Mass Flow Controller Mass Flow Meter CS200
Toetoetra
1. Fahamarinana avo sy valiny haingana
Ny fahamarinan'ny CS200 MFC dia nohatsaraina ho ± 1.0% amin'ny SP, ary ny maodely mandroso indrindra dia mihena ny fotoana famaliana latsaky ny 0.8 seg.
2. Aotra ambany Drift sy ny mari-pana Coefficient
Ny famoronana teknolojia sensor vaovao dia ahafahan'ny CS200 MFC mitazona fitoniana sy mahatohitra ny fiovaovan'ny mari-pana.Raha tsy misy fanamafisam-peo auto-zero, dia latsaky ny 0.6% FS/taona ny fitetezana aotra andrasana, ary latsaky ny 0.02% FS/℃ (aotra) ny mari-pana amin'ny hafanana, 0.05% FS/ ℃ (span).
3. Modely voaisy tombo-kase metaly sy endri-javatra madio indrindra
Ny lalan'ny fikorianan'ny-the-the-line CS200 MFC dia namboarina avy amin'ny vy tsy misy pentina vita amin'ny surface-passivated.Ny MFC CS200 rehetra dia miangona ao amin'ny efitrano fanadiovana kilasy faha-100 an'ny Sevenstar, mifanaraka amin'ny fenitra SEMI sy ISO 9001.
4. Fifandraisana mifanentana
Ny CS200 MFC dia mifanaraka amin'ireto interface ireto, izay mety hofantenan'ny mpanjifa: ± 8V-± 16V famatsiana herinaratra indroa ary + 14V-+28V famatsiana herinaratra tokana;fampidirana sy fivoahana famantarana nomerika na analog;SEMI fenitra mekanika refy;ary RS-485 na Module serasera DeviceNet.
5. Asa samihafa
Ny rindrambaiko mpanjifa matanjaka dia tonga manara-penitra amin'ny modely tsirairay, raha toa kosa ny fiasa fanampiny toy ny entona marobe, multi-range, auto-zero, fanairana, fanombohana malefaka ary fahatarana dia azo alaina amin'ny fisafidianana mpanjifa.
famaritana
CS200 | |||||||
Type | CS200A | CS200C | CS200D | ||||
Faritra feno (N2) | ( 0~ 5,10,20,30,50,100,200,300,500)SCCM | ( 0~2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
( 0~1,2,3,5,10,20,30,50)SLM | ( 0~1,2,3,5,10,20,30)SLM | ||||||
araka ny marina | ±1,0% SP (≥35% FS) ±0,35% FS?(<35% FS) | ||||||
Linearity | ± 0,5% FS | ||||||
Famerenana | ± 0,2% FS | ||||||
Fotoam-pamaliana | ≤1sec | ≤0.8 seg (SEMI E17-0600) | |||||
Toerana fitsaharana Valve | Matetika mihidy na | Tsy misy Valve | Matetika mihidy na | Tsy misy Valve | Matetika mihidy na | Tsy misy Valve | |
Misokatra mahazatra(100 sccm≤FS≤5 slm) | Misokatra mahazatra(100 sccm≤FS≤5 slm) | Misokatra mahazatra(100 sccm≤FS≤5 slm) | |||||
Fanerena samihafa | 0.05~0.35MPa (Fodina≤10slm) | <0.02MPa | (0.05~0.35) MPa(≤10slm) | <0.02MPa | (0.05~0.35) MPa(≤10slm) | <0.02MPa | |
0.1~0.35MPa(10slm<Flow≤30slm) | (0.1~0.35) MPa(>10slm) | (0.1~0.35) MPa(>10slm) | |||||
0.2~0.45MPa (Fondana>30slm) |
Fanerena miasa ambony indrindra | 0.45MPa | |||||
hafanana | Zero: ≤±0.05% FS/℃; | Zero: ≤±0.02% FS/℃;Hatrany: ≤±0.05% FS/℃ | ||||
Coefficient | Halavany: ≤±0.1% FS/℃(Flow≤30slm) | |||||
Halavan'ny: ≤±0.2% FS/℃(Mikoriana>30slm) | ||||||
Fanerena porofo | 3MPa (435 pig) | |||||
Zero Drift | <0.6% FS isan-taona tsy misy autozero | |||||
Leak integrity | 1×10-9 atm·cc / sec Izy | 1×10-10atm·cc / sec Izy | ||||
Fitaovana lena | Viton; | Metaly?(V/V/V, 5Ra) | Metal | |||
Surface Chemistry | —— | Cr/Fe ratio >2.0;CrO hatevin'ny> 20 Angstroms | ||||
Surface vita | 25 Ra | 10 Ra | 25 Ra | |||
Operation Temperature | (5~45) ℃ | (0~50) ℃ | ||||
Signal fampidirana | Nomerika: RS485 na ProfiBus | N / A | Nomerika: RS485 na ProfiBus na DeviceNetTM | N / A | Nomerika: RS485 na ProfiBus na DeviceNetTM | N / A |
na DeviceNetTM | Analog: (0~5)VDC na (4~20)mA na (0~20)mA | Analog: (0~5)VDC na (4~20)mA?na (0~20)mA | |||||
Analog: (0~5)VDC na (4~20)mA na(0~20)mA | |||||||
Output Signal | Nomerika: RS485 na DeviceNetTM na ProfiBus Analog:(0~5)VDC na (4~20)mA na (0~20)mA | ||||||
Herin'aratra | ±8 ~ ±16 VDC na +14 ~ +28 VDC(400mA) | ||||||
Electronic Connector | 9 pin lahy sub-D ,15 pin lahy sub-D ,DeviceNetTM,ProfiBus, Analog | ||||||
Fittings | VCR1/4” M; VCO1/4” M; | VCR1/4” M; | |||||
Fametahana famatraranaΦ10; Fametahana fametahanaΦ6; | Fametrahana famatraranaΦ6, | ||||||
Fametahana fanerena 3/8";Fametrahana famatrarana 1/4"; | Fametahana famatraranaΦ3, | ||||||
Fametahana fanerena 1/8";Fametahana compressionΦ3; | Fametahana compresse 1/4" | ||||||
Ф6(anaty)×1hose;ф5(anatiny)×1.5hose;ф4(anatiny)×1hose; | W-seal, | ||||||
A-saela ; | C-tombo-kase | ||||||
lanja | 1Pj | 0,8 kg | 1,2 kg | 1Pj | 1,2 kg | 1Pj |