Ihe nfuli EV series compound molecular nfuli gosiputara onyonyo

EV usoro ngwakọta molekụla nfuli

Nkọwa dị mkpirikpi:

EV-usoro compound molekul nfuli mejupụtara turbo molekul nfuli na disk traction nfuli.Ha nwere njirimara nke ngwa ngwa mgbapụta dị elu, oke mkpakọ dị elu, oke mgbapụta ọsọ na oke mkpakọ na nrụgide dị elu, ma gbasaa ngwa ngwa nke nfuli molecular. The compound molecular pump enweghị selectivity na ebe nchekwa mmetụta na pumped gas.N'ihi oke mkpakọ ya na gas nwere nnukwu ibu molekụla, mgbapụta ahụ nwere ike nweta oghere dị elu dị elu na nke dị elu na-enweghị ọnyà oyi na mmanu mmanụ.A na-eji ya n'ọtụtụ ebe dị iche iche nke ngwá electronic, metallurgy, ụlọ ọrụ kemịkalụ, nchọpụta sayensị na teknụzụ agụụ.

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Data teknụzụ usoro EV

Nlereanya		EV-600 EV-600F		EV-1200 EV-1200F		EV-1600 EV-1600F
Flange mbata (mm)		150 CF	160 ISO-K	200 CF	200 ISO-K	250 CF	250 ISO-K
Flange ọpụpụ (mm)		40KF		40KF		50KF
Ọsọ mgbapụta (L/S)		600		1200		1600
Oke mkpakọ	N²	>10⁹		>10⁹		>10⁹
	H²	> 8X10³		> 1X10⁴		> 1X10⁴
Oke Vacuum(Pa)		<8X10^-8	<5X10^-7	<8X10^-8	<5X10^-7	<8X10^-8	<5X10^-7
Ọsọ ntụgharị (rpm)		24000		24000		24000
Mmaji		≤0.1 μm		≤0.1 μm		≤0.15 μm
Oge ngwụcha (nkeji)		<4.5		<5		<6
Pump nkwado		4-8 L/S		8-15 L/S		15 L/S
Ụzọ jụrụ oyi		Mmiri (ikuku) jụrụ oyi		Mmiri (ikuku) jụrụ oyi		Mmiri (ikuku) jụrụ oyi
Okpomọkụ mmiri jụrụ oyi (℃)		≤20		≤20		≤20
Okpomọkụ gburugburu (℃)		≤35		≤35		≤35
Ọnụego mmiri jụrụ oyi		1-2 L/min		1-2 L/min		1-2 L/min
Ọnọdụ okpomọkụ (℃)		<120		<120		<120
Ike ikpo ọkụ (w)		<250		<300		<300
Ihe ntinye ọkụ ọkụ (v)		AC220		AC220		AC220
Ịkwanye		kwụ ọtọ ±5°		kwụ ọtọ ±5°		kwụ ọtọ ±5°
Arọ(kg)		≈25		≈29		≈31

Usoro Mgbapụta ikuku nke Ngwakọta
Mgbapụta molekụla

EV usoro ngwakọta ihe nfuli molekụla (1)

Usoro mkpakọ nke nitrogen na hydrogen
site ngwakọta molekụla mgbapụta

Nrụnye EV Series Dimension Table of compound Molecular Pump

Nlereanya	EV-600		EV-1200			EV-1600
Flange mbata (mm)	150 CF	160 ISO-K	200 CF		200 ISO-K	250 CF	250 ISO-K
D1	Φ202	Φ180	Φ253		Φ240	Φ305	Φ290
D2	Φ212	Φ212	Φ237		Φ237	Φ274	Φ274
D3	Φ236	Φ236	Φ266		Φ266	Φ296	Φ296
D4	¨ 145,7	¨ 145,7	¨ 167.6		¨ 167.6	¨ 183.9	¨ 183.9
H1	375	375	405		405	393	393
H2	235	235	265		265	250	250
H3	238	238	265		265	250	250
H4	108	108	113		113	110	110
H5	4	4	19		19	16	16
L1	130	130	145		145	160	160
L2	137	137	152		152	176	176
Pump ụkwụ ịghasa oghere	4-M8	4-M8	4-M8		4-M8	4-M8	4-M8
Flange ọpụpụ (mm)	KF40	KF40	KF40	KF40		KF50	KF50

EV Series ikuku jụrụ oyi ngwakọta Molecular nfuli

EV-usoro ikuku jụrụ oyi molekul mgbapụta bụ nke nwere turbomolecular mgbapụta na diski traction mgbapụta.Ọ nwere njirimara nke oke mgbapụta ọsọ na mkpakọ maka molecular eruba nke turbomolecular mgbapụta, elu mgbapụta ọsọ na mkpakọ ruru maka elu mgbali nke traction mgbapụta, na-agbasa ngwa ngwa nke molekul mgbapụta.
Ihe mgbapụta molecular na-emepụta enweghị nhọrọ na mmetụta ebe nchekwa na gas na-agbapụta.N'ihi oke mkpakọ ya na gas nwere nnukwu ibu molekụla, mgbapụta ahụ nwere ike nweta oghere dị elu dị elu na nke dị elu na-enweghị ọnyà oyi na mmanu mmanụ.A na-eji ya n'ọtụtụ ebe dị iche iche nke ngwá electronic, metallurgy, ụlọ ọrụ kemịkalụ, nchọpụta sayensị na teknụzụ agụụ.

Nlereanya	EV-600F		EV-1200F		EV-1600F
Flange mbata (mm)	150 CF	160 ISO-K	200 CF	200 ISO-K	250 CF	250 ISO-K
D1	Φ202	Φ180	Φ253	Φ240	Φ305	Φ290
D2	Φ236	Φ236	Φ266	Φ266	Φ274	Φ274
D3	¨ 145,7	¨ 145,7	¨ 167.6	¨ 167.6	¨ 183.8	¨ 183.8
H1	455	455	472	472	465	465
H2	217.5	217.5	210	210	214.5	214.5
H3	151	151	151	151	153	153
L1	130	130	145	145	161	161
L2	137	137	152	152	166	166
Pump ụkwụ ịghasa oghere	4-M8	4-M8	4-M8	4-M8	4-M8	4-M8