I. Injin famfo
Babban aikin famfo na inji shine don samar da buƙatun da ake buƙata don farawa na famfo turbomolecular.Famfunan injin da aka fi amfani da su sun haɗa da busassun famfunan busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun busassun) da ake amfani da su a galibin al’amura na yau da kullum da ake amfani da su da yawa a cikin manyan bututun mai da mai.
Famfu na diaphragm suna da ƙananan saurin busawa kuma ana amfani da su gabaɗaya don ƙananan saitin famfo na ƙwayoyin cuta saboda ƙaramin girman.
The man-hatimi inji famfo ne mafi amfani inji famfo a baya, halin da babban famfo gudun da kuma mai kyau matuƙar injin, da hasara shi ne gaba ɗaya wanzuwar mai dawo, a matsananci-high vacuum tsarin kullum bukatar a sanye take da solenoid bawul. (don hana gazawar wutar lantarki ta hanyar dawo da mai) da kuma sieve kwayoyin (tasirin adsorption).
A cikin 'yan shekarun nan, mafi yawan amfani da shi ne gungura bushe famfo.Amfani ne mai sauki don amfani da kuma ba ya koma man fetur, kawai famfo gudun da matuƙar vacuum ne dan kadan mafi muni fiye da na man-hatimi inji farashinsa.
Injin injina shine babban tushen hayaniya da rawar jiki a cikin dakin gwaje-gwaje kuma yana da kyau a zaɓi ƙaramin amo da sanya shi tsakanin kayan aiki inda zai yiwu, amma na ƙarshe ba sau da yawa ba sauƙin cimma ba saboda ƙuntatawar nesa na aiki.
II.Turbomolecular famfo
Turbo kwayoyin famfo sun dogara da manyan juzu'i masu jujjuyawa (yawanci kusan juyi 1000 a minti daya) don cimma kwararar iskar gas.Matsakaicin matsi na shayewar famfo zuwa matsa lamba mai shiga ana kiransa rabon matsawa.Matsakaicin matsawa yana da alaƙa da adadin matakai na famfo, saurin gudu da nau'in iskar gas, nauyin ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar cuta tana da girma.Matsakaicin injin famfo na turbomolecular gabaɗaya ana ɗaukarsa ya zama 10-9-10-10 mbar, kuma a cikin 'yan shekarun nan, tare da ci gaba da ci gaban fasahar famfo kwayoyin halitta, mafi ƙarancin injin ya ƙara inganta.
Kamar yadda fa'idodin famfo turbomolecular kawai ana gane su a cikin yanayin kwararar ƙwayoyin cuta (yanayin da ke gudana wanda matsakaicin matsakaicin kewayon ƙwayoyin iskar gas ya fi girman matsakaicin girman sashin giciye), famfo na farko-lokaci. tare da matsa lamba na 1 zuwa 10-2 Pa ana buƙata.Saboda saurin jujjuyawa na vanes, famfon kwayoyin halitta na iya lalacewa ko lalata su ta hanyar abubuwa na waje, jitter, tasiri, rawa ko girgiza gas.Ga masu farawa, mafi yawan abin da ke haifar da lalacewa shine girgiza gas wanda aka yi ta hanyar kurakurai na aiki.Hakanan ana iya haifar da lahani ga famfun kwayoyin halitta ta hanyar resonance ta hanyar famfo na inji.Wannan yanayin ba kasafai ba ne amma yana buƙatar kulawa ta musamman saboda ya fi yaudara kuma ba a iya gano shi cikin sauƙi.
III.ion famfo
Ka'idar aiki na famfon ion mai sputtering shine yin amfani da ions da aka samar da fitarwar Penning don yin bombard farantin titanium na cathode don samar da sabon fim ɗin titanium, don haka tallata iskar gas mai aiki kuma yana da wani tasirin binnewa akan iskar gas ɗin da ba a iya amfani da shi. .A abũbuwan amfãni daga sputtering ion farashinsa ne mai kyau matuƙar injin, babu vibration, babu amo, babu gurbatawa, wani balagagge da kuma barga tsari, babu goyon baya da kuma a guda famfo gudun (sai inert gas), su kudin ne da yawa m fiye da kwayoyin farashinsa. wanda ke sa su yi amfani da su sosai a cikin tsarukan matsananciyar iska.Yawancin lokaci al'ada aiki sake zagayowar na sputtering ion farashinsa ne fiye da shekaru 10.
Ion famfo gabaɗaya suna buƙatar zama sama da 10-7 mbar don yin aiki yadda ya kamata (aiki a mafi muni na vacuum yana rage rayuwarsu sosai) don haka yana buƙatar saitin famfo na ƙwayoyin cuta don samar da ingantaccen injin kafin mataki.Al'ada ce ta gama gari don amfani da famfon ion + TSP a cikin babban ɗakin da ƙaramin famfo na kwayoyin da aka saita a cikin ɗakin shiga.Lokacin yin burodi, buɗe bawul ɗin da aka haɗa da shi kuma bari ƙaramin saitin famfo na ƙwayoyin cuta ya samar da injin gaba.
Ya kamata a lura da cewa ion famfo ba su da ikon adsorption na inert gas da kuma iyakar yin famfo gudun daban-daban da ɗan da na kwayoyin famfo, sabõda haka, ga manyan outgassing juzu'i ko babban adadin inert iskar, kwayoyin famfo saitin da ake bukata.Bugu da ƙari, fam ɗin ion yana haifar da filin lantarki yayin aiki, wanda zai iya tsoma baki tare da tsarin kulawa na musamman.
IV.Titanium sublimation famfo
Titanium sublimation famfo suna aiki ta hanyar dogaro da fitar da titanium na ƙarfe don samar da fim ɗin titanium akan bangon ɗakin don chemisorption.Abubuwan da ake amfani da su na titanium sublimation pumps sune gine-gine masu sauƙi, ƙananan farashi, sauƙi mai sauƙi, babu radiation kuma babu sautin girgiza.
Titanium sublimation pumps yawanci sun ƙunshi filaye 3 titanium (don hana ƙonewa) kuma ana amfani da su a hade tare da famfo na kwayoyin ko ion don samar da kyakkyawan cirewar hydrogen.Su ne mafi mahimmancin famfunan injin famfo a cikin kewayon mbar 10-9-10-11 kuma an saka su a cikin mafi yawan ɗakuna masu matsananciyar matsananci inda ake buƙatar matakan vacuum.
Rashin hasara na famfo sublimation na titanium shine buƙatar sputtering na yau da kullun na titanium, injin yana raguwa da kusan umarni 1-2 na girma yayin sputtering (a cikin 'yan mintuna kaɗan), saboda haka wasu ɗakunan da ke da takamaiman buƙatu suna buƙatar amfani da NEG.Har ila yau, don samfurori / na'urori masu mahimmanci na titanium, ya kamata a kula da su don kauce wa wurin da ake da famfon sublimation na titanium.
V. Cryogenic famfo
Cryogenic famfo yawanci dogara a kan low zafin jiki adsorption jiki don samun injin, tare da abũbuwan amfãni daga high famfo gudun, babu gurbatawa da kuma high matuƙar injin.Babban abubuwan da ke shafar saurin bututun famfo na cryogenic sune zafin jiki da farfajiyar famfo.A cikin manyan na'urorin epitaxy na kwayoyin halitta, ana amfani da famfunan bututun kirar cryogenic saboda babban buƙatun vacuum.
Rashin amfanin famfunan cryogenic shine yawan amfani da nitrogen mai ruwa da tsadar aiki.Ana iya amfani da tsarin tare da sake zagayowar chillers ba tare da cinye nitrogen na ruwa ba, amma wannan yana haifar da matsalolin da suka dace na amfani da makamashi, rawar jiki da amo.Don haka, ba a cika amfani da famfunan cryogenic a cikin kayan aikin dakin gwaje-gwaje na al'ada ba.
VI.Matsakaicin famfo (NEG)
Tsotsa wakili famfo yana daya daga cikin mafi amfani injin famfo a cikin 'yan shekarun nan, da amfani shi ne cikakken amfani da sinadaran adsorption, babu tururi plating da electromagnetic gurbatawa, sau da yawa amfani da tare da kwayoyin farashinsa ya dauki wurin titanium sublimation farashinsa da sputtering ion. famfo, hasara shine babban farashi da iyakataccen adadin sabuntawa, yawanci ana amfani da su a cikin tsarin tare da manyan buƙatu don kwanciyar hankali ko tsananin kula da filayen lantarki.
Bugu da ƙari, kamar yadda famfo mai aspirator ba ya buƙatar ƙarin haɗin wutar lantarki fiye da kunnawa na farko, ana kuma amfani da shi a cikin manyan tsarin a matsayin famfo mai taimako don ƙara saurin yin famfo da kuma inganta matakan vacuum, wanda zai iya sauƙaƙe tsarin yadda ya kamata.
Hoto: Matsalolin aiki don nau'ikan famfo daban-daban.Kibau masu launin ruwan kasa suna nuna matsakaicin halaltaccen kewayon matsi na aiki kuma ɓangarorin kore masu ƙarfin hali suna nuna kewayon matsi na gama gari.
Lokacin aikawa: Nuwamba-18-2022