Hoʻohana maʻamau ʻia nā pumps i nā ʻōnaehana ʻūhā kiʻekiʻe kiʻekiʻe

I. Pume mīkini
ʻO ka hana koʻikoʻi o ka mīkini mīkini ka hāʻawi ʻana i ka ʻawaʻawa pre-stage pono no ka hoʻomaka ʻana o ka pā turbomolecular.ʻO nā pamu mīkini hoʻohana maʻamau ka nui o nā pamu maloʻo vortex, nā pamu diaphragm a me nā ʻaila i hoʻopaʻa ʻia.
He haʻahaʻa haʻahaʻa ka wikiwiki o ka pauma diaphragm a hoʻohana mau ʻia no nā pūʻulu molekala liʻiliʻi ma muli o ka liʻiliʻi.
ʻO ka pauma mechanical i hoʻopaʻa ʻia i ka aila ka mea i hoʻohana nui ʻia i ka wā i hala, i ʻike ʻia e ka wikiwiki pumping a me ka vacuum hope maikaʻi loa, ʻo ka hemahema ke ola maʻamau o ka hoʻihoʻi ʻana o ka aila, i nā ʻōnaehana ultra-kiʻekiʻe e pono e lako me ka solenoid valve. (no ka pale ʻana i ka pau ʻole o ka mana i hoʻihoʻi ʻia e ka ʻaila) a me ka kānana molekala (ka hopena adsorption).
I nā makahiki i hala iho nei, ʻoi aku ka nui o ka hoʻohana ʻana i ka paila maloʻo ʻōwili. He maʻalahi ka hoʻohana ʻana a ʻaʻole hoʻi e hoʻi i ka ʻaila, ʻo ka wikiwiki o ka pumping a me ka vacuum hope loa ʻoi aku ka maikaʻi ma mua o ka ʻaila-sealed mechanical pumps.
ʻO nā pumps mechanical kahi kumu nui o ka walaʻau a me ka haʻalulu i loko o ka hale hana a ʻoi aku ka maikaʻi o ke koho ʻana i kahi pamu haʻahaʻa haʻahaʻa a waiho i waena o nā mea hana inā hiki, akā ʻaʻole maʻalahi ka hopena ma muli o nā palena mamao o ka hana.
II.ʻO nā pumps Turbomolecular
Ke hilinaʻi nei nā ʻume molekole Turbo i nā ʻauwaʻa kaʻa wikiwiki (maʻamau ma kahi o 1000 mau kipi i kēlā me kēia minuke) no ka loaʻa ʻana o kahi kahe o ke kinoea.Ua kapa ʻia ka ratio o ka puʻe ʻana o ka pauma i ke kaomi inlet ʻo ka ratio compression.Hoʻopili ʻia ka lākiō hoʻopiʻi i ka helu o nā pae o ka pāpaʻi, ka wikiwiki a me ke ʻano o ke kinoea, ʻoi aku ka kiʻekiʻe o ke kaumaha molecular maʻamau.Manaʻo ʻia ʻo 10-9-10-10 mbar ka ʻūhā hope loa o ka pauma turbomolecular, a i nā makahiki i hala iho nei, me ka holomua mau ʻana o ka ʻenehana pauma molecular, ua hoʻomaikaʻi hou ʻia ka ʻenekema hope loa.
No ka mea, ʻike wale ʻia nā pōmaikaʻi o ka pauma turbomolecular i loko o ke kahe molecular state (kahi kahe ʻana i ʻoi aku ka nui o ka awelika manuahi o nā molekele kinoea ma mua o ka nui o ka nui o ka duct cross-section). me ke kaomi hana o 1 a 10-2 Pa pono.Ma muli o ke kiʻekiʻe o ka rotational wikiwiki o nā vanes, hiki ke hoʻopōʻino ʻia ka pauma molekala e nā mea ʻē aʻe, jitter, hopena, resonance a i ʻole hau hau.No ka poʻe hoʻomaka, ʻo ke kumu maʻamau o ka pōʻino ʻo ka haʻalulu kinoea ma muli o nā hewa hana.Hiki ke hoʻopōʻino ʻia ka pauma molekala ma muli o ka resonance i hoʻoulu ʻia e ka pauma mechanical.He ʻano kakaikahi kēia ʻano akā pono ka nānā kūikawā no ka mea ʻoi aku ka maʻalahi a ʻaʻole hiki ke ʻike maʻalahi.

III.Pume ion sputtering
ʻO ke kumu hana o ka pauma ion sputtering ʻo ia ka hoʻohana ʻana i nā ion i hana ʻia e ka Penning discharge e hoʻokuʻu i ka pā titanium o ka cathode e hana i kahi kiʻiʻoniʻoni titanium hou, no laila e hoʻopili i nā kinoea ikaika a loaʻa kekahi hopena kanu i nā kinoea inert pū kekahi. .ʻO nā mea maikaʻi o ka sputtering ion pumps he maikaʻi hope loa, ʻaʻohe vibration, ʻaʻohe walaʻau, ʻaʻohe pollution, kahi kaʻina oʻo a paʻa, ʻaʻohe mālama a ma ka wikiwiki o ka pumping (koe wale no nā kinoea inert), ʻoi aku ka haʻahaʻa o ko lākou kumukūʻai ma mua o nā molecular pumps. ʻo ia ka mea e hoʻohana nui ʻia ai i nā ʻōnaehana vacuum ultra-high.ʻO ka maʻamau, ʻoi aku ka nui o ka pōʻai hana maʻamau o nā puna ion sputtering ma mua o 10 mau makahiki.
ʻOi aku ka nui o nā pamu Ion ma luna o 10-7 mbar e hana pono (ʻo ka hana ʻana i nā ʻōpala ʻoi aku ka maikaʻi e hōʻemi i ko lākou ola ʻana) a no laila e pono ai i kahi hoʻonohonoho molecular pump e hāʻawi i kahi ʻōpala maikaʻi ma mua o ka pae.He hana maʻamau ka hoʻohana ʻana i ka pauma ion + TSP i loko o ke keʻena nui a me kahi pauma molekala liʻiliʻi i hoʻonohonoho ʻia i loko o ke keʻena inlet.I ka wā e kuke ai, e wehe i ka pahu hoʻokomo i hoʻopili ʻia a e hāʻawi i ka pahu molekala liʻiliʻi e hāʻawi i ka ʻōpala mua.
Pono e hoʻomaopopo ʻia ʻaʻole hiki ke hoʻopili i nā kinoea inert a ʻokoʻa ka wikiwiki o ka pauma molecular, no laila, no ka nui o ka hoʻoheheʻe ʻana a i ʻole ka nui o nā kinoea inert, pono kahi hoʻonohonoho molecular pump.Eia kekahi, hoʻopuka ka paila ion i kahi kahua electromagnetic i ka wā o ka hana, hiki ke hoʻopilikia i nā ʻōnaehana koʻikoʻi.
IV.ʻO nā paila sublimation Titanium
Hana ʻia nā pauma sublimation Titanium ma ka hilinaʻi ʻana i ka evaporation o ka titanium metala e hana i kahi kiʻiʻoniʻoni titanium ma nā paia keʻena no ka chemisorption.ʻO nā mea maikaʻi o ka titanium sublimation pumps he hana maʻalahi, haʻahaʻa haʻahaʻa, mālama maʻalahi, ʻaʻohe radiation a ʻaʻohe leo haʻalulu.
ʻO nā pauma sublimation Titanium he 3 mau filament titanium (e pale i ka puhi ʻana) a hoʻohana ʻia me ka hui pū ʻana me nā pauma molekala a i ʻole e hāʻawi i ka wehe ʻana i ka hydrogen maikaʻi loa.ʻO ia nā pāpaʻi koʻikoʻi koʻikoʻi ma ka laulā 10-9-10-11 mbar a ua hoʻokomo ʻia i loko o ka hapa nui o nā keʻena ʻāwīwī kiʻekiʻe kahi e koi ʻia ai nā pae kiʻekiʻe.
ʻO ka hemahema o ka titanium sublimation pumps ka mea e pono ai no ka sputtering maʻamau o ka titanium, e hoʻohaʻahaʻa ʻia ka vacuum ma kahi o 1-2 mau kauoha o ka nui i ka wā sputtering (i loko o kekahi mau minuke), no laila pono kekahi mau keʻena me nā pono kikoʻī e hoʻohana i ka NEG.no hoi, no ka titanium sensitive samples/devices, e mālama pono e pale aku i kahi o ka titanium sublimation pump.
V. Nā paila cryogenic
ʻO ka pauma Cryogenic e hilinaʻi nui i ka adsorption kino haʻahaʻa haʻahaʻa e loaʻa ai ka ʻōpala, me nā mea maikaʻi o ka wikiwiki pumping kiʻekiʻe, ʻaʻohe haumia a me ka vacuum hope loa.ʻO nā kumu nui e pili ana i ka wikiwiki o ka pauma cryogenic ka mahana a me ka ʻili o ka pā.I loko o nā ʻōnaehana epitaxy beam molecular nui, hoʻohana nui ʻia nā pamu cryogenic ma muli o nā koi ʻoi loa.
ʻO nā hemahema o nā pāpaʻu cryogenic ka nui o ka hoʻohana ʻana i ka nitrogen wai a me nā koina hana kiʻekiʻe.Hiki ke hoʻohana ʻia nā ʻōnaehana me ka recirculating chillers me ka ʻole o ka ʻai ʻana i ka nitrogen wai, akā lawe pū kēia i nā pilikia pili o ka hoʻohana ʻana i ka ikehu, haʻalulu a me ka walaʻau.No kēia kumu, ʻaʻole maʻamau ka hoʻohana ʻia ʻana o nā pamu cryogenic i nā mea hana hale hana maʻamau.
VI.ʻO nā paila aspirator (NEG)
ʻO ka pauma suction agent kekahi o nā pauma vacuum i hoʻohana nui ʻia i nā makahiki i hala iho nei, ʻo kona pōmaikaʻi ʻo ia ka hoʻohana piha ʻana i ka adsorption kemika, ʻaʻohe plating vapor a me electromagnetic pollution, hoʻohana pinepine ʻia me nā molecular pumps e lawe i kahi o ka titanium sublimation pumps a me ka sputtering ion. pumps, ʻo ka hemahema ke kumukūʻai kiʻekiʻe a me ka helu palena o ka regeneration, maʻamau i hoʻohana ʻia i nā ʻōnaehana me nā koi kiʻekiʻe no ka paʻa ʻana o ka vacuum a i ʻole ke koʻikoʻi i nā kahua electromagnetic.
Eia kekahi, no ka mea, ʻaʻole pono ka mana aspirator e hoʻohui i ka mana ma mua o ka hoʻāla mua ʻana, hoʻohana pinepine ʻia i nā ʻōnaehana nui e like me ka pump auxiliary e hoʻonui i ka wikiwiki o ka pumping a hoʻomaikaʻi i ka pae vacuum, hiki ke maʻalahi i ka ʻōnaehana.

Kiʻi: ʻO nā kaomi hana no nā ʻano pauma like ʻole.Hōʻike nā pua ʻeleʻele i ka nui o ke kaomi hana ʻae ʻia a ʻo nā ʻāpana ʻōmaʻomaʻo wiwo ʻole e hōʻike ana i ka laulā hana maʻamau.