Ubumenyi - Indangagaciro za Vacuum

I. Intangiriro ya valve
Vacuum valve nikintu cya sisitemu ya vacuum ikoreshwa muguhindura icyerekezo cyumuyaga, guhindura ingano yimyuka ya gaze, guca cyangwa guhuza umuyoboro muri sisitemu ya vacuum.Ibice bifunga valve ya vacuum bifunzwe na kashe ya kashe cyangwa kashe.

II.Porogaramu isanzwe ya vacuum.
Imyanda
Ikoreshwa mubikoresho bya sisitemu yo hejuru cyangwa ultra-high vacuum mugihe vacuum igomba kubungabungwa muri sisitemu yo gufunga vacuum.Imyanda ya Vacuum ikoreshwa mugucunga umwuka winjira mucyumba cya vacuum, kwigunga, guhumeka, gutanga kugabanya umuvuduko cyangwa kugenzura imiyoboro.Irembo ryamarembo, Inline ya valve hamwe na valve inguni nubwoko busanzwe bwa vacuum valve ikoreshwa murwego rwo hejuru cyangwa ultra-high vacuum progaramu.Ubwoko bwinyongera bwinyongera burimo ibinyugunyugu, kwimura imipira, imipira yumupira, pendulum, ibyuma byose, ibyuma bya vacuum, impagarike ya aluminiyumu, icyuma cya Teflon cyometse kuri vacuum.

Ibinyugunyugu
ni gufungura byihuse byimbere bigizwe na disiki yicyuma cyangwa ibinyabiziga bigenda byerekera kumpande iburyo yerekeza ku cyerekezo gitemba mu muyoboro kandi iyo kizunguruka ku murongo wabo, valve ifunga intebe mu mubiri wa valve.

Kwimura indangagaciro (irembo ry'urukiramende)
Imyanya yo gutandukana ikwiriye gukoreshwa hagati yicyumba cya vacuum gifunze imitwaro hamwe nicyumba cyo kwimuriramo, no hagati yicyumba cyohererezamo ibyumba bitunganyirizwamo ibikoresho byo gukora semiconductor.

Umuyoboro wa Vacuum
ni kimwe cya kane gihinduranya imigozi igororotse hamwe nuruziga rwo gufunga inteko hamwe nintebe zuzengurutswe kugirango zifatwe kimwe.

Indangantego
ni nini nini ya trottle yashyizwe hagati yimikorere ya vacuum na pompe ya turbomolecular.Iyi vacuum pendulum ya valve isanzwe ikorwa nkirembo cyangwa pendulum ya progaramu ya porogaramu zirimo OLED, FPD na PV sisitemu yo gukora inganda.

Ibyuma byose
Yashizweho kugirango ikoreshwe muri ultra-high vacuum ibidukikije aho ubushyuhe bwo hejuru butemerera gukoresha elastomers hamwe nicyuma cya gasogi.Ibyuma byokunywa ibyuma byose bitanga ubushyuhe bwizewe buva mukirere cyikirere kugeza munsi ya 10-11 mbar.

Imyanda
Kora wizewe muri sisitemu yumusaruro wa semiconductor no mubisabwa hamwe na chimique nuduce twanduye.Birashobora gukoreshwa muri vacuum ikaze, vacuum ndende cyangwa ultra-high vacuum ibidukikije.

Imyenda ya aluminium
Kwinjira no gusohoka kwi mibande biri kumurongo ugororotse.Iyi mfuruka yimfuruka ikozwe muri aluminium A6061-T6 kandi ikoreshwa mugukoresha igice cya kabiri nogukora ibikoresho, R&D hamwe na sisitemu ya vacuum yinganda kugirango ikoreshwe cyane.

Teflon yubatswe na vacuum valve nigikoresho cyuzuye cyuzuye ibyuma bitagira ibyuma bya vacuum hamwe nibikoresho birebire kandi birwanya imiti cyane.

III.Ibiranga valve vacuum.
Umuvuduko uri munsi yumuvuduko wikirere kandi umuvuduko wumuvuduko hejuru ya valve ntishobora kurenga 1 kg imbaraga / cm.Ubushyuhe bwo gukora bwikigereranyo biterwa nuburyo bwibikoresho byakoreshejwe.Ubushyuhe muri rusange ntabwo burenga intera ya -70 ~ 150 ° C.Ikintu cyibanze gisabwa kuri iyo mibande ni ukwemeza urwego rwo hejuru rwo gukomera kwihuza hamwe nubucucike bwimiterere nibikoresho bya gaze.

Ukurikije umuvuduko wo hagati wa vacuum valve irashobora kugabanywamo amatsinda ane.
1) Umuyoboro muke wa vacuum: umuvuduko wo hagati p = 760 ~ 1 mmHg.
2 val Hagati ya vacuum yo hagati: p = 1 × 10-3 mmHg.
3 ves Umuyoboro mwinshi wa vacuum: p = 1 × 10-4 ~ 1 × 10-7 mmHg.
4） Ultra-high vacuum valve: p≤1 × 10-8 mmHg.

Nka valve ifunze-izenguruka ifite diameter ya pass ya munsi ya mm 250, uruti rukoreshwa cyane ni vacuum inzogera zifunga valve zifunga umurongo.Irembo ry'irembo, ariko, rirabujijwe cyane, ariko ibi ahanini ni diameter nini.Haraboneka kandi plaque ya plaque (imipira yumupira), plunger valves na kinyugunyugu.Gucomeka kumashanyarazi ya vacuum ntabwo byatejwe imbere kuko bisaba gusiga amavuta, bigatuma bishoboka ko imyuka ya peteroli yinjira muri sisitemu ya vacuum, bitemewe.Imyanda ya Vacuum irashobora kugenzurwa nintoki kandi kure mumurima, kimwe namashanyarazi, amashanyarazi (solenoid valve), pneumatike na hydraulically.