Massa Flow Controller Mass flow Meter CS200
Features
1. High Sagaciter et Fast Responsio
Accuratio de CS200 MFC ad ±1.0% SP emendata est, et exempla antecedens ad tempus responsum reductum minus quam 0.8 sec est.
2. Humilis Nulla Drift et Temperature Coefficient
Inventio novarum technologiae sensoris efficit ut CS200 MFC stabilitatem conservet et ambigua temperatura sustineat.Sine auto-nulla ampliatore, nulla summa expectata minor est quam 0.6%FS/annus, et temperatura coefficiens minor est quam 0.02% FS/℃(nulla) ，0.05% FS/ (spania).
3. metallo signati in exemplum et summa puritas Feature
Semita umida fluit of the-linea CS200 MFC constructa e ferro superficiali passivo immaculato.Omnes CS200 MFCs in ultraclean Classis 100-classis 100-classis cleanrooms sunt convenerunt secundum signa utriusque SEMI et ISO 9001.
4. Interfaces Compatible
CS200 MFC compatitur cum sequentibus interfaces, quae a emptore seligi possunt: ±8V-±16V duplex finis potentiae copia et +14V-+28V una copia finis potentiae;digital or analog signal input and output;SEMI dimensiones mechanicas vexillum;et RS-485 seu DeviceNet communicationum socialium moduli.
5. Miscellaneous functiones
Software Lorem potentis vexillum cum singulis exemplar venit, cum munera additamenta ut multi-gasmulti-range，auto-nulla, terrores, initium mollis, et mora praesto sunt ut excerpta Lorem.
Specification
| CS200 | |||||||
| Type | CS200A | CS200C | CS200D | ||||
| Full scale range (N2) | (0～5,10,20,30,50,100,200,300,500)SCCM | (0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| (0～1,2,3,5,10,20,30,50) SLM | (0～1,2,3,5,10,20,30)SLM | ||||||
| Sagaciter | ±1.0% SP (≥35% FS) ±0.35% FS? | ||||||
| Linearity | ±0.5% FS | ||||||
| Repeatability | ±0.2% FS | ||||||
| Responsio tempus | ≤1sec | ≤0.8 sec (SEMI E17-0600) | |||||
| Valvae Requiem Position | Northmanni occlusum vel | Nulla Valve | Northmanni occlusum vel | Nulla Valve | Northmanni occlusum vel | Nulla Valve | |
| Plerumque Open（100 sccm≤FS≤5 slm） | Plerumque Open（100 sccm≤FS≤5 slm） | Plerumque Open（100 sccm≤FS≤5 slm） | |||||
| Pressura differentialis | 0.05～0.35MPa Flow≤10slm） | <0.02MPa | (0.05～0.35) MPa（≤10slm） | <0.02MPa | (0.05～0.35) MPa（≤10slm） | <0.02MPa | |
| 0.1～0.35MPa（10slm＜Flow≤30slm） | (0.1～0.35) MPa（＞10slm） | (0.1～0.35) MPa（＞10slm） | |||||
| 0.2～0.45MPa Flow＞30slm） | |||||||
| Maximum Operating Pressura | 0.45MPa | |||||
| Temperature | Zero: ≤±0.05% FS/℃; | Zero: ≤±0.02% FS/℃;Spon:≤±0.05% FS/℃ | ||||
| Coefficiens | Spon: ≤±0.1% FS/℃（Flow≤30slm） | |||||
| Spon: ≤±0.2% FS/℃（Flow>30slm） | ||||||
| Probatur Pressura | 3MPa (435pisg) | |||||
| Nulla Drift | <0,6% FS anno sine autozero | |||||
| integritas Leak | 1×10-9 atm·cc / sec | 1×10-10atm·cc / sec He | ||||
| Madefactum Materias | Viton; | Metallum?(Stainless Steel V/V, 5Ra) | Metal | |||
| Superficies Chemiae | -- | Cr/Fe ratio -2.0;CrO crassitudine -20 Angstroms | ||||
| Superficiem Conclusio | 25Ra | 10Ra | 25Ra | |||
| Operatio Temperature | .5～45）℃ | .0～50）℃ | ||||
| Input signum | Digital: RS485 or ProfiBus | N/A | Digital: RS485 vel ProfiBus vel DeviceNetTM | N/A | Digital: RS485 vel ProfiBus vel DeviceNetTM | N/A |
| aut DeviceNetTM | Analog: (0～5) VDC vel (4～20) mA vel (0～20) mA | Analog: (0～5)VDC vel (4～20) mA? vel (0～20) mA | |||||
| Analog: (0～5) VDC vel (4～20) mA vel (0～20) mA | |||||||
| Output signum | Digital: RS485 vel DeviceNetTM vel ProfiBus Analogia: (0～5)VDC vel (4～20) mA vel (0～20) mA | ||||||
| Potestas Supple | ±8~±16 VDC vel +14~ +28 VDC(400mA) | ||||||
| Electronic Connector | IX pin masculus sub-D 15 pin masculinum sub-D DeviceNetTM.ProfiBus Analog | ||||||
| Necessaria | M； VCO1/4" M； | VER1/4" M; | |||||
| Cogo FittingΦ10; Compressionem FittingΦ6； | Cogo, FittingΦ6, | ||||||
| Cogo Opportunus 3/8";Cogo Fitting1/4 "； | Cogo, FittingΦ3, | ||||||
| Cogo Fitting1/8";Compressione FittingΦ3； | Cogo Fitting1/4 "， | ||||||
| 6(interius) 1hose; 5(interius) 1.5hose; 4(interius) 1hose; | W-seal | ||||||
| A-sael ; | C-seal | ||||||
| Pondus | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | |
