Onye na-ahụ maka ịgba ọsọ Mass Mass Flow Mita CS200
Atụmatụ
1. Nzaghachi dị elu na ngwa ngwa
A na-emeziwanye izi ezi nke CS200 MFC na ± 1.0% nke SP, na ụdị kachasị elu nwere oge nzaghachi nke na-erughị 0.8 sec.
2. Obere efu efu na ọnụọgụ ọkụ
Mepụta teknụzụ sensọ ọhụrụ na-enyere CS200 MFC aka ịkwado nkwụsi ike yana iguzogide mgbanwe okpomọkụ.Enweghị ampilifaya efu akpaaka, efu efu efu erughị 0.6% FS / afọ, yana ọnụọgụ okpomọkụ erughị 0.02% FS/℃ (efu) ，0.05% FS/ ℃ (span).
3. Ụdị Metal-Sealed na Ịdị ọcha dị elu
Ejiri igwe anaghị agba nchara na-agafe n'elu CS200 MFC ụzọ eruba mmiri mmiri.A na-agbakọta CS200 MFC niile na Sevenstar's ultraclean Class 100 dị ọcha dịka ụkpụrụ SEMI na ISO 9001 siri dị.
4. Interface dakọtara
CS200 MFC dakọtara na oghere ndị a, nke onye ahịa nwere ike ịhọrọ: ± 8V-± 16V ọkụ ọkụ okpukpu abụọ na + 14V-+ 28V otu-ọgwụgwụ ike ọkọnọ;ntinye na ntinye akara dijitalụ ma ọ bụ analog;SEMI ọkọlọtọ n'ibu akụkụ;na RS-485 ma ọ bụ DeviceNet modul nkwukọrịta.
5. Ọrụ dị iche iche
Akụrụngwa ndị ahịa dị ike na-abịa ọkọlọtọ na ụdị ọ bụla, ebe ọrụ ndị ọzọ dị ka multi-gas，multi-bange， auto-efu, Mkpu, mmalite nro na igbu oge dị ka nhọrọ ndị ahịa.
Nkọwapụta
| CS200 | |||||||
| Ụdị | CS200A | CS200C | CS200D | ||||
| Ọnụ ọgụgụ zuru oke (N2) | (0～5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| izi ezi | ± 1.0% SP (≥35% FS) ± 0.35% FS?(＜35% FS) | ||||||
| Linearity | ± 0.5% FS | ||||||
| Nkwagharị ugboro ugboro | ± 0.2% FS | ||||||
| Oge nzaghachi | ≤1 nkeji | ≤0.8 sk (SEMI E17-0600) | |||||
| Ọnọdụ izu ike Valve | A na-emechikarị ma ọ bụ | Enweghị Valve | A na-emechikarị ma ọ bụ | Enweghị Valve | A na-emechikarị ma ọ bụ | Enweghị Valve | |
| Na-emepekarị (100 sccm≤FS≤5 slm) | Na-emepekarị (100 sccm≤FS≤5 slm) | Na-emepekarị (100 sccm≤FS≤5 slm) | |||||
| Mmetụta dị iche iche | 0.05 ~ 0.35MPa (Flow≤10slm) | .0.02MPa | (0.05 ~ 0.35) MPa (≤10slm) | .0.02MPa | (0.05 ~ 0.35) MPa (≤10slm) | .0.02MPa | |
| 0.1 ~ 0.35MPa (10slm | Flow≤30slm) | (0.1 ~ 0.35) MPa (10slm) | (0.1 ~ 0.35) MPa (10slm) | |||||
| 0.2 ~ 0.45MPa (na-aga: 30slm) | |||||||
| Nrụgide arụ ọrụ kacha | 0.45MPa | |||||
| Okpomọkụ | efu:≤±0.05% FS/℃; | efu:≤±0.02% FS/℃;Ogologo oge: ≤± 0.05% FS/℃ | ||||
| Ọnụọgụ | Ogologo oge: ≤± 0.1% FS/℃（Flow≤30slm) | |||||
| Ogologo oge: ≤± 0.2% FS/℃（Flow>30slm) | ||||||
| Ngosipụta Nrụgide | 3MPa (pisg 435) | |||||
| Ihe efu efu | .0.6% FS kwa afọ na-enweghị autozero | |||||
| Nkwụsị ntụkwasị obi | 1×10-9 atm·cc / sk Ọ | 1×10-10atm·cc / sk Ọ | ||||
| Ngwa mmiri mmiri | Viton; | Ọla? (igwe anaghị agba nchara V/V, 5Ra) | Ọla | |||
| Chemistry dị n'elu | —— | Ọnụọgụ Cr/Fe ：2.0;Ọkpụrụkpụ CroO: 20 Angstroms | ||||
| Emecha elu elu | 25Ra | 10 Ra | 25Ra | |||
| Okpomọkụ arụ ọrụ | (5 45 ℃ | (0 ~ 50 ℃ | ||||
| Ntinye nrịbama | Dijitalụ: RS485 ma ọ bụ ProfiBus | N/A | Dijitalụ: RS485 ma ọ bụ ProfiBus ma ọ bụ DeviceNetTM | N/A | Digital:RS485 ma ọ bụ ProfiBus ma ọ bụ DeviceNetTM | N/A |
| ma ọ bụ DeviceNetTM | Analog: (0～5)VDC ma ọ bụ (4～20)mA ma ọ bụ (0～20)mA | Analog: (0～5)VDC ma ọ bụ (4～20)mA?ma ọ bụ (0～20)mA | |||||
| Analog: (0～5) VDC ma ọ bụ (4～20) mA ma ọ bụ (0～20) mA | |||||||
| Mgbama ngosi mmepụta | Dijitalụ: RS485 ma ọ bụ DeviceNetTM ma ọ bụ ProfiBus Analog: (0～5) VDC ma ọ bụ (4～20) mA ma ọ bụ (0～20) mA | ||||||
| Ịnye ọkụ | ± 8 ~ ± 16 VDC ma ọ bụ +14 ~ +28 VDC (400mA) | ||||||
| Njikọ eletrik | 9 pin nwoke sub-D ，15 pin nwoke sub-D ， DeviceNetTM,ProfiBus, Analog | ||||||
| Ngwakọta | VCR1/4" M; VCO1/4" M; | VCR1/4” M; | |||||
| Ngwakọta mkpakọ Φ10; Mkpakọ mkpakọ Φ6; | Ngwakọta mkpakọΦ6, | ||||||
| Mkpakọ mkpakọ 3/8";Ngwakọta mkpakọ 1/4 "; | Ngwakọta mkpakọΦ3, | ||||||
| Mkpakọ mkpakọ 1/8";Ngwakọta mkpakọ Φ3; | Ngwakọta mkpakọ 1/4" | ||||||
| Ф6 (n'ime) × 1 hose; ф5 (n'ime) × 1.5hose; ф4 (n'ime) × 1 hose; | W-akara | ||||||
| A-sael ; | C-akara | ||||||
| Ibu | 1 n'arọ | 0.8kg | 1.2kg | 1 n'arọ | 1.2kg | 1 n'arọ | |
