Ruzivo – Vacuum Mavharuvhu

I. Nhanganyaya yevhavha
Vacuum valve inhengo yevacuum system inoshandiswa kushandura mafambiro emhepo, gadzirisa saizi yekuyerera kwegasi, kucheka kana kubatanidza pombi muvacuum system.Zvikamu zvekuvhara zvevhavhavhavha yakavharwa nerubha chisimbiso kana chisimbiso chesimbi.

II.Common vacuum valve applications.
Vacuum valves
Inoshandiswa mune yakakwirira kana yepamusoro-yepamusoro vacuum system michina kana vacuum inofanirwa kuchengetedzwa mune yakavharwa vacuum inobata system.Vacuum mavharuvhu anoshandiswa kudzora kuyerera kwemhepo mukati mevacuum chamber, kuzviparadzanisa nevamwe, vent, kupa kudzikisira kudzvinyirira kana kudzora conduction.Mavharuvhu egedhi, Inline mavharuvhu uye makona mavharuvhu ndiwo anonyanya kuzivikanwa marudzi evacuum mavharuvhu anoshandiswa pakakwirira kana ultra-high vacuum application.Mamwe mavharuvhu emhando anosanganisira butterfly mavharuvhu, mavharuvhu ekutamisa, bhora mavharuvhu, pendulum mavharuvhu, ose-simbi mavharuvhu, vacuum mavharuvhu, aruminiyamu angled mavharuvhu, Teflon-coated vacuum mavharuvhu uye zvakananga-kuburikidza mavharuvhu.

Butterfly mavharuvhu
mavharuvhu ekuvhura anokurumidza kuita madhisiki esimbi kana kuti mavharuvhu anotenderera kumakona ekurudyi achienda kwaanoyerera nepombi uye kana atenderedzwa paaxis yawo, vharuvhu inonamira chigaro mumutumbi wevharuvhu.

Transfer valves (rectangular gedhi mavharuvhu)
Mavharuvhu ekuparadzanisa akakodzera kushandiswa pakati pemitoro-yakakiyiwa vacuum makamuri uye makamuri ekutamisa, uye pakati pemakamuri ekutamisa uye makamuri ekugadzirisa mune semiconductor yekugadzira michina.

Vacuum Ball Valves
ari quarter turn straight flow mavharuvhu ane denderedzwa rekuvhara musangano rine zvigaro zvakatenderedzwa zve yunifomu yekuisa chisimbiso kushushikana.

Pendulum mavharuvhu
ivharuvhu hombe yakasungirirwa pakati peiyo process vacuum chamber uye turbomolecular pump inlet.Aya vacuum pendulum mavharuvhu anowanzo kugadzirwa segedhi kana pendulum mavharuvhu ekushandisa anosanganisira OLED, FPD uye PV maindasitiri ekugadzira masisitimu.

Zvose-simbi mavharuvhu
Yakagadzirirwa kushandiswa mu-ultra-high vacuum nharaunda umo tembiricha yepamusoro isingatenderi kushandiswa kwe elastomers uye cryogenic gasket metals.Bakeable all-metal mavharuvhu anopa yakavimbika yakakwirira tembiricha chisimbiso kubva mumhepo kumanikidzwa kusvika pazasi 10-11 mbar.

Vacuum valves
Shanda zvakavimbika mumasemiconductor ekugadzira masisitimu uye mumashandisirwo ane makemikari uye chidimbu kusvibiswa.Iwo anogona kushandiswa mune rough vacuum, yakakwira vacuum kana Ultra-yakakwira vacuum nharaunda.

Aluminium angle valves
Kupinda nekubuda kwemavharuvhu aya kuri pamakona ekurudyi kune mumwe nemumwe.Aya mavharuvhu emakona anogadzirwa nealuminium A6061-T6 uye anoshandiswa mukugadzira semiconductor uye instrumentation, R&D uye maindasitiri vacuum masisitimu eakaomarara kusvika kune yakakwira vacuum application.

Iyo Teflon yakavharwa vacuum vharafu ndeye yakagadziridzwa yakazara Stainless simbi vacuum chikamu mudziyo ine yakasimba uye yakanyanya kupikisa makemikari.

III.Hunhu hwevacuum valves.
Dzvinyiriro iri pazasi pemhepo yemuchadenga uye kudonha kwekudzvanywa kwevhavhavhavha haigoni kudarika 1 kg simba / cm.Kupisa kwekushanda kwepakati kunoenderana nemaitiro echigadzirwa chinoshandiswa.Tembiricha kazhinji haipfuure huwandu hwe -70 ~ 150°C.Chinonyanya kudiwa kune mavharuvhu akadaro ndeyekuvimbisa yakakwira dhigirii yekubatana uye denseness yechimiro uye gasket zvinhu.

Zvinoenderana nepakati pressure vacuum mavharuvhu anogona kukamurwa kuita mapoka mana.
1) Low vacuum mavharuvhu: pakati pressure p = 760 ~ 1 mmHg.
2）Mavharuvhu epakati: p=1×10-3 mmHg.
3）Mavharuvhu epamusoro: p=1×10-4 ~1×10-7 mmHg.
4）Ultra-high vacuum valve: p≤1×10-8 mmHg.

Sevharuvhu yakavharwa ine dhayamita isingasviki 250 mm, dzinde rinoshandiswa zvakanyanya ivacuum bellows shut-off valve ine linear movement.Mavharuvhu emagedhi, zvisinei, anonyanya kudziviswa, asi izvi zvinonyanya kune madhayamita makuru.Anowanikwawo mavharuvhu e spherical plug (mavharuvhu ebhora), mavharuvhu eplunger nemavharuvhu eshavishavi.Plug mavharuvhu evacuum mavharuvhu haana kusimudzirwa nekuti anoda mafuta ekuzora, zvichiita kuti mafuta mhute apinde muvacuum system, isingabvumidzwe.Vacuum mavharuvhu anogona kudzorwa nemaoko uye kure mumunda, pamwe nemagetsi, emagetsi (solenoid mavharuvhu), pneumatically uye hydraulically.