Mapombi anowanzo shandiswa mu-ultra-high vacuum systems

I. Mechanical pombi
Basa guru repombi yemagetsi ndeyekupa inodiwa pre-stage vacuum yekutanga-up ye turbomolecular pombi.Mapombi emuchina anowanzo shandiswa anosanganisira kunyanya mapombi akaoma evortex, mapombi ediaphragm uye pombi dzakavharwa neoiri.
Mapombi ediaphragm ane kukurumidza kupomba kwakaderera uye anowanzo shandiswa kune madiki masheti epombi nekuda kwehukuru hudiki.
Iyo oiri-yakavharwa mechanical pombi ndiyo yakanyanya kushandiswa mechani pombi munguva yakapfuura, inoratidzwa nekumhanya kukuru kwekupomba uye yakanaka yekupedzisira vacuum, chakashata kuvepo kwese kwekudzoka kwemafuta, mune ekupedzisira-yakakwira vacuum masisitimu anowanzoda kuve akashongedzerwa solenoid vharafu. (yekudzivirira kutadza kwemagetsi netsaona kunokonzerwa nekudzoka kwemafuta) uye molecular sieve (adsorption effect).
Mumakore achangopfuura, iyo inonyanya kushandiswa ndeye mupumburu wakaoma pombi. Iyo inobatsira iri nyore kushandisa uye haidzokeri kumafuta, kungomhanya kwekupomba uye yekupedzisira vacuum yakashata zvishoma kupfuura iyo yemafuta-yakavharwa mechanical pombi.
Mechanical pombi ndiwo anonyanya kukonzeresa ruzha uye kuzunguzika murabhoritari uye zviri nani kusarudza pombi ine ruzha yakaderera uye woiisa pakati pemidziyo pazvinogoneka, asi iyo yekupedzisira kazhinji haisi nyore kuwana nekuda kwekurambidzwa daro rekushanda.
II.Turbomolecular pombi
Turbo molecular pumps anovimba nekumhanya kukuru kutenderera vanes (kazhinji kutenderedza 1000 revolutions paminiti) kuti iwane nzira yekuyerera kwegasi.Huyero hwepombi yekupopota yekupopota kune inlet pressure inodaidzwa kuti compression ratio.The compression reshiyo ine hukama nehuwandu hwematanho epombi, kumhanya uye rudzi rwegasi, iyo general molecular huremu hwekudzvanywa kwegasi yakakwira.Iyo yekupedzisira vacuum ye turbomolecular pombi inowanzoonekwa se 10-9-10-10 mbar, uye mumakore achangopfuura, nekuenderera mberi kwekuenderera mberi kwema molecular pump tekinoroji, iyo yekupedzisira vacuum yakavandudzwa.
Sezvo mabhenefiti epombi ye turbomolecular anongoonekwa mune imwe molecular flow state (inoyerera mamiriro umo mavhareji emahara egasi mamorekuru akakura kupfuura saizi yepamusoro ye duct cross-section), pre-stage vacuum pombi. ine simba rekushanda re1 kusvika 10-2 Pa rinodiwa.Nekuda kwekumhanya kwakanyanya kwekutenderera kwemavanes, iyo molecular pombi inogona kukuvadzwa kana kuparadzwa nezvinhu zvekunze, jitter, kukanganisa, resonance kana gasi kuvhunduka.Kune vanotanga, chinonyanya kukonzera kukanganisa ndeye gasi kuvhunduka kunokonzerwa nekukanganisa kwekushanda.Kukuvadzwa kwepombi yemamorekuru kunogonawo kukonzereswa neresonance inokonzereswa ne mechanical pump.Chirwere ichi hachiwanzoitiki asi chinotoda kutariswa zvakanyanya nekuti chinenge chiri chikiribidi uye hachioneki nyore.

III.Pombi yekuputira ion
Musimboti wekushanda wepombi inoputira ion ndeyekushandisa maion anogadzirwa nePenning discharge kubhomba titanium plate yecathode kuti igadzire firimu retitanium nyowani, nekudaro kushambadza magasi anoshanda uye kuve neimwe mhedzisiro yekuvigwa pamagasi anert zvakare. .Zvakanakira sputtering ion pombi yakanaka yekupedzisira vacuum, hapana vibration, hapana ruzha, hapana kusvibiswa, yakakura uye yakagadzikana maitiro, hapana kugadzirisa uye panguva imwechete yekupomba kumhanya (kunze kwemagasi anert), mutengo wavo wakadzikira zvakanyanya kupfuura mapombi emamorekuru, izvo zvinoita kuti zvive zvakanyanya kushandiswa zvakanyanya mu-ultra-high vacuum systems.Kazhinji iyo yakajairika yekushanda kutenderera kwemapombi e-sputtering ion inopfuura makore gumi.
Mapombi eion anowanzoda kunge ari pamusoro pe10-7 mbar kuti ashande nemazvo (kushanda pazvivharo zvakanyanya kunoderedza hupenyu hwavo) uye nekudaro zvinoda pombi yemamolecular set kuti ipe yakanaka pre-stage vacuum.Zvakajairika kushandisa pombi yeion + TSP mukamuri huru uye pombi diki yemamorekuru yakaiswa mukamuri yekupinza.Paunenge uchibika, vhura vharuvhu yekuisa yakabatana uye rega iyo diki yepombi yepombi ipe yekutsvaira yekumberi.
Zvinofanira kucherechedzwa kuti mapombi eion haakwanise kudzvova egasi inert uye kumhanya kwadzo kukuru kwekupomba kunosiyana neiyo yemapombi emamorekuru, zvekuti kune mavhoriyamu makuru ekubuda kana kuwanda kwemagasi anert, seti yepombi inodiwa inodiwa.Uye zvakare, iyo ion pombi inogadzira munda wemagetsi panguva yekushanda, iyo inogona kukanganisa zvakanyanya masisitimu anonzwa.
IV.Titanium sublimation pombi
Titanium sublimation pombi inoshanda nekuvimba nekubuda kwesimbi titanium kugadzira titanium firimu pamadziro ekamuri ye chemisorption.Zvakanakira titanium sublimation pombi kuvaka kuri nyore, mutengo wakaderera, kugadzirisa kuri nyore, hapana mwaranzi uye hapana ruzha rwekudengenyeka.
Titanium sublimation pombi dzinowanzove dzine 3 titanium filaments (kudzivirira kupisa) uye dzinoshandiswa pamwe chete nemamorekuru kana ayoni pombi kupa yakanakisa kubviswa kwehydrogen.Ndiwo mapombi anonyanya kukosha mu10-9-10-11 mbar range uye akaiswa mumakamuri akawanda epamusoro-soro apo mazinga akakwirira ekuvhaira anodiwa.
Kuipa kwetitanium sublimation pombi ndiko kudiwa kwekugaroputika kwetitanium, iyo vacuum inokanganisa neinosvika 1-2 maodha ehukuru panguva yekupuruzira (mukati memaminitsi mashoma), saka mamwe makamuri ane zvinodiwa chaizvo anoda kushandiswa kweNEG.zvakare, kune titanium inonzwisisika samples / zvishandiso, kutarisirwa kunofanirwa kutorwa kudzivirira nzvimbo yetitanium sublimation pombi.
V. Cryogenic pombi
Mapombi eCryogenic anonyanya kutsamira pane yakaderera tembiricha yemuviri adsorption kuti iwane vacuum, ine zvakanakira zvekumhanya kwekupomba, hapana kusvibiswa uye yakakwirira yekupedzisira vacuum.Zvinhu zvikuru zvinokanganisa kukurumidza kupomba kwemapombi e-cryogenic tembiricha uye nzvimbo yepombi.Mune yakakura mamorekuru danda epitaxy masisitimu, cryogenic pombi anoshandiswa zvakanyanya nekuda kweiyo yepamusoro yekupedzisira vacuum zvinodiwa.
Izvo zvisingabatsiri zvemapombi e-cryogenic ndiko kushandiswa kwepamusoro kwenitrogen yemvura uye mari yakawanda yekushandisa.Masisitimu ane recirculating chillers anogona kushandiswa pasina kushandisa mvura nitrogen, asi izvi zvinounza nedambudziko rinoenderana rekushandiswa kwesimba, vibration uye ruzha.Nechikonzero ichi, mapombi e-cryogenic haanyanyi kushandiswa mumidziyo yakajairika yerabhoritari.
VI.Mapombi eAspirator (NEG)
Suction agent pombi ndeimwe yeanonyanya kushandiswa vacuum pombi mumakore achangopfuura, mukana wayo kushandisa kwakazara kwemakemikari adsorption, hapana vapor plating uye kusvibiswa kwemagetsi, kunowanzo shandiswa pamwe chete nemapombi emamorekuru kutora nzvimbo yetitanium sublimation pombi uye sputtering ion. pombi, iyo yakashata ndiyo mutengo wakakwira uye shoma nhamba yekuvandudzwa, inowanzo shandiswa mumasisitimu ane zvakakwirira zvinodiwa zvevacuum kugadzikana kana zvakanyanya kutarisisa kuminda yemagetsi.
Pamusoro pezvo, sepombi yeaspirator inoda kusawedzerwa kwemagetsi ekubatanidza kunze kwekutanga activation, inowanzoshandiswa mumasisitimu mahombe sepombi yekubatsira kuti iwedzere kumhanya kwekupomba uye kuvandudza nhanho yevacuum, iyo inogona kunyatso nyore hurongwa.

Mufananidzo : Kushanda kumanikidza kwemhando dzakasiyana dzepombi.Miseve yebrown inoratidza huwandu hunobvumidzwa hwekushanda hwekumanikidza uye zvikamu zvakasvibirira zvakasvibirira zvinoratidza iyo yakajairwa kushanda kudzvanywa.