hose; ф4 (na ciki) × 1hose; | W-seal, | ||||||
| A-sael ; | C-hatimi | ||||||
| Nauyi | 1 kg | 0.8kg | 1.2kg | 1 kg | 1.2kg | 1 kg | |
