OEM manufacturer Electromagnetic Angle Valve - EV series compound molecular pumps – Super Q
OEM manufacturer Electromagnetic Angle Valve - EV series compound molecular pumps – Super Q Detail:
EV-series Technical Data
|
Model |
EV-600 EV-600F |
EV-1200 EV-1200F |
EV-1600 EV-1600F |
||||
|
Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
|
|
Outlet Flange(mm) |
40 KF |
40 KF |
50 KF |
||||
|
Pumping Speed(L/S) |
600 |
1200 |
1600 |
||||
|
Compression Ratio |
N2 |
>109 |
>109 |
>109 |
|||
|
H2 |
>8X103 |
>1X104 |
>1X104 |
||||
|
Ultimate Vacuum(Pa) |
<8X10-8 |
<5X10-7 |
<8X10-8 |
<5X10-7 |
<8X10-8 |
<5X10-7 |
|
|
Rotation Speed(rpm) |
24000 |
24000 |
24000 |
||||
|
Vibration |
≤0.1 μm |
≤0.1 μm |
≤0.15 μm |
||||
|
Run-up Time(min) |
<4.5 |
<5 |
<6 |
||||
|
Backing Pump |
4-8 L/S |
8-15 L/S |
15 L/S |
||||
|
Cooling Method |
Water(air) cooling |
Water(air) cooling |
Water(air) cooling |
||||
|
Cooling Water Temperature (℃) |
≤20 |
≤20 |
≤20 |
||||
|
Ambient Temperature（℃） |
≤35 |
≤35 |
≤35 |
||||
|
Cooling Water Flow quantity |
1-2 L/min |
1-2 L/min |
1-2 L/min |
||||
|
Bake-out Temperature（℃） |
<120 |
<120 |
<120 |
||||
|
Heater Power（w） |
<250 |
<300 |
<300 |
||||
|
Heater Input Voltage（v） |
AC220 |
AC220 |
AC220 |
||||
|
Mounting |
Vertical ±5° |
Vertical ±5° |
Vertical ±5° |
||||
|
Weight(kg) |
≈25 |
≈29 |
≈31 |
||||
Atmospheric Pumping Curve of Compound
Molecular Pump
Compressing ratio curve of nitrogen and hydrogen
by compound molecular pump
EV Series Installation Dimension Table of compound Molecular Pump
|
Model |
EV-600 |
EV-1200 |
EV-1600 |
||||
|
Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
|
|
D1 |
Φ202 |
Φ180 |
Φ253 |
Φ240 |
Φ305 |
Φ290 |
|
|
D2 |
Φ212 |
Φ212 |
Φ237 |
Φ237 |
Φ274 |
Φ274 |
|
|
D3 |
Φ236 |
Φ236 |
Φ266 |
Φ266 |
Φ296 |
Φ296 |
|
|
D4 |
¨145.7 |
¨145.7 |
¨167.6 |
¨167.6 |
¨183.9 |
¨183.9 |
|
|
H1 |
375 |
375 |
405 |
405 |
393 |
393 |
|
|
H2 |
235 |
235 |
265 |
265 |
250 |
250 |
|
|
H3 |
238 |
238 |
265 |
265 |
250 |
250 |
|
|
H4 |
108 |
108 |
113 |
113 |
110 |
110 |
|
|
H5 |
4 |
4 |
19 |
19 |
16 |
16 |
|
|
L1 |
130 |
130 |
145 |
145 |
160 |
160 |
|
|
L2 |
137 |
137 |
152 |
152 |
176 |
176 |
|
|
Pump leg screw hole |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
|
|
Outlet Flange(mm) |
KF40 |
KF40 |
KF40 |
KF40 |
KF50 |
KF50 |
|
EV Series Air-cooling compound Molecular Pumps
EV-series air-cooled compound molecular pump is composed of turbomolecular pump and disc traction pump. It has the characteristics of high pumping speed and compression ratio for molecular flow of turbomolecular pump, high pumping speed and compression ratio for high pressure of traction pump, and expands the application scope of molecular pump.
The compound molecular pump has no selectivity and memory effect on the pumped gas. Because of its high compression ratio to the gas with large molecular weight, the pump can obtain clean high and ultra high vacuum without cold trap and oil baffle. It is widely used in various fields of electronics, metallurgy, chemical industry, scientific research and vacuum technology.
|
Model |
EV-600F |
EV-1200F |
EV-1600F |
|||
|
Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
|
D1 |
Φ202 |
Φ180 |
Φ253 |
Φ240 |
Φ305 |
Φ290 |
|
D2 |
Φ236 |
Φ236 |
Φ266 |
Φ266 |
Φ274 |
Φ274 |
|
D3 |
¨145.7 |
¨145.7 |
¨167.6 |
¨167.6 |
¨183.8 |
¨183.8 |
|
H1 |
455 |
455 |
472 |
472 |
465 |
465 |
|
H2 |
217.5 |
217.5 |
210 |
210 |
214.5 |
214.5 |
|
H3 |
151 |
151 |
151 |
151 |
153 |
153 |
|
L1 |
130 |
130 |
145 |
145 |
161 |
161 |
|
L2 |
137 |
137 |
152 |
152 |
166 |
166 |
|
Pump leg screw hole |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
4-M8 |
Product detail pictures:
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