EV usoro turbo molekụla mgbapụta
Akụkụ profaịlụ na ntinye njikọ nke nfuli turbo-molecular
The Velocity Curve of Turbo molecular pump
na-agbapụta nitrogen na hydrogen
Ọsọ ọsọ nke molecular Turbo
mgbapụta na ikuku
Data teknụzụ EV-3600
Flange mbata (mm) | 400 ISO - K | |
Flange ọpụpụ (mm) | 100 ISO - K | |
Ọnụego mgbapụta (L/S) | 3600 | |
Oke mkpakọ | N2 | >108 |
H2 | > 5X102 | |
Nrụgide kachasị (Pa) | <2X10-6 | |
Enyere ọsọ ọsọ (rpm) | 13500 | |
Mmaji | ≤0.15 μm | |
Oge mmalite (min) | <11 | |
Oge nkwụsị (min) | <20 | |
Mgbapụta rotary tụrụ aro | 30-70 L/S | |
Ụzọ jụrụ oyi | Mmiri jụrụ oyi | |
Okpomọkụ nke mmiri jụrụ oyi (℃) | ≤25 | |
Ntugharị nke mmiri jụrụ oyi (L/min) | 2 | |
Mgbapụta Okpomọkụ Isi Nri | <120℃ | |
Ụdị nwụnye | kwụ ọtọ ±5° | |
Arọ (kg) | ≈100 |
Dee ozi gị ebe a ziga anyị ya