Pumps feem ntau siv nyob rau hauv ultra-high lub tshuab nqus tsev

I. Mechanical twj
Lub luag haujlwm tseem ceeb ntawm lub tshuab nqus tsev twj tso kua mis yog muab qhov tsim nyog ua ntej lub tshuab nqus tsev rau qhov pib ntawm lub twj tso kua mis turbomolecular.Feem ntau siv cov twj siv tshuab muaj xws li cov twj vortex qhuav, diaphragm twj tso kua mis thiab roj ntim tshuab twj.
Diaphragm twj tso kua mis muaj cov twj tso kua mis qis thiab feem ntau yog siv rau cov twj tso kua mis molecular me me vim qhov me me.
Lub tshuab nqus tsev twj tso kua mis yog cov twj siv tshuab siv ntau tshaj plaws yav dhau los, uas yog lub tshuab nqus tsev loj thiab lub tshuab nqus tsev zoo, qhov tsis zoo yog qhov dav dav ntawm cov roj rov qab, nyob rau hauv lub tshuab nqus tsev ultra-siab feem ntau yuav tsum tau nruab nrog solenoid valve. (rau kev tiv thaiv lub zog tsis ua hauj lwm los ntawm cov roj rov qab) thiab molecular sieve (cov nyhuv adsorption).
Nyob rau hauv xyoo tas los no, qhov ntau siv yog scroll qhuav twj tso kua mis.Qhov kom zoo dua yog siv yooj yim thiab tsis rov qab mus rau cov roj, tsuas yog lub twj tso kua mis ceev thiab qhov kawg nqus tsev vacuum yog me ntsis phem dua li cov roj-sealed mechanical twj.
Cov twj siv tshuab yog lub hauv paus tseem ceeb ntawm lub suab nrov thiab kev vibration hauv chav kuaj thiab nws yog qhov zoo dua los xaiv lub twj tso kua mis suab nrov thiab muab tso rau ntawm cov khoom siv thaum ua tau, tab sis qhov tom kawg feem ntau tsis yooj yim rau kev ua tiav vim muaj kev txwv tsis pub ua haujlwm.
II.Turbomolecular twj tso kua mis
Turbo molecular twj tso siab rau kev kub ceev rotating vanes (feem ntau nyob ib ncig ntawm 1000 revolutions ib feeb) kom ua tiav cov kev taw qhia ntawm cov roj.Qhov ratio ntawm lub twj tso kua mis tso siab rau lub inlet siab yog hu ua compression ratio.Qhov sib piv compression muaj feem xyuam rau cov theem ntawm lub twj tso kua mis, qhov ceev thiab hom roj, qhov hnyav molecular ntawm cov roj compression kuj siab.Lub tshuab nqus tsev qhov kawg ntawm lub twj tso kua mis turbomolecular feem ntau suav tias yog 10-9-10-10 mbar, thiab nyob rau xyoo tas los no, nrog kev nce qib ntawm cov tshuab molecular twj tso kua mis, lub tshuab nqus tsev qhov kawg tau txhim kho ntxiv.
Raws li qhov zoo ntawm lub twj tso kua mis turbomolecular tsuas yog pom tau nyob rau hauv lub xeev molecular flow (lub xeev ntws nyob rau hauv uas qhov nruab nrab ntawm cov pa roj molecules muaj ntau dua li qhov siab tshaj plaws ntawm cov kav dej hla ntu), lub tshuab nqus tsev ua ntej theem. nrog rau kev khiav hauj lwm siab ntawm 1 mus rau 10-2 Pa yog yuav tsum tau.Vim muaj kev sib hloov ceev ntawm lub vanes, lub twj tso kua mis molecular tuaj yeem raug puas lossis puas los ntawm cov khoom txawv teb chaws, jitter, cuam tshuam, resonance lossis gas shock.Rau cov pib tshiab, feem ntau ua rau muaj kev puas tsuaj yog gas shock tshwm sim los ntawm kev ua haujlwm yuam kev.Kev puas tsuaj rau lub twj tso kua mis molecular kuj tuaj yeem tshwm sim los ntawm resonance tshwm sim los ntawm lub tshuab twj tso kua mis.Tus mob no kuj tsis tshua muaj tab sis yuav tsum tau saib xyuas tshwj xeeb vim nws yog insidious ntau thiab tsis yooj yim nrhiav tau.

III.Sputtering ion twj tso kua mis
Lub hauv paus ntsiab lus ntawm kev ua haujlwm ntawm lub twj tso kua mis sputtering ion yog siv cov ions tsim los ntawm Penning tso tawm los ua cov titanium phaj ntawm cathode los tsim cov yeeb yaj kiab titanium tshiab, yog li adsorbing cov roj nquag thiab muaj qee yam kev faus rau ntawm cov roj inert thiab. .Qhov zoo ntawm sputtering ion twj tso kua mis yog qhov zoo tshaj plaws nqus tsev vacuum, tsis muaj kev vibration, tsis muaj suab nrov, tsis muaj kuab paug, ib tug paub tab thiab ruaj khov txheej txheem, tsis muaj txij nkawm thiab nyob rau tib lub twj tso kua mis ceev (tshwj tsis yog rau inert gases), lawv cov nqi qis dua molecular twj, uas ua rau lawv tsis tshua muaj siv nyob rau hauv ultra-high nqus tshuab.Feem ntau qhov kev ua haujlwm ib txwm ua ntawm sputtering ion twj yog ntau tshaj 10 xyoo.
Ion twj feem ntau yuav tsum tau siab dua 10-7 mbar kom ua haujlwm zoo (ua haujlwm ntawm lub tshuab nqus tsev tsis zoo txo ​​lawv lub neej) thiab yog li xav tau lub twj tso kua mis molecular los muab lub tshuab nqus tsev zoo ua ntej.Nws yog ib qho kev xyaum siv lub twj tso kua mis ion + TSP nyob rau hauv lub chamber loj thiab lub twj tso kua mis molecular me me nyob rau hauv lub inlet chamber.Thaum ci, qhib qhov txuas txuas txuas thiab cia lub twj tso kua mis molecular me me muab lub tshuab nqus tsev rau pem hauv ntej.
Nws yuav tsum tau muab sau tseg tias ion twj tso kua mis tsis muaj peev xwm ntawm adsorption ntawm inert gases thiab lawv qhov siab tshaj plaws twj tso kua mis sib txawv me ntsis ntawm cov twj molecular, yog li ntawd rau loj outgassing ntim los yog loj npaum li cas ntawm inert gases, yuav tsum tau ib lub twj tso kua mis molecular.Tsis tas li ntawd, lub twj tso kua mis ion ua rau lub tshuab hluav taws xob hauv lub sijhawm ua haujlwm, uas tuaj yeem cuam tshuam rau cov tshuab tshwj xeeb.
IV.Titanium sublimation twj tso kua mis
Titanium sublimation twj ua hauj lwm los ntawm kev cia siab rau lub evaporation ntawm hlau titanium los tsim ib tug titanium zaj duab xis ntawm lub chamber phab ntsa rau chemisorption.Qhov zoo ntawm titanium sublimation twj tso kua mis yog kev tsim kho yooj yim, tus nqi qis, kev saib xyuas yooj yim, tsis muaj hluav taws xob thiab tsis muaj suab nrov.
Titanium sublimation twj feem ntau muaj 3 titanium filaments (kom tiv thaiv kev kub hnyiab) thiab siv ua ke nrog cov twj molecular lossis ion twj tso kua mis los muab kev tshem tawm hydrogen zoo heev.Lawv yog cov tshuab nqus tsev tseem ceeb tshaj plaws nyob rau hauv 10-9-10-11 mbar ntau yam thiab haum rau hauv feem ntau lub tshuab nqus tsev vacuum uas yuav tsum muaj qib siab.
Qhov tsis zoo ntawm titanium sublimation twj tso kua mis yog qhov yuav tsum tau ua kom tsis tu ncua ntawm titanium, lub tshuab nqus tsev tsis zoo li ntawm 1-2 qhov kev txiav txim siab thaum lub sij hawm sputtering (tsis pub dhau ob peb feeb), yog li qee chav nrog cov kev xav tau tshwj xeeb yuav tsum tau siv NEG.kuj, rau titanium rhiab cov qauv / khoom siv, yuav tsum tau saib xyuas kom tsis txhob muaj qhov chaw ntawm titanium sublimation twj tso kua mis.
V. Cryogenic twj tso kua mis
Cryogenic cov twj tso kua mis tsuas yog tso siab rau qhov kub thiab txias lub cev adsorption kom tau txais lub tshuab nqus tsev, nrog rau qhov zoo ntawm kev siv siab ceev, tsis muaj kuab paug thiab lub tshuab nqus tsev siab kawg.Lub ntsiab tseem ceeb cuam tshuam rau kev siv ceev ceev ntawm cov twj tso kua mis cryogenic yog qhov kub thiab txias ntawm lub twj tso kua mis.Hauv cov kab hluav taws xob loj molecular epitaxy, cov twj tso kua mis cryogenic tau dav siv vim qhov siab kawg ntawm lub tshuab nqus tsev.
Qhov tsis zoo ntawm cov twj tso kua mis cryogenic yog kev noj cov kua nitrogen ntau thiab cov nqi khiav haujlwm siab.Cov tshuab nrog recirculating chillers tuaj yeem siv tsis tas siv cov kua nitrogen, tab sis qhov no coj nrog nws cov teeb meem sib xws ntawm kev siv zog, kev co thiab suab nrov.Vim li no, cov twj tso kua mis cryogenic tsis tshua siv nyob rau hauv cov khoom siv kuaj pom.
VI.Aspirator Pumps (NEG)
Suction agent twj tso kua mis yog ib lub tshuab nqus tsev twj siv ntau tshaj nyob rau hauv xyoo tas los no, nws qhov zoo dua yog kev siv cov tshuaj adsorption tag, tsis muaj vapor plating thiab electromagnetic muaj kuab paug, feem ntau siv nrog cov twj molecular mus rau qhov chaw ntawm titanium sublimation twj thiab sputtering ion. cov twj tso kua mis, qhov tsis zoo yog tus nqi siab thiab tsawg tsawg ntawm cov khoom siv rov ua dua tshiab, feem ntau yog siv rau hauv cov tshuab uas xav tau siab rau lub tshuab nqus tsev ruaj khov lossis siab heev rau electromagnetic teb.
Tsis tas li ntawd, raws li lub twj tso kua mis aspirator yuav tsum tsis muaj kev sib txuas ntxiv ntawm lub tshuab hluav taws xob tshaj li qhov pib ua kom tiav, nws kuj tau siv ntau zaus hauv cov tshuab loj ua lub twj tso kua mis txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm

Daim duab : Ua haujlwm siab rau ntau hom twj.Cov xub xim av qhia qhov siab tshaj plaws tso cai rau kev khiav hauj lwm siab ntau thiab cov khoom ntsuab ntsuab qhia txog kev ua haujlwm siab ntau.