Mass Flow Controller Misa Inoyerera Meter CS200
Features
1. High Accuracy uye Fast Response
Kurongeka kweCS200 MFC kwakagadziridzwa kusvika ± 1.0% yeSP, uye mhando dzepamusoro dzine nguva yekupindura yakaderedzwa isingasviki 0.8 sec.
2. Low Zero Drift uye Temperature Coefficient
Kugadzirwa kwehunyanzvi hwekunzwa tekinoroji kunogonesa iyo CS200 MFC kuchengetedza kugadzikana uye kutsungirira kushanduka kwekushisa.Pasina auto-zero amplifier, inotarisirwa zero drift isingasviki 0.6% FS/gore, uye tembiricha coefficient iri pasi pe0.02%FS/℃(zero)，0.05%FS/ ℃ (span).
3. Metal-Sealed Models uye High Purity Feature
Iyo yakanyoroveswa kuyerera nzira ye-iyo-iyo-mutsara CS200 MFC inovakwa kubva pamusoro-passivated simbi isina tsvina.Ese maCS200 MFC akaungana muSevenstar's Ultraclean Kirasi 100-kirasi yekuchenesa dzimba zvinoenderana neSEMI uye ISO 9001 zviyero.
4. Inopindirana Interfaces
Iyo CS200 MFC inopindirana neanotevera mainterface, ayo anogona kusarudzwa nemutengi: ± 8V-± 16V kaviri-magumo magetsi uye +14V-+28V single-end magetsi ekupa;dhijitari kana analog chiratidzo chekuisa uye kubuda;SEMI yakajairwa michina zviyero;uye RS-485 kana DeviceNet communications module.
5. Miscellaneous Mabasa
Yakasimba mutengi software inouya yakajairwa nemodhi yega yega, nepo mamwe mabasa akadai seakawanda-gasi, akawanda-renji, otomatiki zero, maalarm, nyoro kutanga, uye kunonoka kunowanikwa sekusarudzwa kwevatengi.
Tsanangudzo
| CS200 | |||||||
| Type | CS200A | CS200C | CS200D | ||||
| Chikero chakazara (N2) | ( 0～5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Kururama | ±1.0% SP (≥35% FS) ±0.35% FS?(＜35% FS) | ||||||
| Linearity | ±0.5% FS | ||||||
| Kudzokorora | ±0.2% FS | ||||||
| Nguva Yekupindura | ≤1sec | ≤0.8 sec (SEMI E17-0600) | |||||
| Valve Rest Position | Kazhinji Kuvharwa kana | Hapana Valve | Kazhinji Kuvharwa kana | Hapana Valve | Kazhinji Kuvharwa kana | Hapana Valve | |
| Kazhinji Vhura (100 sccm≤FS≤5 slm) | Kazhinji Vhura (100 sccm≤FS≤5 slm) | Kazhinji Vhura (100 sccm≤FS≤5 slm) | |||||
| Differential Pressure | 0.05～0.35MPa (Kuyerera≤10slm) | ＜0.02MPa | (0.05～0.35) MPa (≤10slm) | ＜0.02MPa | (0.05～0.35) MPa (≤10slm) | ＜0.02MPa | |
| 0.1～0.35MPa(10slm＜Flow≤30slm) | (0.1-0.35) MPa (＞10slm) | (0.1-0.35) MPa (＞10slm) | |||||
| 0.2 ~ 0.45MPa (Kuyerera = 30slm) | |||||||
| Maximum Operating Pressure | 0.45MPa | |||||
| Tembiricha | Zero:≤±0.05% FS/℃; | Zero:≤±0.02% FS/℃;Nguva:≤±0.05% FS/℃ | ||||
| Coefficient | Nguva: ≤±0.1% FS/℃ (Kuyerera≤30slm) | |||||
| Nguva: ≤±0.2% FS/℃ (Kuyerera> 30slm) | ||||||
| Proof Pressure | 3MPa (435pisg) | |||||
| Zero Drift | ＜0.6% FS pagore pasina autozero | |||||
| Leak kuvimbika | 1×10-9 atm · cc / sec Iye | 1×10-10atm · cc / sec Iye | ||||
| Wetted Materials | Viton; | Simbi?(Stainless Simbi V/V, 5Ra) | Metal | |||
| Surface Chemistry | —— | Cr/Fe chiyero ＞2.0;CrO ukobvu ＞20 Angstroms | ||||
| Surface Finish | 25Ra | 10Ra | 25Ra | |||
| Operation Temperature | (5～45）℃ | (0～50）℃ | ||||
| Input Signal | Digital: RS485 kana ProfiBus | N/A | Digital: RS485 kana ProfiBus kana DeviceNetTM | N/A | Digital: RS485 kana ProfiBus kana DeviceNetTM | N/A |
| kana DeviceNetTM | Analogi:(0～5)VDC kana (4～20)mA kana (0～20)mA | Analogi:(0～5)VDC kana (4～20)mA?kana (0～20)mA | |||||
| Analogi:(0～5)VDC kana (4～20)mA kana(0～20)mA | |||||||
| Output Signal | Digital: RS485 kana DeviceNetTM kana ProfiBus Analog:(0～5)VDC kana (4～20)mA kana (0～20)mA | ||||||
| Magetsi | ±8 ~ ±16 VDC kana +14 ~ +28 VDC(400mA) | ||||||
| Electronic Connector | 9 pini murume sub-D ，15 pini murume sub-D ，DeviceNetTM,ProfBus, Analog | ||||||
| Fittings | VCR1/4” M; VCO1/4” M; | VCR1/4” M; | |||||
| Compression FittingΦ10;Compression FittingΦ6; | Compression FittingΦ6, | ||||||
| Compression Fitting 3/8";Compression Fitting1/4”; | Compression FittingΦ3, | ||||||
| Compression Fitting1/8”;Compression FittingΦ3; | Compression Fitting1/4”, | ||||||
| Ф6(mukati)×1hose;ф5(mukati)×1.5hose;ф4(mukati)×1hose; | W-chisimbiso, | ||||||
| A-sael ; | C-chisimbiso | ||||||
| Kurema | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | |
