Pengontrol Aliran Massa gas termal (MFC)
Ingrmganggangmbokongfsedhengmeter(MFM) ingkindofaccuratemeasurementofgasflow,the measuredvaluwesnotcontrolledbyfluctuationsintemperatureorpresswes, ora usahthecompensationoftemperatureandpressure.
Model | SQC-100 |
Rentang Aliran (N2) | 0~5,10,20,30,50,100,200,500SCCM |
0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
Akurasi | ± 1%FS(≤15SLM);±2%FS((15SLM) |
Tipe Penggerak Katup | Normal Tutup |
Linearitas | ± 1%FS(≤15SLM);±2%FS((15SLM) |
Repeatability | ± 0,2% FS |
Wektu Respon | ≤1 detik |
Sinyal Input/Output | 0~5V |
Sambungan Listrik | Pin DB15 (jarum) |
Operasi Tem. | 5-45 ℃ |
Diferensial Pra. | 0.05~0.5MPa (MFC) ; 0.03~3.0MPa (MFM) |
Tingkat Leak | 1×10-8SCCS (He) |
Maks.Tekanan | 3MPa |
Bahan Sedheng | 316L SS lan materi sealing |
Bahan Sealing | Viton, Silicone rubber, NBR, Teflon, Metal seal. |
Ukuran Joint | VCR 1/4”; Swagelok 1/8” 、1/4”;φ3, φ6mm |
Power Supply | + 15V, 50mA;-15V, 200mA |
Model | SQC-200 |
Rentang Aliran (N2) | MFC: 0~20,30,50,100,150,200SLM |
MFM: 0 ~ 20 , 30 , 50 , 100 , 150 , 200 , 250 , 300 SLM | |
Akurasi | ± 2% FS |
Tipe Penggerak Katup | Normal Tutup |
Linearitas | ± 2% FS |
Repeatability | ± 0,2% FS |
Wektu Respon | ≤5 detik |
Sinyal Input/Output | 1 ~ 5V; 4 ~ 20mA |
Sambungan Listrik | Pin DB15 (jarum) |
Operasi Tem. | 5-45 ℃ |
Diferensial Pra. | 0.1~0.3MPa (MFC); 0.05~3.0MPa (MFM) |
Tingkat Leak | 1×10-8SCCS (He) |
Maks.Tekanan | 3MPa |
Bahan Sedheng | 316L SS lan materi sealing |
Bahan Sealing | Viton, Silicone rubber, NBR, ERP, Teflon |
Ukuran Joint | Swagelok 3/8" 1/2" φ8,φ10,φ12mm |
Power Supply | 24V, 0.5A |
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