Mass Flow Controller Mass Flow Meter CS200
Features
1. High Accuracy and Fast Response
The accuracy of the CS200 MFC has been improved to ±1.0% of S.P., and the most advanced models have a reduced response time of less than 0.8 sec.
2. Low Zero Drift and Temperature Coefficient
The invention of new sensor technology enables the CS200 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero)，0.05%F.S./ ℃ (span).
3. Metal-Sealed Models and High Purity Feature
The wetted flow path of-the-the-line CS200 MFC is constructed from surface-passivated stainless steel. All CS200 MFCs are assembled in Sevenstar’s ultraclean Class 100-class cleanrooms in accordance with both SEMI and ISO 9001 standards.
4. Compatible Interfaces
The CS200 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single–end power supply; digital or analog signal input and output; SEMI standard mechanical dimensions; and RS-485 or DeviceNet communications module.
5. Miscellaneous Functions
Powerful customer software comes standard with each model, while additional functions such as multi-gas，multi-range，auto-zero, alarms, soft start, and delay are available as customer selections.
Specification
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CS200 |
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Type |
CS200A |
CS200C |
CS200D |
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Full scale range (N2) |
( 0～5,10,20,30,50,100,200,300,500)SCCM |
( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM |
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( 0～1,2,3,5,10,20,30,50)SLM |
( 0～1,2,3,5,10,20,30)SLM |
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Accuracy |
±1.0% S.P. (≥35% F.S.) ±0.35% F.S.?(＜35% F.S.) |
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Linearity |
±0.5% F.S. |
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Repeatability |
±0.2% F.S. |
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Response Time |
≤1sec |
≤0.8 sec (SEMI E17-0600) |
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Valve Rest Position |
Normally Closed or |
No Valve |
Normally Closed or |
No Valve |
Normally Closed or |
No Valve |
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| Normally Open（100 sccm≤F.S.≤5 slm） | Normally Open（100 sccm≤F.S.≤5 slm） | Normally Open（100 sccm≤F.S.≤5 slm） | |||||
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Differential Pressure |
0.05～0.35MPa （Flow≤10slm） |
＜0.02MPa |
(0.05～0.35) MPa（≤10slm） |
＜0.02MPa |
(0.05～0.35) MPa（≤10slm） |
＜0.02MPa |
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0.1～0.35MPa（10slm＜Flow≤30slm） |
(0.1～0.35) MPa（＞10slm） |
(0.1～0.35) MPa（＞10slm） |
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0.2～0.45MPa （Flow＞30slm） |
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Maximum Operating Pressure |
0.45MPa |
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Temperature |
Zero:≤±0.05% F.S./℃; |
Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃ |
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Coefficient |
Span: ≤±0.1% F.S./℃（Flow≤30slm） |
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Span: ≤±0.2% F.S./℃（Flow>30slm） |
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Proof Pressure |
3MPa (435pisg) |
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Zero Drift |
＜0.6%F.S. per year without autozero |
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Leak integrity |
1×10-9 atm·cc / sec He |
1×10-10atm·cc / sec He |
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Wetted Materials |
Viton; |
Metal?(Stainless Steel V/V, 5Ra) |
Metal |
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Surface Chemistry |
—— |
Cr/Fe ratio ＞2.0; CrO thickness ＞20 Angstroms |
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Surface Finish |
25Ra |
10Ra |
25Ra |
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Operation Temperature |
（5～45）℃ |
（0～50）℃ |
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Input Signal |
Digital: RS485 or ProfiBus |
N/A |
Digital: RS485 or ProfiBus or DeviceNetTM |
N/A |
Digital:RS485 or ProfiBus or DeviceNetTM |
N/A |
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or DeviceNetTM |
Analog:(0～5)VDC or (4～20)mA or (0～20)mA |
Analog:(0～5)VDC or (4～20)mA?or (0～20)mA |
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Analog:(0～5)VDC or (4～20)mA or(0～20)mA |
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Output Signal |
Digital: RS485 or DeviceNetTM or ProfiBus Analog:(0～5)VDC or (4～20)mA or (0～20)mA |
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Power Supply |
±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA) |
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Electronic Connector |
9 pin male sub-D ，15 pin male sub-D ，DeviceNetTM，ProfiBus ，Analog |
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Fittings |
VCR1/4” M； VCO1/4” M； |
VCR1/4” M; |
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Compression FittingΦ10;Compression FittingΦ6； |
Compression FittingΦ6, |
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Compression Fitting 3/8”; Compression Fitting1/4”； |
Compression FittingΦ3, |
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Compression Fitting1/8”; Compression FittingΦ3； |
Compression Fitting1/4”， |
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Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose; |
W-seal， |
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A-sael ; |
C-seal |
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Weight |
1kg |
0.8kg |
1.2kg |
1kg |
1.2kg |
1kg |
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