Thermal Gas Mass Flow Controller (MFC)
Déirmalgasmassfnidderegmeter(MFM) asskindofaccuratemeasurementofgasflow,the measuredvaluergnotcontrolledbyfluctuationsinntemperatureorpressure, brauch netthechompensationoftempfratureandpressure.
Modell | SQC-100 Fotoen |
Flowbereich (N2) | 0~5, 10, 20, 30, 50, 100, 200, 500 SCCM |
0-1, 2, 3, 5, 10, 15, 20, 30 SLM | |
Genauegkeet | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Ventil Drive Typ | Normal zougemaach |
Linearitéit | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Widderhuelbarkeet | ± 0,2 FS |
Äntwert Zäit | ≤1 Sek |
Input / Ausgangssignal | 0-5 V |
Elektresch Joint | DB15 Pin (Nadel) |
Operatioun Tem. | 5-45 ℃ |
Differential Pre. | 0.05 ~ 0.5 MPa (MFC); 0.03 ~ 3.0 MPa (MFM) |
Leck Taux | 1 × 10-8SCCS (He) |
Max.Drock | 3 mpa |
Mëttelméisseg Material | 316L SS an Dichtungsmaterial |
Dichtungsmaterial | Viton, Silikongummi, NBR, Teflon, Metalldichtung. |
Gemeinsam Gréisst | VCR 1/4";Swagelok 1/8", 1/4";φ3, φ6mm |
Stroumversuergung | +15V,50mA;-15V,200mA |
Modell | SQC-200 Fotoen |
Flowbereich (N2) | MFC: 0–20, 30, 50, 100, 150, 200 SLM |
MFM: 0–20 ,30 , 50 , 100 , 150 , 200 , 250 , 300 SLM | |
Genauegkeet | ± 2%FS |
Ventil Drive Typ | Normal zougemaach |
Linearitéit | ± 2%FS |
Widderhuelbarkeet | ± 0,2 FS |
Äntwert Zäit | ≤5 Sek |
Input / Ausgangssignal | 1–5 V; 4–20 mA |
Elektresch Joint | DB15 Pin (Nadel) |
Operatioun Tem. | 5-45 ℃ |
Differential Pre. | 0.1 ~ 0.3 MPa (MFC); 0.05 ~ 3.0 MPa (MFM) |
Leck Taux | 1 × 10-8SCCS (He) |
Max.Drock | 3 mpa |
Mëttelméisseg Material | 316L SS an Dichtungsmaterial |
Dichtungsmaterial | Viton, Silikongummi, NBR, ERP, Teflon |
Gemeinsam Gréisst | Swagelok 3/8", 1/2"; φ8, φ10, φ12mm |
Stroumversuergung | 24 V, 0,5 A |
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