Hombe yekupomba inogara yakasimba Yakaderera ruzha DRV rotary vane mweya pombi vacuum pombi
Iyo DRV yakatevedzana vacuum pombi ndeye mbiri nhanho inotenderera vane mafuta-yakavharwa vacuum pombi inokodzera yakaderera uye yepakati vacuum application, inonyanya kushandiswa kubvisa mweya uye mamwe magasi akaoma.Ndiyo imwe yemidziyo mikuru yepasi uye yepakati vacuum, inogona kushandiswa yega kana semberi
pombi yemamwe mapombi evacuum.
Iyo pombi yevacuum ine hunhu-tics hwekuita kwakavimbika mashandiro, kushoma kupfeka zvikamu, kuderera kwekudedera, ruzha rwakadzika uye kugona kwakanyanya.
Iyo SV yakatevedzana vacuum pombi inounzwa kubva kunze kwenyika tekinoroji, uye zvakakosha zvikamu zvinounzwa kunze kwenyika kana kunze kwenyika.
zvinhu.Iyo DRV yakatevedzana vacuum pombi inogona kutsiva zvachose zvakafanana zvigadzirwa zvekunze.
Bhurocha reEVFB Series Molecular Pump Product
Muenzaniso:
EVFB-100/301 Musanganiswa wakabatanidzwa molecular pombi
EVFB-160/401 Musanganiswa wakabatanidzwa molecular pombi
EVFB-160/450D Anti-vibration molecular pombi
EVFB-160/701Compound yakabatanidzwa molecular pombi
EVFB-200/1401 Musanganiswa wakabatanidzwa molecular pombi
EVFB-250/2201 Musanganiswa wakabatanidzwa molecular pombi
EVFB-160/701Compound molecular pump
EVFB-200/1401 Musanganiswa molecular pombi
EVFB-250/2201 Musanganiswa molecular pombi
EVFB-400/3600 Turbo molecular pombi
EVFB-400/4500 Turbo molecular pombi
Product Overview
Molecular pombi imhando yekumhanya kwazvo inotenderera inotenderera yekuchinjisa vacuum pombi, kushanda kwayo kudzvanywa kwemhando inowanzoita gumi.-1Pa ~ 10-7Pa, ndeimwe yeakakosha vacuum yekutora midziyo yekuwana yakakwira vacuum uye yekupedzisira-yakakwira vacuum.Molecular pombi ine zvakanakira kukurumidza kutanga-kumusoro kumhanya, yakafara yekushanda siyana, yakaderera mashandisiro emagetsi, kuchena kwakanyanya uye nyore kugadzirisa.
Molecular pombi zvigadzirwa zvinotsanangurwa mubhuku remuenzaniso chizvarwa chechipiri chezvigadzirwa
ichangoburwa nekambani, iyo inonyanya kugadzirwa uye yakagadziridzwa maindasitiri vacuum uye sainzi nzvimbo dzekutsvagisa, kusanganisira yekutanga nhevedzano yeindasitiri vacuum molecular pombi zvigadzirwa zvine akabatanidzwa ma controller uye anochinjika mashandisiro mamiriro.Zvinoenderana necaliber, pane kunyanya DN100, DN160, DN200, DN250 uye DN400 uye zvimwe zvigadzirwa.
Gira mafuta anokosha anokosha molecular pump
Zvinonyanya kukosha zveiyi nhevedzano yezvigadzirwa:
(1) Yakabatanidzwa controller: Yakabatanidzwa controller dhizaini, fambisa sisitimu kubatanidzwa, kiyi yekutanga-kumira;
(2) Precision bearing: Girisi lubrication chaiyo ceramic ball bearing, Yakaiswa chero Angle;
(3) Kuvimbika kwakakwirira: Pakazara rotors, BLDC kutyaira tekinoroji;
(4) Kushanda kwakasiyana-siyana: Yakazara huwandu hwezvishongedzo, Customized mhinduro dziripo;
(5) Ipa inogadziriswa kumhanya basa, Kusangana nezvinodiwa zvakasiyana-siyana zvekupomba kumhanya;
Iyi nhevedzano yezvigadzirwa inonyanya kukodzera PVD, CVD, liquid crystal plate uye mamwe maindasitiri ekuputira;Mass spectrometry, high-energy fizikisi, vacuum leak yekuona, mushonga uye biological engineering uye mamwe masayenzi ekutsvagisa minda.
Molecular pombi technical Specifications
| Model | EVFB-100/301 | EVFB-160/401 | EVFB-160/450D(custom-made） | ||||
| ☑The vacuum parameters | |||||||
| Kupomba speed (L/s) | N2 | He | N2 | He | N2 | He | |
| 300 | 230 | 460 | 380 | 38 | 310 | ||
| Ultimate pressure | < 5×10-6 Pa (LF);< 5×10 -7 Pa (CF) | < 8×10 -6 Pa (LF) < 8×10 -7 Pa (CF) | |||||
| Compression ratio | > | > | > | > | > 1×108 | > 1×10 3 | |
| Maximumcontinuousinletpress ure | 10 Pa | 2Pa | 10 Pa | 2 Pa | 20 | 5 Pa | |
| MaximumcontinuousForelinepressure | 300 | 200 | 300 | 200 Pa | 20 | 10 Pa | |
| Maxforelinepressuretolerance | 1000 | 500 | 1000 | 500 Pa | 50 | 20 Pa | |
| ☑Zvenyama parameter | |||||||
| Inlet flange | DN100 ISO-K (LF) kana CF | DN160 ISO-K (LF) kana CF | |||||
| Foreline flange | DN25 ISO-KF kana DN40KF (Sarudzo) | ||||||
| Purge flange | DN16 ISO-KF | ||||||
| Kurema | 9.6 kg (ISO-K | 10kg (ISO-K) | |||||
| 10kg (CF) | 11 kg (CF) | ||||||
| Vibration | ≤0.05 μm | ||||||
| Noise | ≤55 dB (Iyo yakajairwa kutonhora kwemhepo) | ||||||
| Bearing | Zorai lubricated ceramic ball bearing | ||||||
| Kushanda chinzvimbo | Chero | ||||||
| Oper.ambient Magnetic munda | ≤3 mT (Yakakura kwazvo 10mT, Inoda kugadzirisa) | ||||||
| Oper.ambie nt | Aircooling | 5 ~ 35 ℃ | |||||
| Kutonhodza mvura | 5 ~ 40 ℃ | ||||||
| Coolingwaterrequirements | Tembiricha: 15-30 ℃;kumanikidza:0.15Mpa;PH6~8,pachena,Oilfree;kuyerera:≥1L/min | ||||||
| Recommended forepump | 2~6 L/s | 3~8L/s | |||||
| ☑Controller parameters | |||||||
| Controller | EVFB-II | ||||||
| Rotational speed | 48000rp | 36000 rpm | |||||
| Low speed | 33600rp | 25200 rpm | |||||
| Tanga nguva | ≤5min | ||||||
| Voltage | 48VAC±2% | ||||||
| Kukurukurirana mode | RS-485 | ||||||
| Model | EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | ||||
| ☑The vacuum parameters | |||||||
| Ultimate pressure (Pa) | <5x10-6(LF);<5x10-7(CF) | ||||||
| Kupomba speed (L/s) | N2 | He | N | He | N2 | He | |
| 6 | 5 | 1350 | 1200 | 2050 | 1800 | ||
| Compression ratio | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | |
| Maximumcontinuousinletpress ure (Pa) | 2 | 1 | 2 | 1 | 2 | 1 | |
| MaximumcontinuousForelinepressure(Pa) | 30 | 2 | 3 | 2 | 2 | 1 | |
| Maxforelinepress uretolerance (Pa) | 10 | 5 | 1000 | 5 | 5 | 2 | |
| ☑Zvenyama parameter | |||||||
| Inlet flange | DN160 ISO-K (LF) kana CF | DN200 ISO-K (LF)或 CF | DN250 ISO-K (LF) kana | ||||
| Foreline flange | DN25 ISO-KF kana KF40(Inosarudzika) | DN40 ISO-KF kana KF50(Inosarudzika) | |||||
| Purge flange | DN16 ISO-KF | ||||||
| Recommended pombi (L/s) | 4~ | 8~ | 16~2 | ||||
| Kurema(kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ||||
| 23 (CF) | 34 | 45 (CF) | |||||
| Vibration | ≤ | ||||||
| Noise(dB) | ≤ | ||||||
| Bearing | Zorai lubricated ceramic ball bearing | ||||||
| Kushanda chinzvimbo | Chero | ||||||
| Magnetic munda simba (mT) | ≤3 (Iyo huru 10mT, Inoda kugadzirisa) | ||||||
| Oper.ambient tembiricha | Air kutonhora | 5 ~ 35 ℃ | |||||
| Mvura kutonhora | 5 ~ 40 ℃ | ||||||
| Kutonhora mvura zvinodiwa | Tembiricha yemvura:15-25 ℃;kumanikidza:0.15Mpa;PH6~8,zvakajeka,Oiri isina Kuyerera:≥1.5L/min | ||||||
| ☑Controller parameters | |||||||
| Controller | EVFB-III-A | ||||||
| Kukurukurirana mode | RS-485 | ||||||
| Voltage(V） | 220V AC±10% | ||||||
| Frequency(Hz） | 50/60±5% | ||||||
| Maximum input Simba(W） | 100 | ||||||
| Tanga/mira control mode | Controller mabhatani kudzora kutanga uye kumira / RS485 controller kutanga uye kumira / DB15 Kudzora kutanga uye kumira | ||||||
| Dziviriro | Controller overcurrent, overvoltage, undervoltage, overheating protection, molecular pump overcurrent, overload, overheating protection, etc. | ||||||
| Rotational speed (r/min) | 36000±0.1% | 30000±0.1% | 24000±0.1% | ||||
| Low speed (r/min) | 25200±0.1% | 21000±0.1% | 16800±0.1% | ||||
| Current(A） | ≤0.6 | ≤1 | ≤1 | ||||
| Dziviriro fuse(A） | 6.5 | 6.5 | 6.5 | ||||
| Nguva yekutanga(min） | ~5 | ~6 | ~7 | ||||
| Nguva yekuzorora(min） | ~5 | ~10 | ~12 | ||||
Overall Dimension
| Model | DN | d1 | h | h1 | h2 | d2 | n |
| EVFB-100/301 | 100 LF | 130 | 253.5 | 180 | 170 | - | - |
| 100 CF | 152 | 274.5 | 201 | 191 | 130.3 | 16 | |
| EVFB-160/401 | 160 LF | 180 | 239.5 | 169.5 | 159.5 | - | - |
| 160 CF | 202 | 238.5 | 168.5 | 158.5 | 181 | 20 | |
| EVFB-160/450D | 160 LF | 180 | 243 | 169.5 | 159.5 | - | - |
| 160 CF | 202 | 242 | 168.5 | 158.5 | 181 | 20 |
| Model | DN | d1 | d2 | h | h1 | h3 | L |
| EVFB-160/700 | 160 LF | 180 | 218.5 | 241.8 | 336.8 | 201.8 | 124.8 |
| EVFB-160/701 | 160CF | 202 | 218.5 | 268.8 | 359.8 | 224.8 | 124.8 |
| EVFB-200/1400 | 200 LF | 240 | 267 | 257.5 | 352.5 | 231.5 | 155.1 |
| EVFB-200/1401 | 200CF | 253 | 267 | 274.5 | 369.5 | 248.5 | 155.1 |
| EVFB-250/2200 | 250 LF | 290 | 296 | 229.8 | 324.8 | 203.8 | 165.3 |
| EVFB-250/2201 | 250CF | 305 | 296 | 259.8 | 354.8 | 233.8 | 165.3 |
Kuraira Information
| Number | Product model | Product code | Accessories | Ordernhamba | Tsanangura |
|
1 |
EVFB-100/301(LF) |
A3123 | mwero molecular pombi | A3123 | Iyo yakajairwa pombi (Kutonhora kwemhepo kwakajairwa nekusarudzika) |
| Purge valve accessories(kuyerera kudiki) | A3123-A | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki) | |||
| Mvura-inotonhorera zvikamu | A3123-B | Iyo yakajairwa pombi + Mvura-inotonhora zvikamu (Siva mhepo yakatonhodzwa zvikamu) | |||
| Purge valve accessories (kuyerera kudiki), Mvura-kutonhodza zvikamu | A3123-C | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki)+ Mvura-kutonhodza zvikamu (Tsiva zvinhu zvakatonhorera zvemweya) | |||
|
2 |
EVFB-100/301(CF) |
A3124 | mwero molecular pombi | A3124 | Iyo yakajairwa pombi (Kutonhora kwemhepo kwakajairwa nekusarudzika) |
| Purge valve accessories(kuyerera kudiki) | A3124-A | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki) | |||
| Mvura-inotonhorera zvikamu | A3124-B | Iyo yakajairwa pombi + Mvura-inotonhora zvikamu (Siva mhepo yakatonhodzwa zvikamu) | |||
| Purge valve accessories (kuyerera kudiki), Mvura-kutonhodza zvikamu | A3124-C | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki)+ Mvura-kutonhodza zvikamu (Tsiva zvinhu zvakatonhorera zvemweya) | |||
|
3 |
EVFB-160/401(LF) |
A3127 | mwero molecular pombi | A3127 | Iyo yakajairwa pombi (Kutonhora kwemhepo kwakajairwa nekusarudzika) |
| Purge valve accessories(kuyerera kudiki) | A3127-A | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki) | |||
| Mvura-inotonhorera zvikamu | A3127-B | Iyo yakajairwa pombi + Mvura-inotonhora zvikamu (Siva mhepo yakatonhodzwa zvikamu) | |||
| Purge valve accessories (kuyerera kudiki), Mvura-kutonhodza zvikamu | A3127-C | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki)+ Mvura-kutonhodza zvikamu (Tsiva zvinhu zvakatonhorera zvemweya) | |||
|
4 |
EVFB-160/401(CF) |
A3128 | mwero molecular pombi | A3128 | Iyo yakajairwa pombi (Kutonhora kwemhepo kwakajairwa nekusarudzika) |
| Purge valve accessories(kuyerera kudiki) | A3128-A | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki) | |||
| Mvura-inotonhorera zvikamu | A3128-B | Iyo yakajairwa pombi + Mvura-inotonhora zvikamu (Siva mhepo yakatonhodzwa zvikamu) | |||
| Purge valve accessories | A3128-C | Iyo yakajairika pombi + Purge vharafu |
| (kuyerera kudiki), Mvura-kutonhodza zvikamu | zvishongedzo (zvidiki zvinoyerera)+ Mvura-kutonhodza zvikamu (Tsvanuramhepo inotonhorera zvikamu) | ||||
|
5 |
EVFB-160/450D(LF) |
A3129 | mwero molecular pombi | A3129 | Iyo yakajairwa pombi (Kutonhora kwemhepo kwakajairwa nekusarudzika) |
| Purge valve accessories(kuyerera kudiki) | A3129-A | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki) | |||
| Mvura-inotonhorera zvikamu | A3129-B | Iyo yakajairwa pombi + Mvura-inotonhora zvikamu (Siva mhepo yakatonhodzwa zvikamu) | |||
| Purge valve accessories (kuyerera kudiki), Mvura-kutonhodza zvikamu | A3129-C | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki)+ Mvura-kutonhodza zvikamu (Tsiva zvinhu zvakatonhorera zvemweya) | |||
|
6 |
EVFB-160/450D(CF) |
A3130 | mwero molecular pombi | A3130 | Iyo yakajairwa pombi (Kutonhora kwemhepo kwakajairwa nekusarudzika) |
| Purge valve accessories(kuyerera kudiki) | A3130-A | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki) | |||
| Mvura-inotonhorera zvikamu | A3130-B | Iyo yakajairwa pombi + Mvura-inotonhora zvikamu (Siva mhepo yakatonhodzwa zvikamu) | |||
| Purge valve accessories (kuyerera kudiki), Mvura-kutonhodza zvikamu | A3130-C | Iyo yakajairwa pombi + Purge valve accessories (kuyerera kudiki)+ Mvura-kutonhodza zvikamu (Tsiva zvinhu zvakatonhorera zvemweya) | |||
|
7 |
EVFB-160/701(LF) |
A3139 | mwero molecular pombi | A3139 | The standard pombi (Mvura kutonhorairi mwero nekusarudzika) |
| Purge valve accessories | A3139-A | Iyo yakajairika pombi + Purge vharafuaccessories | |||
| Fani zvikamu | A3139-B | Iyo yakajairika pombi + Fani | |||
| Purge valve accessories,Fani zvikamu | A3139-C | Iyo yakajairika pombi + Purge vharafuaccessories + Fan zvikamu | |||
|
8 |
EVFB-160/701(CF) |
A3140 | mwero molecular pombi | A3140 | The standard pombi (Mvura kutonhorairi mwero nekusarudzika) |
| Purge valve accessories | A3140-A | Iyo yakajairika pombi + Purge vharafuaccessories | |||
| Fani zvikamu | A3140-B | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories,Fani zvikamu | A3140-C | Iyo yakajairika pombi + Purge vharafuaccessories + Fan zvikamu | |||
|
9 |
EVFB-200/1401(LF) |
A3135 | mwero molecular pombi | A3135 | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3135-A | Iyo yakajairika pombi + Purge vharafuaccessories | |||
| Fani zvikamu | A3135-B | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories, | A3135-C | Iyo yakajairika pombi + Purge vharafu |
| Fani zvikamu | accessories + Fan zvikamu | ||||
|
10 |
EVFB-200/1401(CF) |
A3136 | mwero molecular pombi | A3136 | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3136-A | Iyo yakajairika pombi + Purge vharafuaccessories | |||
| Fani zvikamu | A3136-B | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories, | A3136-C | Iyo yakajairika pombi + Purge vharafuaccessories + Fan zvikamu | |||
|
11 |
EVFB-250/2201(LF) |
A3141 | mwero molecular pombi | A3141 | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3141-A | Iyo yakajairika pombi + Purge vharafuaccessories | |||
| Fani zvikamu | A3141-B | Iyo yakajairika pombi + Fani | |||
| Purge valve accessories, Fani zvikamu | A3141-C | Iyo yakajairika pombi + Purge vharafuaccessories + Fan zvikamu | |||
|
12 |
EVFB-250/2201(CF) |
A3142 | mwero molecular pombi | A3142 | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3142-A | Iyo yakajairika pombi + Purge vharafuaccessories | |||
| Fani zvikamu | A3142-B | Iyo yakajairika pombi + Fani | |||
| Purge valve accessories, | A3142-C | Iyo yakajairika pombi + Purge vharafuaccessories + Fan zvikamu | |||
| 13 | EVFB-II | A3261 | - | A3261 | Molecular pombi controller (Inokodzera pombi dzemamorekuru seEVFB- 100/301, EVFB- 160/401, EVFB-100/450D) |
| 14 | EVFB-III-A | A3263 | - | A3263 | Molecular pombi controller (Inokodzera pombi dzemamorekuru dzakadai seEVFB- 160/701, EVFB- 200/1401, EVFB-250/2201) |
Yakaparadzaniswa Compound molecular pumps
Zvinonyanya kukosha zveiyi nhevedzano yezvigadzirwa:
(1) Akapatsanurwa controller: AC220V magetsi emagetsi, kiyi yekutanga-kumisa;
(2) Kuvimbika kwepamusoro: Pakazara rotors, BLDC kutyaira tekinoroji;
(3) Precision bearing: Precision ceramic ball bearing, Yakaiswa chero Angle (Gresi chete mamodheru ane lubricated);
(4) Kushanda kwakasiyana-siyana: Yakazara huwandu hwezvishongedzo, Customized mhinduro dziripo;
(5) Ipa inogadziriswa kumhanya basa,Kusangana nezvinodiwa zvekusiyana kwekupomba kumhanya; Iyi nhevedzano yezvigadzirwa inonyanya kushanda kuPVD, CVD, liquid crystal plate uye zvimwe.
kushandiswa kwemaindasitiri, kutsvagisa kwesainzi uye mamwe minda.
Molecular pombi technical parameters
| Model | EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | EVFB-400/3600 | EVFB-400/4500 | |||||
| ☑The vacuum parameters | ||||||||||
| Ultimatepressure (Pa) | <5x10-6(LF);<5x10-7(CF) | |||||||||
| Kupomba speed (L/s) | N2 | He | N2 | He | N2 | H | N2 | He | N2 | He |
| 650 | 550 | 1350 | 1200 | 2050 | 1800 | 3600 | 3000 | 4800 | 3500 | |
| Compressionratio | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | >1x108 | >6x102 | >1x108 | >8x103 |
| Maximum continuous inletpressure (Pa) | 2 | 1 | 2 | 1 | 2 | 1 | 0.05 | 0.02 | 0.03 | 0.01 |
| Maximumcontinuous Foreline | 300 | 200 | 300 | 200 | 200 | 100 | 50 | 35 | 40 | 30 |
| Maxforelinepressuretolerance (Pa) | 1000 | 500 | 1000 | 500 | 500 | 200 | 340 | 160 | 160 | 80 |
| ☑Zvenyama parameter | ||||||||||
| Inlet flange | DN160 ISO-K (LF) kana CF | DN200 ISO-K (LF) kana CF | DN250 ISO-K (LF) kana CF | DN400 ISO-K (LF) kana CF | DN400 ISO-K (LF) kana CF | |||||
| Foreline flange | DN25 ISO-KF,KF40 (Sarudzo) | DN40 ISO-KF,KF50(Sarudzo) | DN100 ISO-K (LF) | DN100 ISO-K (LF)orKF50 (Sarudzo) | ||||||
| Purge flange | DN16 ISO-KF | / | DN16 ISO-KF | |||||||
| Recommended | 4~10 L/s | 8~16 L/s | 16~24 L/s | 30~70 L/s | ||||||
| Kurema(kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ≈ 100 ISO-K(LF) | ≈ 83 ISO-K(LF) | |
| 23 (CF) | 34 (CF) | 45 (CF) | ≈ 105 (CF) | ≈ 88 (CF) | ||
| Vibration | ≤ 0.05 | ≤ 0.3 | ||||
| Noise (dB) | ≤ 50 | ≤ 60 | ||||
| Bearing | Zorai lubricated ceramic ball bearing | Ceramic bhora kubereka | ||||
| Kushanda chinzvimbo | Chero | Yakatwasuka±5° | ||||
| Oper.Ambient Magneticfield | ≤ 3mT (Iyo yakakura 10mT, Inoda kugadzirisa) | ≤ 3mT | ||||
| Oper.ambient tembiricha | Air kutonhora | 5~35oC | / | / | ||
| Kutonhodza mvura | 5~40oC | |||||
| Kutonhora mvura zvinodiwa | Tembiricha yemvura: 15-25 ℃; pre sure: 0.15Mpa; kuyerera:≥1.5L/min | kuyerera: ≥ 3L/min | ||||
| ☑Controller parameters | ||||||
| Vakaparadzana controller | EVFB-III-B (2U) | EVFB-VI (4U) | ||||
| Remote control | Ultra-kure kudzora (ndokumbira bvunza mainjiniya edu) | |||||
| Kukurukurirana mode | RS-485 | |||||
| Voltage(V） | Kubva pa100 kusvika ku240VAC (± | 220VAC (±10%) | ||||
| Frequency(Hz） | 50/60Hz±5% | |||||
| Maximinputpower(W） | 1000 | 1500 | ||||
| Tanga/mira control mode | Controller mabhatani kudzora kutanga uye kumira / RS485 controller kutanga uye kumira / DB15 Kudzora kutanga uye kumira | |||||
| Dziviriro | Controller overcurrent, overvoltage, undervoltage, overheating protection, molecular pump overcurrent,kuwandisa, kudzivirira kupisa, nezvimwe | |||||
| Rotational speed (r/min) | 36000±0.1% | 30000±0.1% | 24000±0.1% | 13500±0.1% | 16200±0.1% | |
| Low speed (r/min) | 25200±0.1% | 21000±0.1% | 16800±0.1% | / | ||
| Current(A） | ≤ 0.6 | ≤ 1 | ≤ 1 | ≤ 5 | ||
| Dziviriro fuse(A） | 6.5 | 6.5 | 6.5 | 12 | ||
| Tanga nguva(min） | ~5 | ~6 | ~7 | ~20 | ||
| Nguva yekuzorora(min） | ~5 | ~10 | ~12 | ~30 | ||
| Oper. ambient mamiriro | Hapana magasi anoora uye guruva riri pachena zvidimbu; nharaunda tembiricha: -10 ℃ ~ 50 ℃; nharaundahumidity: ≤ 90%, vibration kusimba: ≤ 0.5g | |||||
0Verse Dimension
| Model | D N | d1 | d2 | h | h1 | h3 | L |
| EVFB-160/700 EVFB-160/701 | 160 LF | 180 | 218.5 | 241.8 | 336.8 | 201.8 | 124.8 |
| 160CF | 202 | 218.5 | 268.8 | 359.8 | 224.8 | 124.8 | |
| EVFB-200/1400 EVFB-200/1401 | 200 LF | 240 | 267 | 257.5 | 352.5 | 231.5 | 155.1 |
| 200CF | 253 | 267 | 274.5 | 369.5 | 248.5 | 155.1 | |
| EVFB-250/2200 EVFB-250/2201 | 250 LF | 290 | 296 | 229.8 | 324.8 | 203.8 | 165.3 |
| 250CF | 305 | 296 | 259.8 | 354.8 | 233.8 | 165.3 |
EVFB-400/3600 Turbomolecular pombi zviyero
EVFB-400/4500 Turbomolecular pombi zviyero
Kuonekwa kwemutongi akaparadzaniswa
EVFB-III-B (2U) yakaparadzana controller
EVFB-VI (4U) yakaparadzaniswa controller
Order Information
| nhamba | Product model | chigadzirwa code | Accessories | Order nhamba | Tsanangura |
|
1 |
EVFB-160/701(LF) |
A3139-F | Standard molecular pump | A3139-F | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3139-FA | Iyo yakajairwa pombi + Purge valve accessories | |||
| Fani zvikamu | A3139-FB | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories, Fani components | A3139-FC | Iyo yakajairwa pombi + Purge valve accessories + Fani zvikamu | |||
|
2 |
EVFB-160/701(CF) |
A3140-F | mwero molecular pombi | A3140-F | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3140-FA | Iyo yakajairwa pombi + Purge valve accessories | |||
| Fani zvikamu | A3140-FB | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories, Fani components | A3140-FC | Iyo yakajairwa pombi + Purge valve accessories + Fani zvikamu | |||
|
3 |
EVFB-200/1401(LF) |
A3135-F | mwero molecular pombi | A3135-F | Iyo yakajairwa pombi (Kutonhora kwemvura ndiko mwero nekusarudzika) |
| Purge valve accessories | A3135-FA | Iyo yakajairwa pombi + Purge valve accessories | |||
| Fani zvikamu | A3135-FB | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories, Fani components | A3135-FC | Iyo yakajairwa pombi + Purge valve accessories + Fani zvikamu | |||
|
4 |
EVFB-200/1401(CF) |
A3136-F | mwero molecular pombi | A3136-F | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3136-FA | Iyo yakajairwa pombi + Purge valve accessories | |||
| Fani zvikamu | A3136-FB | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories, Fani components | A3136-FC | Iyo yakajairwa pombi + Purge valve accessories + Fani zvikamu | |||
|
5 |
EVFB-250/2201(LF) |
A3141-F | mwero molecular pombi | A3141-F | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3141-FA | Iyo yakajairwa pombi + Purge valve accessories | |||
| Fani zvikamu | A3141-FB | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories, Fani components | A3141-FC | Iyo yakajairwa pombi + Purge valve accessories + Fani zvikamu | |||
|
6 |
EVFB-250/2201(CF) |
A3142-F | mwero molecular pombi | A3142-F | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3142-FA | Iyo yakajairwa pombi + Purge valve accessories | |||
| Fani zvikamu | A3142-FB | Iyo yakajairwa pombi + Fan zvikamu | |||
| Purge valve accessories | A3142-FC | Iyo yakajairika pombi + Purge vharafu |
| Fani zvikamu | accessories + Fan zvikamu | ||||
| 7 | EVFB-400/3600(LF) | A3187 | mwero molecular pombi | A3187 | The standard pombi (Mvura kutonhora iri mwero nekusarudzika) |
| 8 | EVFB-400/3600(CF) | A3188 | mwero molecular pombi | A3188 | The standard pombi (Mvura kutonhora iri mwero nekusarudzika) |
|
9 |
EVFB-400/4500(LF) |
A3185 | mwero molecular pombi | A3185 | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3185-A | Iyo yakajairwa pombi + Purge valve accessories | |||
|
10 |
EVFB-400/4500(CF) |
A3186 | mwero molecular pombi | A3186 | Iyo yakajairwa pombi (Mvura kutonhora ndeye mwero nekusarudzika) |
| Purge valve accessories | A3186-A | Iyo yakajairwa pombi + Purge valve accessories | |||
|
11 |
EVFB-III-HMI |
A3261-1 |
Inoshandiswa nemaoko panel |
A3261-1 | Mutengi anosarudzika, Inokodzera pombi dzemamorekuru seEVFB-160/701, EVFB-200/1401, EVFB-250/2201 |
| 12 | EVFB-VI | A3270 | Separated controller (4U) | A3270 | Inokodzera Turbo molecular pombi dzakadai EVFB-400/3600, EVFB-400/450 |
| 13 | EVFB-III-B | A3264 | Separated controller (2U) | A3264 | Inokodzera pombi dzema molecular dzakadai seEVFB-160/701, EVFB-200/1401, EVFB-250/2201 (rudzi rwakaparadzana) |
