Pumps ndị a na-ejikarị na sistemu oghere dị oke elu

I. Igwe nfuli igwe
Ọrụ bụ isi nke mgbapụta igwe na-arụ ọrụ bụ inye oghere dị mkpa tupu ọkwa ọkwa maka mmalite nke mgbapụta turbomolecular.Nfuli igwe a na-ejikarị eme ihe na-agụnye nfuli ọkpọ nkụ vortex, nfuli diaphragm na nfuli igwe ejiri akara mmanụ.
Nfuli nfuli diaphragm nwere obere mgbapụta na-agba ọsọ ma na-ejikarị eme ihe maka obere mgbapụta molecular n'ihi obere nha.
The mmanụ-akara igwe mgbapụta bụ ihe kasị eji n'ibu mgbapụta n'oge gara aga, e ji nnukwu mgbapụta ọsọ na ezi ohere ohere, mwepu bụ n'ozuzu ịdị adị nke mmanụ nloghachi, na ultra-elu agụụ usoro n'ozuzu mkpa ka kwadebere na solenoid valvụ. (maka igbochi ike mberede mberede kpatara nlọghachi mmanụ) na sieve molecular (mmetụta adsorption).
N'ime afọ ndị na-adịbeghị anya, nke a na-ejikarị eme ihe bụ mpịakọta akọrọ ọkpọkọ. Ihe bara uru dị mfe iji mee ihe ma ghara ịlaghachi na mmanụ, naanị ịgbapụta ọsọ na njedebe kachasị dị njọ karịa nke nfuli ígwè ọrụ mmanụ na-ekpuchi mmanụ.
Igwe nfuli igwe bụ isi iyi nke mkpọtụ na ịma jijiji na ụlọ nyocha na ọ ka mma ịhọrọ mgbapụta mkpọtụ dị ala ma tinye ya n'etiti akụrụngwa ebe enwere ike, mana nke ikpeazụ anaghị adịkarị mfe inweta n'ihi mmachi ọrụ anya.
II.Nfuli turbomolecular
Nfuli molekụla Turbo na-adabere na vanes na-agbagharị ọsọ dị elu (na-emekarị mgbanwe mgbanwe 1000 kwa nkeji) iji nweta usoro ntụgharị nke gas.A na-akpọ oke nrịba ike nke mgbapụta mgbapụta na nrụnye ntinye aka nke mkpakọ.Njikọ mkpakọ metụtara ọnụ ọgụgụ nke ọkwa nke mgbapụta ahụ, ọsọ ọsọ na ụdị gas, mkpokọta molecular arọ nke mkpakọ gas dị oke elu.A na-ewerekarị oghere kacha nke mgbapụta turbomolecular dị ka 10-9-10-10 mbar, na n'afọ ndị na-adịbeghị anya, na ọganihu na-aga n'ihu nke teknụzụ mgbapụta molecular, a na-emeziwanye oghere kacha mma.
Dị ka uru nke a turbomolecular mgbapụta na-ghọtara naanị na a molekụla eruba steeti (a eruba ala nke nkezi free nso nke gas ụmụ irighiri ihe dị ukwuu karịa nke kacha size nke duct cross-ngalaba), a tupu ogbo agụụ mgbapụta. na nrụgide ọrụ nke 1 ruo 10-2 Pa chọrọ.N'ihi nnukwu ngbanwe ọsọ nke vanes, mgbapụta molekụla nwere ike mebie ma ọ bụ mebie ya site na ihe ndị si mba ọzọ, jitter, mmetụta, resonance ma ọ bụ ujo gas.Maka ndị mbido, ihe kachasị akpata mmebi bụ ujo gas kpatara njehie arụ ọrụ.Enwere ike ime mmebi nke mgbapụta molecular site na resonance na-ebute site na mgbapụta igwe.Ọnọdụ a dị ụkọ mana ọ chọrọ nlebara anya pụrụ iche n'ihi na ọ na-adị aghụghọ karịa na ọ naghị adị mfe ịchọpụta ya.

III.Mgbapụta ion mgbapụta
Ụkpụrụ na-arụ ọrụ nke mgbapụta ion ion sputtering bụ iji ions nke Penning na-emepụta na-atụba efere titanium nke cathode iji mepụta ihe nkiri titanium ọhụrụ, si otú a na-eme ka gas na-arụ ọrụ na-enwe mmetụta ili na gas inert. .Uru nke sputtering ion nfuli dị mma kacha agụụ, ọ dịghị vibration, ọ dịghị mkpọtụ, dịghị mmetọ, a tozuru okè na kwụsiri ike usoro, ọ dịghị mmezi na otu mgbapụta ọsọ (ma e wezụga maka inert gas), ha na-eri bụ nnọọ ala karịa molekụla nfuli. nke na-eme ka a na-eji ha eme ihe n'ọtụtụ ebe na sistemu oghere dị oke elu.Na-emekarị okirikiri ọrụ nkịtị nke sputtering ion nfuli bụ ihe karịrị 10 afọ.
Igwe nfuli ion n'ozuzu kwesịrị ịdị n'elu 10-7 mbar ka ọ rụọ ọrụ nke ọma (ịrụ ọrụ na oghere ka njọ na-ebelata oge ndụ ha nke ukwuu) ya mere achọrọ mgbapụta molekụla iji nye ezigbo oghere tupu ogbo.Ọ bụ ihe a na-emekarị iji mgbapụta ion + TSP n'ime nnukwu ọnụ ụlọ yana obere mgbapụta molecular nke etinyere na ọnụ ụlọ ntinye.Mgbe ị na-esi nri, mepee valvụ ntinye ejikọrọ ma hapụ obere mgbapụta molekụla ahụ nye oghere ihu.
Ekwesiri ighota na nfuli ion enweghi ike igbasa gas inert na oke ngbaputa ha di iche na nke nfuli molecular, nke mere na n'ihi na n'ihi na nnukwu outgassing mpịakọta ma ọ bụ nnukwu ichekwa gas inert, a molecular mgbapụta set chọrọ.Na mgbakwunye, mgbapụta ion na-emepụta oghere electromagnetic mgbe ọ na-arụ ọrụ, nke nwere ike igbochi sistemụ nwere mmetụta pụrụ iche.
IV.Titanium sublimation nfuli
Titanium sublimation nfuli na-arụ ọrụ site na-adabere na evaporation nke metallic titanium na-emepụta ihe nkiri titanium na mgbidi ụlọ maka chemisorption.Uru nke nfuli sublimation titanium bụ ihe owuwu dị mfe, ọnụ ala dị ala, mmezi dị mfe, enweghị radieshon na enweghị mkpọtụ mkpọtụ.
Titanium sublimation nfuli na-enwekarị 3 titanium filaments (iji gbochie ọkụ ọkụ) ma na-ejikọta ya na molekul ma ọ bụ ion nfuli iji nye ezigbo mwepụ hydrogen.Ha bụ nfuli oghere kachasị mkpa na mpaghara 10-9-10-11 mbar ma tinye ya n'ọtụtụ ọnụ ụlọ ultra-high vacuum ụlọ ebe achọrọ ọkwa dị elu.
Mwepu nke titanium sublimation nfuli bụ mkpa maka mgbe sputtering nke titanium, agụụ na-akawanye site banyere 1-2 iwu nke ịdị ukwuu n'oge sputtering (n'ime a nkeji ole na ole), ya mere ụfọdụ ụlọ nwere kpọmkwem mkpa chọrọ iji NEG.Ọzọkwa, maka titanium mmetụta samples / ngwaọrụ, ekwesịrị ka kpachara anya iji zere ebe nke titanium sublimation mgbapụta.
V. Igwe nfuli cryogenic
Igwe nfuli Cryogenic na-adabere na mgbasa ozi anụ ahụ dị ala iji nweta ohere, yana uru nke oke ịgbapụta ọsọ, enweghị mmetọ na oke agụụ.Isi ihe na-emetụta ngwa ngwa mgbapụta nke nfuli cryogenic bụ okpomọkụ na mpaghara elu nke mgbapụta ahụ.N'ime sistemu epitaxy molecular beam beam, a na-eji nfuli cryogenic eme ihe n'ọtụtụ ebe n'ihi oke agụụ kacha mkpa.
Ọdịmma nke nfuli cryogenic bụ oke oriri nke nitrogen mmiri mmiri na ụgwọ ọrụ dị elu.Enwere ike iji sistemu nwere chillers na-emegharị ahụ na-ejighi mmiri mmiri nitrogen, mana nke a na-ebute nsogbu ndị kwekọrọ na oriri ike, ịma jijiji na mkpọtụ.N'ihi nke a, a na-ejikarị nfuli cryogenic eme ihe na ngwa ụlọ nyocha.
VI.Igwe nfuli mmiri (NEG)
Suction gị n'ụlọnga mgbapụta bụ otu n'ime ihe eji agụụ nfuli na-adịbeghị anya, ya uru bụ zuru ezu ojiji nke chemical adsorption, ọ dịghị vepo plating na electromagnetic mmetọ, na-ejikarị na njikọ na molekụla nfuli na-ebe titanium sublimation nfuli na sputtering ion. nfuli, mwepu bụ ọnụ ahịa dị elu na ọnụ ọgụgụ dị nta nke mmeghari ohuru, nke a na-ejikarị na sistemụ nwere nnukwu ihe achọrọ maka nkwụsi ike agụụ ma ọ bụ na-enwe mmetụta dị ukwuu na mpaghara electromagnetic.
Tụkwasị na nke ahụ, dị ka mgbapụta aspirator na-achọghị njikọ ọkụ ọkụ ọzọ karịa mmalite mmalite, a na-ejikarị ya na nnukwu usoro dị ka mgbapụta inyeaka iji mee ka mgbapụta na-agbapụta ọsọ ọsọ ma melite ọkwa oghere, nke nwere ike ime ka usoro ahụ dị mfe.

Ọnụ ọgụgụ: Nrụgide ọrụ maka ụdị nfuli dị iche iche.Àkụ na-acha aja aja na-egosi oke nrụgide arụ ọrụ nwere ike ime yana akụkụ akwụkwọ ndụ akwụkwọ ndụ nwere obi ike na-egosi oke nrụgide arụ ọrụ.