Refrigerant Vacuum Pump - EV series compound molecular pumps – Super Q

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Refrigerant Vacuum Pump - EV series compound molecular pumps – Super Q Detail:

EV-series Technical Data

Model		EV-600 EV-600F		EV-1200 EV-1200F		EV-1600 EV-1600F
Inlet Flange (mm)		150 CF	160 ISO-K	200 CF	200 ISO-K	250 CF	250 ISO-K
Outlet Flange(mm)		40 KF		40 KF		50 KF
Pumping Speed(L/S)		600		1200		1600
Compression Ratio	N²	>10⁹		>10⁹		>10⁹
	H²	>8X10³		>1X10⁴		>1X10⁴
Ultimate Vacuum(Pa)		<8X10^-8	<5X10^-7	<8X10^-8	<5X10^-7	<8X10^-8	<5X10^-7
Rotation Speed(rpm)		24000		24000		24000
Vibration		≤0.1 μm		≤0.1 μm		≤0.15 μm
Run-up Time(min)		<4.5		<5		<6
Backing Pump		4-8 L/S		8-15 L/S		15 L/S
Cooling Method		Water(air) cooling		Water(air) cooling		Water(air) cooling
Cooling Water Temperature (℃)		≤20		≤20		≤20
Ambient Temperature（℃）		≤35		≤35		≤35
Cooling Water Flow quantity		1-2 L/min		1-2 L/min		1-2 L/min
Bake-out Temperature（℃）		<120		<120		<120
Heater Power（w）		<250		<300		<300
Heater Input Voltage（v）		AC220		AC220		AC220
Mounting		Vertical ±5°		Vertical ±5°		Vertical ±5°
Weight(kg)		≈25		≈29		≈31

EV series compound molecular pumps (2)

Atmospheric Pumping Curve of Compound
Molecular Pump

EV series compound molecular pumps (1)

Compressing ratio curve of nitrogen and hydrogen
by compound molecular pump

EV Series Installation Dimension Table of compound Molecular Pump

Model	EV-600		EV-1200			EV-1600
Inlet Flange (mm)	150 CF	160 ISO-K	200 CF		200 ISO-K	250 CF	250 ISO-K
D1	Φ202	Φ180	Φ253		Φ240	Φ305	Φ290
D2	Φ212	Φ212	Φ237		Φ237	Φ274	Φ274
D3	Φ236	Φ236	Φ266		Φ266	Φ296	Φ296
D4	¨145.7	¨145.7	¨167.6		¨167.6	¨183.9	¨183.9
H1	375	375	405		405	393	393
H2	235	235	265		265	250	250
H3	238	238	265		265	250	250
H4	108	108	113		113	110	110
H5	4	4	19		19	16	16
L1	130	130	145		145	160	160
L2	137	137	152		152	176	176
Pump leg screw hole	4-M8	4-M8	4-M8		4-M8	4-M8	4-M8
Outlet Flange(mm)	KF40	KF40	KF40	KF40		KF50	KF50

EV Series Air-cooling compound Molecular Pumps

EV-series air-cooled compound molecular pump is composed of turbomolecular pump and disc traction pump. It has the characteristics of high pumping speed and compression ratio for molecular flow of turbomolecular pump, high pumping speed and compression ratio for high pressure of traction pump, and expands the application scope of molecular pump.
The compound molecular pump has no selectivity and memory effect on the pumped gas. Because of its high compression ratio to the gas with large molecular weight, the pump can obtain clean high and ultra high vacuum without cold trap and oil baffle. It is widely used in various fields of electronics, metallurgy, chemical industry, scientific research and vacuum technology.

Model	EV-600F		EV-1200F		EV-1600F
Inlet Flange (mm)	150 CF	160 ISO-K	200 CF	200 ISO-K	250 CF	250 ISO-K
D1	Φ202	Φ180	Φ253	Φ240	Φ305	Φ290
D2	Φ236	Φ236	Φ266	Φ266	Φ274	Φ274
D3	¨145.7	¨145.7	¨167.6	¨167.6	¨183.8	¨183.8
H1	455	455	472	472	465	465
H2	217.5	217.5	210	210	214.5	214.5
H3	151	151	151	151	153	153
L1	130	130	145	145	161	161
L2	137	137	152	152	166	166
Pump leg screw hole	4-M8	4-M8	4-M8	4-M8	4-M8	4-M8