Kontrolkerê Herikîna Komê ya Gaza Termal (MFC)
Ewrmalgasmassfnizmmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpresserê, ne hewce yethecompensationoftemperatureandpressure.
Cins | SQC-100 |
Rêjeyên Herikê (N2) | 0, 5, 10, 20, 30, 50, 100, 200, 500SCCM |
0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
Tamî | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Cureya ajokera Valve | Normal Girtî |
Linearity | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Repeatability | ± 0,2%FS |
Dema bersivê | ≤1sec |
Input / îşareta derketinê | 0~5V |
Electric Joint | DB15 pin (derzî) |
Operasyona Tem. | 5~45℃ |
Differential Pre. | 0,05~0,5MPa (MFC); 0,03~3,0MPa (MFM) |
Rêjeya Leak | 1×10-8SCCS (Ew) |
Max.Çap | 3MPa |
Medium Material | 316L SS û materyalê morkirinê |
Girtina Material | Viton, goma Silicone, NBR, Teflon, Seal Metal. |
Mezinahiya Hevbeş | VCR 1/4”;Swagelok 1/8” 、1/4”;φ3、 φ6mm |
Navê min | +15V,50mA;-15V,200mA |
Cins | SQC-200 |
Rêjeyên Herikê (N2) | MFC: 0~20, 30, 50, 100, 150, 200SLM |
MFM: 0~20, 30, 50, 100, 150, 200, 250, 300 SLM | |
Tamî | ± 2%FS |
Cureya ajokera Valve | Normal Girtî |
Linearity | ± 2%FS |
Repeatability | ± 0,2%FS |
Dema bersivê | ≤5sec |
Input / îşareta derketinê | 1~5V;4~20mA |
Electric Joint | DB15 pin (derzî) |
Operasyona Tem. | 5~45℃ |
Differential Pre. | 0,1~0,3MPa(MFC); 0,05~3,0MPa (MFM) |
Rêjeya Leak | 1×10-8SCCS (Ew) |
Max.Çap | 3MPa |
Medium Material | 316L SS û materyalê morkirinê |
Girtina Material | Viton, Lastîka silicone, NBR, ERP, Teflon |
Mezinahiya Hevbeş | Swagelok 3/8" 、1/2"; φ8 、φ10、φ12mm |
Navê min | 24V,0.5A |
Peyama xwe li vir binivîse û ji me re bişîne