Mapampu omwe amagwiritsidwa ntchito kwambiri pamakina a vacuum apamwamba kwambiri

I. Pampu zamakina
Ntchito yayikulu ya mpope wamakina ndikupereka chopukusira chofunikira chisanachitike poyambira pampu ya turbomolecular.Pampu zamakina zomwe zimagwiritsidwa ntchito nthawi zambiri zimaphatikizapo mapampu owuma a vortex, mapampu a diaphragm ndi mapampu amakina osindikizidwa ndi mafuta.
Mapampu a diaphragm ali ndi liwiro lotsika lopopa ndipo nthawi zambiri amagwiritsidwa ntchito pamapampu ang'onoang'ono a cell chifukwa cha kukula kwake.
Pampu yamakina yosindikizidwa ndi mafuta ndiye pampu yomwe imagwiritsidwa ntchito kwambiri m'mbuyomu, yomwe imadziwika ndi liwiro lalikulu la kupopa komanso kutsekemera komaliza, choyipa chake ndi kupezeka kwamafuta obwerera, mu makina opukutira apamwamba kwambiri nthawi zambiri amafunika kukhala ndi valavu ya solenoid. (popewa kulephera kwa mphamvu mwangozi chifukwa cha kubwerera kwa mafuta) ndi sieve ya molekyulu (adsorption effect).
M'zaka zaposachedwa, zomwe zimagwiritsidwa ntchito kwambiri ndi mpukutu wowuma pampu. Ubwino wake ndi wosavuta kugwiritsa ntchito ndipo subwerera ku mafuta, kuthamanga kwa kupopera komanso kutsekemera komaliza kumakhala koyipa pang'ono kuposa mapampu osindikizidwa ndi mafuta.
Mapampu amakina ndiwo gwero lalikulu la phokoso ndi kugwedezeka mu labotale ndipo ndi bwino kusankha pampu yaphokoso yotsika ndikuyiyika pakati pa zida ngati kuli kotheka, koma chomalizacho nthawi zambiri sichikhala chophweka chifukwa cha zoletsa zogwira ntchito.
II.Mapampu a turbomolecular
Mapampu a ma molekyulu a Turbo amadalira ma vanes othamanga kwambiri (nthawi zambiri mozungulira ma revolution 1000 pamphindi) kuti akwaniritse kayendedwe ka gasi.Chiŵerengero cha mphamvu ya mpope yotulutsa mpweya ndi mphamvu yolowera kumatchedwa compression ratio.The psinjika chiŵerengero okhudzana ndi chiwerengero cha magawo mpope, liwiro ndi mtundu wa mpweya, ambiri maselo kulemera psinjika mpweya ndi mkulu.Kutsekemera komaliza kwa pampu ya turbomolecular nthawi zambiri kumadziwika kuti ndi 10-9-10-10 mbar, ndipo m'zaka zaposachedwa, ndikupita patsogolo kwaukadaulo wapampu yama cell, vacuum yomaliza yasinthidwanso.
Monga ubwino wa pampu ya turbomolecular imangozindikirika mu kayendedwe ka molekyulu (malo otaya momwe ma molekyulu aulere a gasi amakhala okulirapo kuposa kukula kwake kwa gawo lodutsamo), pampu yovumbula yoyambira siteji. ndi kuthamanga kwa 1 mpaka 10-2 Pa kumafunika.Chifukwa cha kuthamanga kwambiri kwa ma vanes, pampu ya molekyulu imatha kuonongeka kapena kuwonongedwa ndi zinthu zakunja, jitter, mphamvu, resonance kapena kugwedezeka kwa gasi.Kwa oyamba kumene, chomwe chimayambitsa kuwonongeka ndi kugwedezeka kwa mpweya chifukwa cha zolakwika zogwirira ntchito.Kuwonongeka kwa pampu ya molekyulu kungayambitsidwenso ndi resonance yomwe imayambitsidwa ndi mpope wamakina.Matendawa ndi osowa koma amafunikira chisamaliro chapadera chifukwa ndi obisika komanso osazindikirika.

III.Pampu ya ion pompa
Mfundo yogwirira ntchito ya mpope wa sputtering ion ndikugwiritsa ntchito ayoni opangidwa ndi kutulutsa kwa Penning kuti aphulitse mbale ya titaniyamu ya cathode kuti apange filimu yatsopano ya titaniyamu, motero kutulutsa mpweya wokhazikika komanso kukhala ndi manda ena pamipweya ya inert. .Ubwino wa mapampu a sputtering ion ndi vacuum yabwino kwambiri, palibe kugwedezeka, phokoso, palibe kuipitsidwa, njira yokhwima komanso yokhazikika, yosamalidwa komanso kuthamanga komweko (kupatula mpweya wa inert), mtengo wawo ndi wotsika kwambiri kuposa mapampu a cell, zomwe zimawapangitsa kuti azigwiritsidwa ntchito kwambiri pamakina apamwamba kwambiri a vacuum.Nthawi zambiri kagwiritsidwe ntchito ka ma pampu a sputtering ion ndi zaka zopitilira 10.
Mapampu a ion nthawi zambiri amayenera kukhala pamwamba pa 10-7 mbar kuti agwire bwino ntchito (kugwira ntchito movutikira kwambiri kumachepetsa moyo wawo wonse) motero amafunikira pampu yama cell kuti apereke vacuum yabwino isanakwane.Ndizozoloŵera kugwiritsa ntchito pampu ya ion + TSP m'chipinda chachikulu ndi pampu yaing'ono ya molekyulu yomwe imayikidwa mu chipinda cholowera.Mukaphika, tsegulani valavu yolumikizira yolumikizidwa ndikulola kuti pampu yaing'ono yama cell ipereke vacuum yakutsogolo.
Zindikirani kuti mapampu a ion sangathe kutulutsa mpweya wa inert ndipo kuthamanga kwawo kwakukulu kumasiyana pang'ono ndi mapampu a maselo, kotero kuti pamagetsi akuluakulu otulutsa mpweya kapena mpweya wambiri wa inert, seti ya pampu ya molekyulu imafunika.Kuphatikiza apo, pampu ya ion imapanga gawo lamagetsi panthawi yogwira ntchito, zomwe zitha kusokoneza machitidwe ovuta kwambiri.
IV.Mapampu a Titanium sublimation
Pampu za titaniyamu sublimation zimagwira ntchito podalira kutuluka kwa zitsulo za titaniyamu kupanga filimu ya titaniyamu pamakoma a chipinda cha chemisorption.Ubwino wa mapampu a titaniyamu sublimation ndi zomangamanga zosavuta, zotsika mtengo, kukonza kosavuta, palibe ma radiation komanso phokoso logwedezeka.
Pampu za titaniyamu za titaniyamu nthawi zambiri zimakhala ndi 3 titaniyamu filaments (kupewa kuyaka) ndipo amagwiritsidwa ntchito limodzi ndi mapampu a ma molekyulu kapena ayoni kuti achotse bwino kwambiri haidrojeni.Ndiwo mapampu ofunika kwambiri a vacuum mu 10-9-10-11 mbar range ndipo amaikidwa m'zipinda zambiri za vacuum zomwe zimafunikira kwambiri.
Kuipa kwa mapampu a titaniyamu sublimation ndikofunika kuti titaniyamu sputtering nthawi zonse, vacuum imawonongeka ndi pafupifupi 1-2 magnitude panthawi ya sputtering (mphindi zochepa), choncho zipinda zina zomwe zimakhala ndi zosowa zapadera zimafuna kugwiritsa ntchito NEG.Komanso, pazitsanzo/zida zokhuza titaniyamu, chisamaliro chiyenera kutengedwa kuti tipewe malo a pampu ya titaniyamu.
V. Mapampu a cryogenic
Mapampu a cryogenic makamaka amadalira kutentha kwapang'onopang'ono kwa thupi kuti apeze vacuum, ndi ubwino wa kuthamanga kwamphamvu, kusaipitsa komanso kutsekemera kwakukulu.Zinthu zazikulu zomwe zimakhudza kuthamanga kwa kupopera kwa mapampu a cryogenic ndi kutentha ndi pamwamba pa mpope.M'makina akuluakulu a ma molekyulu a epitaxy, mapampu a cryogenic amagwiritsidwa ntchito kwambiri chifukwa cha zofunika kwambiri za vacuum.
Zoyipa zamapampu a cryogenic ndikugwiritsa ntchito kwambiri nayitrogeni wamadzimadzi komanso ndalama zambiri zogwirira ntchito.Kachitidwe ndi recirculating chillers angagwiritsidwe ntchito popanda kudya nayitrogeni wamadzimadzi, koma izi zimabweretsa mavuto ofanana a mowa mphamvu, kugwedera ndi phokoso.Pachifukwa ichi, mapampu a cryogenic sagwiritsidwa ntchito kwambiri pazida wamba za labotale.
VI.Mapampu a Aspirator (NEG)
Suction agent pampu ndi imodzi mwamapampu a vacuum omwe amagwiritsidwa ntchito kwambiri m'zaka zaposachedwa, mwayi wake ndikugwiritsa ntchito kwathunthu kwa mankhwala adsorption, palibe nthunzi plating ndi kuipitsidwa kwamagetsi, komwe nthawi zambiri amagwiritsidwa ntchito limodzi ndi mapampu a molekyulu kuti alowe m'malo mwa mapampu a titaniyamu ndi ma sputtering ion. mapampu, kuipa kwake ndi kukwera mtengo komanso chiwerengero chochepa cha zosinthika, zomwe nthawi zambiri zimagwiritsidwa ntchito m'makina omwe ali ndi zofunika kwambiri pakukhazikika kwa vacuum kapena kukhudzidwa kwambiri ndi minda yamagetsi.
Kuonjezera apo, monga pampu ya aspirator imafuna kuti palibe kugwirizana kwa magetsi owonjezera kupitirira kuyambika koyambirira, imagwiritsidwanso ntchito nthawi zambiri m'makina akuluakulu monga mpope wothandizira kuti awonjezere kuthamanga kwa kupopera ndikuwongolera mlingo wa vacuum, womwe ukhoza kuphweka mosavuta dongosolo.

Chithunzi: Kupanikizika kwamitundu yosiyanasiyana yamapampu.Mivi ya bulauni imawonetsa kuchuluka kovomerezeka kovomerezeka kogwiritsa ntchito ndipo mbali zobiriwira zobiriwira zimawonetsa kuchuluka kwamphamvu komwe kumagwirira ntchito.