Pule o le tafega tele o kasa vevela (MFC)
O lermalgamasinifmaualalometer(MFM)isakindofaccuratemeasurementofgasflow,the measuredvalueserenotcontrolledbyfluctuationsintemperatureorpressure, e le manaʻomiathecompensationoftemperatureandpressure.
Fa'ata'ita'iga | SQC-100 |
Va'aiga o le tafe (N2) | 0~5,10,20,30,50,100,200,500SCCM |
0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
Sa'o | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Ituaiga Valve Drive | Tapuni masani |
Linearity | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Toe fai | ±0.2%FS |
Taimi Tali | ≤1sec |
Fa'ailoga Fa'aofi/fa'aulu | 0~5V |
Feso'ota'iga eletise | DB15 pine (nila) |
Galuega Tem. | 5~45℃ |
Eseesega Muamua. | 0.05~0.5MPa (MFC); 0.03~3.0MPa (MFM) |
Leak Rate | 1×10-8SCCS (Ia) |
Max.Omiga | 3MPa |
Mea Lautele | 316L SS ma mea faʻamaufaʻailoga |
Mea Faamauga | Viton, Silicone pa'u, NBR, Teflon, Fa'amaufa'ailoga uamea. |
Soofaatasi Tele | VCR 1/4”;Swagelok 1/8” 、1/4”;φ3, φ6mm |
Paoa sapalai | +15V,50mA;-15V,200mA |
Fa'ata'ita'iga | SQC-200 |
Va'aiga o le tafe (N2) | MFC:0~20,30,50,100,150,200SLM |
MFM:0~20,30,50,100,150,200,250,300SLM | |
Sa'o | ±2%FS |
Ituaiga Valve Drive | Tapuni masani |
Linearity | ±2%FS |
Toe fai | ±0.2%FS |
Taimi Tali | ≤5sec |
Fa'ailoga Fa'aofi/fa'aulu | 1~5V;4~20mA |
Feso'ota'iga eletise | DB15 pine (nila) |
Galuega Tem. | 5~45℃ |
Eseesega Muamua. | 0.1~0.3MPa(MFC); 0.05~3.0MPa(MFM) |
Leak Rate | 1×10-8SCCS (Ia) |
Max.Omiga | 3MPa |
Mea Lautele | 316L SS ma mea faʻamaufaʻailoga |
Mea Faamauga | Viton, Silicone pa'u, NBR, ERP, Teflon |
Soofaatasi Tele | Swagelok 3/8” 、1/2”; φ8,φ10,φ12mm |
Paoa sapalai | 24V,0.5A |
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