Kaiwhakarite Rere Papatipu Miita Rere Papatipu CS200
Ngā āhuatanga
1. Tika Teitei me te Whakautu Tere
Ko te tika o te CS200 MFC kua pai ake ki te ± 1.0% o SP, a ko nga tauira tino matatau he iti ake te wa whakautu i te iti iho i te 0.8 hekona.
2. Te Paheke Kore Paariki me te Whakaaetanga Pahana
Ko te hangahanga o te hangarau pukoro hou ka taea e te CS200 MFC te mau tonu me te tu atu i nga rereketanga o te pāmahana.Ki te kore he whakakaha kore-aunoa, he iti iho i te 0.6%FS/tau te hekenga kore e tumanakohia ana, he iti iho te whakarea pāmahana i te 0.02%FS/℃(kore)，0.05%FS/ ℃ (waa).
3. Nga Tauira Hiiri-Metara me te Tino Maamaa
Ko te ara rere makuku o-te-raina CS200 MFC he mea hanga mai i te rino kowiri tira.Ko nga MFC CS200 katoa e whakaemihia ana ki roto i nga ruma horoi 100-akomanga ultrama o Sevenstar i runga i nga paerewa SEMI me ISO 9001.
4. Atanga Hototahi
Ko te CS200 MFC he hototahi ki nga atanga e whai ake nei, ka tohua pea e te kaihoko: ± 8V-± 16V toha hiko mutunga-rua me te + 14V-+28V kotahi-mutunga hiko;te whakauru me te whakaputa tohu tohu mamati, tairitenga ranei;nga waahanga miihini paerewa SEMI;me RS-485 ranei te kōwae whakawhitiwhiti DeviceNet.
5. Nga Mahi Mihi
Ko nga raupaparorohiko a nga kaihoko kaha he paerewa me ia tauira, ko etahi atu mahi penei i te hau-maha, te awhe-maha, te kore-aunoa, te whakaoho, te tiimata ngawari, me te whakaroa e waatea ana hei kowhiringa a nga kaihoko.
Whakatakotoranga
| CS200 | |||||||
| Momo | CS200A | CS200C | CS200D | ||||
| Awhe tauine katoa (N2) | ( 0～5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Tika | ±1.0% SP (≥35% FS) ±0.35% FS?(＜35% FS) | ||||||
| Rarangirangi | ±0.5% FS | ||||||
| Te tukurua | ±0.2% FS | ||||||
| Wā Whakautu | ≤1hekona | ≤0.8 hēkona (SEMI E17-0600) | |||||
| Takiwa Whaka okiokinga | Tikanga Katia ranei | No Valve | Tikanga Katia ranei | No Valve | Tikanga Katia ranei | No Valve | |
| Ka tuwhera noa（100 sccm≤FS≤5 slm） | Ka tuwhera noa（100 sccm≤FS≤5 slm） | Ka tuwhera noa（100 sccm≤FS≤5 slm） | |||||
| Pehenga rereke | 0.05～0.35MPa （Rere≤10slm） | ＜0.02MPa | (0.05～0.35) MPa（≤10slm） | ＜0.02MPa | (0.05～0.35) MPa（≤10slm） | ＜0.02MPa | |
| 0.1～0.35MPa（10slm＜Rere≤30slm） | (0.1～0.35) MPa（＞10slm） | (0.1～0.35) MPa（＞10slm） | |||||
| 0.2～0.45MPa （Rere> 30slm） | |||||||
| Te Morahi Mahi Mahi | 0.45MPa | |||||
| Te pāmahana | Kore:≤±0.05% FS/℃; | Kore:≤±0.02% FS/℃;Awheawhe:≤±0.05% FS/℃ | ||||
| Taurangi | Wā: ≤±0.1% FS/℃（Rere≤30slm） | |||||
| Wā: ≤±0.2% FS/℃（Rere>30slm） | ||||||
| Te Pehenga Tohu | 3MPa (435pig) | |||||
| Kore Panuku | ＜0.6%FS ia tau kaore he autozero | |||||
| Leak tapatahi | 1×10-9 atm·cc / sec He | 1×10-10atm·cc / sec He | ||||
| Rauemi Makuku | Viton; | Maama?(Stainless Steel V/V, 5Ra) | Te whakarewa | |||
| Matū Mata | —— | Cr/Fe ōwehenga ＞2.0;CrO matotoru ＞20 Angstroms | ||||
| Whakaoti Mata | 25Ra | 10Ra | 25Ra | |||
| Te Pawera Mahi | （5～45） ℃ | （0～50） ℃ | ||||
| Waitohu Whakauru | Mamati: RS485, ProfiBus ranei | N/A | Mamati: RS485, ProfiBus, DeviceNetTM ranei | N/A | Mamati: RS485, ProfiBus, DeviceNetTM ranei | N/A |
| ranei DeviceNetTM | Anarite:(0～5)VDC, (4～20)mA ranei (0～20)mA | Anarite:(0～5)VDC, (4～20)mA?ranei (0～20)mA | |||||
| Anarite:(0～5)VDC, (4～20)mA ranei(0～20)mA | |||||||
| Waitohu Huaputa | Mamati: RS485, DeviceNetTM ranei ProfiBus Analog:(0～5)VDC ranei (4～20)mA ranei (0～20)mA | ||||||
| Tuku Hiko | ±8 ~ ±16 VDC ranei +14 ~ +28 VDC(400mA) | ||||||
| Tūhono Hiko | 9 titi tane iti-D ，15 titi tane iti-D ，DeviceNetTM，ProfiBus ，Tairite | ||||||
| Whakapaipai | VCR1/4” M； VCO1/4” M； | VCR1/4” M; | |||||
| Whakapai KopekeΦ10;Tau KōpekeΦ6； | Whakauru KōpekeΦ6, | ||||||
| Whakakopeketanga 3/8”;Whakakopeketanga 1/4”； | Whakauru KōpekeΦ3, | ||||||
| Whakauru Whakakopeke1/8”;Whakauru KōpekeΦ3； | Whakauru Whakakopeke1/4”， | ||||||
| Ф6(roto)×1hose;ф5(roto)×1.5hose;ф4(roto)×1hose; | W-hiri, | ||||||
| A-saera ; | C-hiri | ||||||
| Taumaha | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | |
