Pompa molekul senyawa seri EV
Data Teknis EV-seri
Model | EV-600 EV-600F | EV-1200 EV-1200F | EV-1600 EV-1600F | ||||
Flange Inlet (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
Outlet Flange (mm) | 40 KF | 40 KF | 50 KF | ||||
Kacepetan Pompa (L/S) | 600 | 1200 | 1600 | ||||
Rasio Kompresi | N2 | > 109 | > 109 | > 109 | |||
H2 | > 8X103 | > 1X104 | > 1X104 | ||||
Vakum Ultimate (Pa) | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | |
Kacepetan rotasi (rpm) | 24000 | 24000 | 24000 | ||||
Getaran | ≤0,1 μm | ≤0,1 μm | ≤0,15 μm | ||||
Wektu Run-up (min) | <4.5 | <5 | <6 | ||||
Backing Pump Kab | 4-8 L/S | 8-15 L/S | 15 L/S | ||||
Metode Cooling | Banyu (udhara) cooling | Banyu (udhara) cooling | Banyu (udhara) cooling | ||||
Suhu banyu adhem (℃) | ≤20 | ≤20 | ≤20 | ||||
Suhu sekitar (℃) | ≤35 | ≤35 | ≤35 | ||||
Jumlah aliran banyu cooling | 1-2 L/min | 1-2 L/min | 1-2 L/min | ||||
Suhu Panggangan (℃) | <120 | <120 | <120 | ||||
Daya Pemanas (w) | <250 | <300 | <300 | ||||
Tegangan Input Pemanas (v) | AC220 | AC220 | AC220 | ||||
Pemasangan | Vertikal ± 5° | Vertikal ± 5° | Vertikal ± 5° | ||||
Bobot (kg) | ≈25 | ≈29 | ≈31 |
Kurva Pompa Atmosfer Senyawa
Pompa Molekul Kab
Kurva rasio kompresi nitrogen lan hidrogen
dening pump molekul senyawa
Tabel Ukuran Instalasi EV Series Pompa Molekul senyawa
Model | EV-600 | EV-1200 | EV-1600 | ||||
Flange Inlet (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 | |
D2 | Φ212 | Φ212 | Φ237 | Φ237 | Φ274 | Φ274 | |
D3 | Φ236 | Φ236 | Φ266 | Φ266 | Φ296 | Φ296 | |
D4 | ¨145.7 | ¨145.7 | ¨167.6 | ¨167.6 | ¨183.9 | ¨183.9 | |
H1 | 375 | 375 | 405 | 405 | 393 | 393 | |
H2 | 235 | 235 | 265 | 265 | 250 | 250 | |
H3 | 238 | 238 | 265 | 265 | 250 | 250 | |
H4 | 108 | 108 | 113 | 113 | 110 | 110 | |
H5 | 4 | 4 | 19 | 19 | 16 | 16 | |
L1 | 130 | 130 | 145 | 145 | 160 | 160 | |
L2 | 137 | 137 | 152 | 152 | 176 | 176 | |
Pump leg bolongan meneng | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | |
Outlet Flange (mm) | KF40 | KF40 | KF40 | KF40 | KF50 | KF50 |
EV Series Air-cooling senyawa Molekul Pumps
Pompa molekuler senyawa berpendingin udara EV seri dumadi saka pompa turbomolekul lan pompa traksi cakram.Nduweni karakteristik kacepetan pumping dhuwur lan rasio komprèsi kanggo aliran molekul saka pump turbomolecular, kacepetan pumping dhuwur lan rasio komprèsi kanggo tekanan dhuwur saka pump doyo tarik, lan ngembangaken orane katrangan aplikasi saka pump molekul.
Pompa molekul senyawa ora duwe efek selektivitas lan memori ing gas sing dipompa.Amarga rasio komprèsi sing dhuwur kanggo gas kanthi bobot molekul sing gedhe, pompa bisa entuk vakum dhuwur lan dhuwur sing resik tanpa trap kadhemen lan baffle minyak.Iki digunakake kanthi akeh ing macem-macem bidang elektronik, metalurgi, industri kimia, riset ilmiah lan teknologi vakum.
Model | EV-600F | EV-1200F | EV-1600F | |||
Flange Inlet (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K |
D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 |
D2 | Φ236 | Φ236 | Φ266 | Φ266 | Φ274 | Φ274 |
D3 | ¨145.7 | ¨145.7 | ¨167.6 | ¨167.6 | ¨183.8 | ¨183.8 |
H1 | 455 | 455 | 472 | 472 | 465 | 465 |
H2 | 217.5 | 217.5 | 210 | 210 | 214.5 | 214.5 |
H3 | 151 | 151 | 151 | 151 | 153 | 153 |
L1 | 130 | 130 | 145 | 145 | 161 | 161 |
L2 | 137 | 137 | 152 | 152 | 166 | 166 |
Pump leg bolongan meneng | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 |