Leading Manufacturer for Cf Feedthrough - EV series grease lubricating molecular pump – Super Q

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Leading Manufacturer for Cf Feedthrough - EV series grease lubricating molecular pump – Super Q Detail:

EV-300Z and EV-300ZF Technical Data

Model		EV-300Z		EV-300ZF
Inlet Flange (mm)		100CF	100 ISO-K	100CF	100 ISO-K
Outlet Flange (mm)		25 KF		25 KF
Pumping Speed (L/S)		300		300
Compression Ratio	N²	>10⁸		>10⁸
	H²	>1X10³		>1X10³
Ultimate Vacuum(Pa)		<3X10^-7	<2X10^-6	<3X10^-7		<2X10^-6
Rotation Speed(rpm)		30000		30000
Bearing		Grease-lubricated Ceramic Bearing		Grease-lubricated Ceramic Bearing
Run-up Time(min)		<4		<4
Backing Pump		2 L/S		2 L/S
Cooling Method		Air Cooling		WaterCooling
ambient temperature		5-36℃		<38℃
Mounting		Any position		Any position
Weight(kg) (kg)		≈11		≈10.8

EV series grease lubricating molecular pump

Compression ratio curve of EV-300ZF grease lubricated air-cooled molecular pump to air

EV series grease lubricating molecular pump01

Compression ratio curve of EV-300ZF grease lubricated air-cooled molecular pump for nitrogen and hydrogen

Product dimension, mounting connection dimension

EV series grease lubricating molecular pump01

EV-300Z Grease lubricated water-cooled molecular pumps-shape dimensions, mounting connection dimensions

EV series grease lubricating molecular pump01

EV-300ZF Grease lubricated water-cooled molecular pumps-shape dimensions, mounting connection dimensions

EV-650Z(ZF), EV-1300Z(ZF), EV-2000Z(ZF) Technical Data

The impeller of EV type grease lubricating compound molecular pump adopts the vane tooth of variable cross section, and the bearing adopts grease lubricated ceramic precision bearing, which realizes the installation of pump body at any angle and cleans the oil-free high vacuum environment with higher reliability.

Model		EV-650Z EV-650ZF		EV-1300Z EV-1300ZF		EV-2000Z EV-2000ZF
Inlet Flange (mm)		150 CF	160 ISO-K	200 CF	200 ISO-K	250 CF		250 ISO-K
Outlet Flange (mm)		40 KF		40KF		50KF
The flange of protective air （anticorrosive pump）		16KF		16KF		16KF
Pumping Rate（L/S）		650		1300		2000
Compression Ratio	N²	>10⁹		>10⁹		>10⁹
	H²	>8X10³		>1X10⁴		>1X10⁴
Ultimate Pressure（Pa）		<8X10^-8	<5X10^-7	<8X10^-8	<5X10^-7	<8X10^-8	<5X10^-7
Rated Speed（rpm）		24000		24000		24000
Bearing		Grease-lubricated Ceramic Bearing		Grease-lubricated Ceramic Bearing		Grease-lubricated Ceramic Bearing
Vibration		≤0.1 μm		≤0.1 μm		≤0.1 μm
Starting Time（min）		<5		<5		<5
Suggested rotary pump		4-8 L/S		8-15 L/S		8-15 L/S
Cooling Method		Water(Air) Cooling		Water(Air) Cooling		Water(Air) Cooling
Temperature of Water Cooling(℃)		≤20		≤20		≤20
The flow of water cooling（L/min）		1		1		1
Installation Mod		Any position		Any position		Any position
Weight（kg）		≈22		≈27		≈35

EV-650Z, EV-1300Z, EV-2000Z Mounting Dimension Table of Lipid Lubricating Molecular pump

Model	EV-650Z		EV-1300Z		EV-2000Z
Inlet Flange (mm)	150 CF	160 ISO-K	200 CF	200 ISO-K	250 CF	250 ISO-K
D1	Φ202	Φ180	Φ253	Φ240	Φ305	Φ290
D2	Φ212	Φ212	Φ243	Φ243	Φ274	Φ274
D3	Φ236	Φ236	Φ266	Φ266	Φ296	Φ296
L1	112	112	150	150	123	123
H1	315	315	339	339	316.5	312
H2	300	300	334	334	299	295
H3	239	239	283	283	252	248
H4	94.5	94.5	103.5	103.5	102.5	102.5