Lebelo le leholo la ho pompa le tšoarellang Lerata le tlase la DRV rotary vane air pump vacuum pump
Setsi sa vacuum sa "DRV series" ke "rotary vacuum vacuum" ea mekhahlelo e 'meli e tiisitsoeng ka oli, e loketseng lits'ebetso tsa vacuum tse tlase le tse mahareng, tse sebelisoang haholo ho tlosa moea le likhase tse ling tse omeletseng.Ke e 'ngoe ea lisebelisoa tse ka sehloohong bakeng sa vacuum e tlaase le e bohareng, e ka sebelisoa e le mong kapa e le ka pele
pompo ea lipompo tse ling tsa vacuum.
Pompo ea vacuum e na le litšobotsi tsa ts'ebetso e ts'eptjoang ea ts'ebetso, likarolo tse sa roaloang hantle, ho thothomela ho tlase, lerata le tlase le ho sebetsa hantle haholo.
Pompo ea vacuum ea SV e romelloa ho tsoa ho theknoloji e tsoetseng pele ea kantle ho naha, 'me likarolo tsa bohlokoa ke likarolo tse tsoang kantle ho naha kapa tse tsoang kantle ho naha.
lisebelisoa.The DRV series vacuum pump e ka nka sebaka sa lihlahisoa tse tšoanang tsa kantle ho naha.
Bukana ea EVFB Series Molecular Pump Product
Mohlala:
EVFB-100/301 Motsoako o kopantseng pompo ea molek'hule
EVFB-160/401 Motsoako o kopantseng pompo ea molek'hule
EVFB-160/450D Anti-vibration pompo ea molek'hule
EVFB-160/701Motsoako o kopaneng oa pompo ea molek'hule
EVFB-200/1401 Motsoako o kopantseng pompo ea molek'hule
EVFB-250/2201 Motsoako o kopantseng pompo ea molek'hule
EVFB-160/701Motsoako oa pompo ea molek'hule
EVFB-200/1401 Motsoako oa pompo ea molek'hule
EVFB-250/2201 Motsoako oa pompo ea molek'hule
EVFB-400/3600 Turbo pompo ea molek'hule
EVFB-400/4500 Turbo pompo ea molek'hule
Kakaretso ea Sehlahisoa
Pompo ea limolek'hule ke mofuta oa pompo ea "vacuum vacuum" e potolohang ka lebelo le phahameng, khatello ea eona e sebetsang hangata ke 10.-1Pa ~ 10-7Pa, ke e 'ngoe ea lisebelisoa tsa bohlokoa tsa ho fumana vacuum ho fihlella vacuum e phahameng le vacuum e phahameng haholo.Pompo ea limolek'hule e na le melemo ea lebelo la ho qala ka potlako, mefuta e mengata ea ho sebetsa, tšebeliso e tlaase ea matla, bohloeki bo phahameng le tlhokomelo e bonolo.
Lihlahisoa tsa pompo ea limolek'hule tse hlalositsoeng bukeng ena ea mohlala ke moloko oa bobeli oa lihlahisoa
e sa tsoa qalisoa ke k'hamphani, e etselitsoeng haholo le ho ntlafatsoa bakeng sa libaka tsa vacuum ea indasteri le lipatlisiso tsa mahlale, ho kenyeletsoa letoto la pele la lihlahisoa tsa pompo ea limolek'hule tsa liindasteri tse nang le lilaoli tse kopaneng le maemo a bonolo a ts'ebeliso.Ho ea ka caliber, ho na le haholo-holo DN100, DN160, DN200, DN250 le DN400 le lihlahisoa tse ling.
Tlosa pompo ea molek'hule e tlotsitsoeng ka mafura
Lintlha tse ka sehloohong tsa letoto lena la lihlahisoa:
(1) Taolo e kopaneng: Moralo o hlophisitsoeng oa taolo, Nolofatsa kopanyo ea sistimi, senotlolo sa ho qala;
(2) Precision behang: Grease lubrication precision ceramic ball bearing, E kentsoe ka Angle efe kapa efe;
(3) Ho tšepahala ho phahameng: li-rotor ka kakaretso, theknoloji ea ho khanna ea BLDC;
(4) Phapang e sebetsang: Lethathamo le felletseng la lisebelisoa, litharollo tse ikhethileng lia fumaneha;
(5) Fana ka ts'ebetso ea lebelo le fetohang, Ho fihlela litlhoko tsa mefuta e fapaneng ea lebelo la ho pompa;
Letoto lena la lihlahisoa li loketse haholo-holo bakeng sa PVD, CVD, poleiti ea kristale ea metsi le liaparo tse ling tsa indasteri;Mass spectrometry, fisiks ea matla a phahameng, ho lemoha leak ea vacuum, bongaka le boenjiniere ba likokoana-hloko le likarolo tse ling tsa lipatlisiso tsa saense.
Litlhaloso tsa tekheniki ea pompo ea limolek'hule
| Mohlala | EVFB-100/301 | EVFB-160/401 | EVFB-160/450D（e etselitsoe uena） | ||||
| ☑The vacuum mekhahlelo | |||||||
| Ho pompa lebelo (L/s) | N2 | He | N2 | He | N2 | He | |
| 300 | 230 | 460 | 380 | 38 | 310 | ||
| Qetellong khatello | < 5×10-6 Pa (LF);< 5×10 -7 Pa (CF) | < 8×10 -6 Pa (LF) < 8×10 -7 Pa (CF) | |||||
| Khatello karolelano | > | > | > | > | > 1×108 | > 1×10 3 | |
| Maximumcontinuousinletpress ure | 10 Pa | 2Pa | 10 Pa | 2 Pa | 20 | 5 Pa | |
| MaximumcontinuousForelinepressure | 300 | 200 | 300 | 200 Pa | 20 | 10 Pa | |
| Maxforeline khatello ea ho mamella | 1000 | 500 | 1000 | 500 Pa | 50 | 20 Pa | |
| ☑Ea nama paramethara | |||||||
| Inlet flange | DN100 ISO-K (LF) kapa CF | DN160 ISO-K (LF) kapa CF | |||||
| Foreline flange | DN25 ISO-KF kapa DN40KF (Boikhethelo) | ||||||
| Hloekisa flange | DN16 ISO-KF | ||||||
| Boima ba 'mele | 9.6 lik'hilograma (ISO-K | 10kg (ISO-K) | |||||
| 10kg (CF) | 11kg (CF) | ||||||
| Ho thothomela | ≤0.05 μm | ||||||
| Lerata | ≤55 dB (Moea o pholileng o tloaelehileng) | ||||||
| Bearing | Tlosa bolo ea ceramic e tlotsitsoeng e tlositsoeng | ||||||
| Ho sebetsa boemo | Leha e le efe | ||||||
| Oper.ambient Magnetic lebala | ≤3 mT (E kholo ka ho fetesisa 10mT, E hloka ho e etsa) | ||||||
| Oper.ambie nt | Ho futhumatsa moea | 5 ~ 35 ℃ | |||||
| Pholiso ea metsi | 5 ~ 40 ℃ | ||||||
| Litlhoko tsa metsi a pholileng | Mocheso oa metsi: 15-30 ℃;khatello:0.15Mpa;PH6~8,ho hlakile,Oilfree; phallo:≥1L/min | ||||||
| E khothalelitsoe forepump | 2~6 L/s | 3~8L/s | |||||
| ☑Molaoli mekhahlelo | |||||||
| Molaoli | EVFB-II | ||||||
| E potolohang lebelo | 48000rp | 36000rpm | |||||
| Tlase lebelo | 33600rp | 25200rpm | |||||
| E qalang nako | ≤5metsotso | ||||||
| Palo ea li-volts | 48VAC±2% | ||||||
| Puisano mokgoa | RS-485 | ||||||
| Mohlala | EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | ||||
| ☑The vacuum mekhahlelo | |||||||
| Qetellong khatello (Pa) | <5x10-6(LF);<5x10-7(CF) | ||||||
| Ho pompa lebelo (L/s) | N2 | He | N | He | N2 | He | |
| 6 | 5 | 1350 | 1200 | 2050 | 1800 | ||
| Khatello karolelano | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | |
| Maximumcontinuousinletpress ure (Pa) | 2 | 1 | 2 | 1 | 2 | 1 | |
| MaximumcontinuousForelinepressure(Pa) | 30 | 2 | 3 | 2 | 2 | 1 | |
| Maxforelinepress uretolerance (Pa) | 10 | 5 | 1000 | 5 | 5 | 2 | |
| ☑Ea nama paramethara | |||||||
| Inlet flange | DN160 ISO-K (LF) kapa CF | DN200 ISO-K (LF)或 CF | DN250 ISO-K (LF) kapa | ||||
| Foreline flange | DN25 ISO-KF kapa KF40(Ho ikhethela) | DN40 ISO-KF kapa KF50(Boikhethelo) | |||||
| Hloekisa flange | DN16 ISO-KF | ||||||
| E khothalelitsoe forepump(L/s) | 4~ | 8~ | 16 ~ 2 | ||||
| Boima ba 'mele（kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ||||
| 23 (CF) | 34 | 45 (CF) | |||||
| Ho thothomela | ≤ | ||||||
| Lerata(dB) | ≤ | ||||||
| Bearing | Tlosa bolo ea ceramic e tlotsitsoeng e tlositsoeng | ||||||
| Ho sebetsa boemo | Leha e le efe | ||||||
| Magnetic lebala matla(mT) | ≤3 (10mT e kholo ka ho fetisisa, e hloka ho e etsa) | ||||||
| Oper.ambient mocheso | Moea phodiso | 5 ~ 35 ℃ | |||||
| Metsi phodiso | 5 ~ 40 ℃ | ||||||
| Ho phodisa metsi ditlhoko | Mocheso oa metsi: 15-25 ℃; khatello: 0.15Mpa; PH6~8, ka ho hlaka, Oli ha e na Phallo: ≥1.5L/min | ||||||
| ☑Molaoli mekhahlelo | |||||||
| Molaoli | EVFB-III-A | ||||||
| Puisano mokgoa | RS-485 | ||||||
| Palo ea li-volts（V） | 220V AC±10% | ||||||
| Khafetsa（Hz） | 50/60±5% | ||||||
| Boholo kenya letsoho Matla（W） | 100 | ||||||
| Qala/ emisa taolo mokgoa | Likonopo tsa taolo li laola qala le ho emisa / RS485 molaoli oa qala le ho emisa / DB15 Laola qala le ho emisa | ||||||
| Tshireletso | Controller overcurrent, overvoltage, undervoltage, overheating tshireletso, molecular pump overcurrent, overload, overheating tshireletso, jj. | ||||||
| E potolohang lebelo (r/mots) | 36000±0.1% | 30000±0.1% | 24000±0.1% | ||||
| Tlase lebelo (r/mots) | 25200±0.1% | 21000±0.1% | 16800±0.1% | ||||
| Hona joale（A） | ≤0.6 | ≤1 | ≤1 | ||||
| Tshireletso fuse（A） | 6.5 | 6.5 | 6.5 | ||||
| Nako ea ho qala（min） | ~5 | ~6 | ~7 | ||||
| Nako ea ho phomola（min） | ~5 | ~10 | ~12 | ||||
Kakaretso Dimension
| Mohlala | DN | d1 | h | h1 | h2 | d2 | n |
| EVFB-100/301 | 100 LF | 130 | 253.5 | 180 | 170 | - | - |
| 100 CF | 152 | 274.5 | 201 | 191 | 130.3 | 16 | |
| EVFB-160/401 | 160 LF | 180 | 239.5 | 169.5 | 159.5 | - | - |
| 160 CF | 202 | 238.5 | 168.5 | 158.5 | 181 | 20 | |
| EVFB-160/450D | 160 LF | 180 | 243 | 169.5 | 159.5 | - | - |
| 160 CF | 202 | 242 | 168.5 | 158.5 | 181 | 20 |
| Mohlala | DN | d1 | d2 | h | h1 | h3 | L |
| EVFB-160/700 | 160 LF | 180 | 218.5 | 241.8 | 336.8 | 201.8 | 124.8 |
| EVFB-160/701 | 160CF | 202 | 218.5 | 268.8 | 359.8 | 224.8 | 124.8 |
| EVFB-200/1400 | 200 LF | 240 | 267 | 257.5 | 352.5 | 231.5 | 155.1 |
| EVFB-200/1401 | 200CF | 253 | 267 | 274.5 | 369.5 | 248.5 | 155.1 |
| EVFB-250/2200 | 250 LF | 290 | 296 | 229.8 | 324.8 | 203.8 | 165.3 |
| EVFB-250/2201 | 250CF | 305 | 296 | 259.8 | 354.8 | 233.8 | 165.3 |
Ho laela Boitsebiso
| Nomoro | Sehlahisoa mohlala | Sehlahisoa khoutu | Lisebelisoa | Taelopalo | Hlalosa |
|
1 |
EVFB-100/301(LF) |
A3123 | pompo e tloaelehileng ea limolek'hule | A3123 | Pompo e tloaelehileng (Pholiso ea moea e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve(phallo e nyane) | A3123-A | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane) | |||
| Likarolo tse pholileng tsa metsi | A3123-B | Pompo e tloaelehileng + Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
| Hlatsoa lisebelisoa tsa valve (phallo e nyane), Likarolo tse pholileng tsa metsi | A3123-C | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane)+ Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
|
2 |
EVFB-100/301(CF) |
A3124 | pompo e tloaelehileng ea limolek'hule | A3124 | Pompo e tloaelehileng (Pholiso ea moea e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve(phallo e nyane) | A3124-A | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane) | |||
| Likarolo tse pholileng tsa metsi | A3124-B | Pompo e tloaelehileng + Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
| Hlatsoa lisebelisoa tsa valve (phallo e nyane), Likarolo tse pholileng tsa metsi | A3124-C | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane)+ Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
|
3 |
EVFB-160/401(LF) |
A3127 | pompo e tloaelehileng ea limolek'hule | A3127 | Pompo e tloaelehileng (Pholiso ea moea e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve(phallo e nyane) | A3127-A | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane) | |||
| Likarolo tse pholileng tsa metsi | A3127-B | Pompo e tloaelehileng + Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
| Hlatsoa lisebelisoa tsa valve (phallo e nyane), Likarolo tse pholileng tsa metsi | A3127-C | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane)+ Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
|
4 |
EVFB-160/401(CF) |
A3128 | pompo e tloaelehileng ea limolek'hule | A3128 | Pompo e tloaelehileng (Pholiso ea moea e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve(phallo e nyane) | A3128-A | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane) | |||
| Likarolo tse pholileng tsa metsi | A3128-B | Pompo e tloaelehileng + Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
| Hlatsoa lisebelisoa tsa valve | A3128-C | Pompo e tloaelehileng + Hlatsoa valve |
| (phallo e nyane), Likarolo tse pholileng tsa metsi | lisebelisoa (phallo e nyane)+ Likarolo tse pholileng tsa metsi (Fetolalikarolo tse pholileng moeeng) | ||||
|
5 |
EVFB-160/450D(LF) |
A3129 | pompo e tloaelehileng ea limolek'hule | A3129 | Pompo e tloaelehileng (Pholiso ea moea e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve(phallo e nyane) | A3129-A | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane) | |||
| Likarolo tse pholileng tsa metsi | A3129-B | Pompo e tloaelehileng + Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
| Hlatsoa lisebelisoa tsa valve (phallo e nyane), Likarolo tse pholileng tsa metsi | A3129-C | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane)+ Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
|
6 |
EVFB-160/450D(CF) |
A3130 | pompo e tloaelehileng ea limolek'hule | A3130 | Pompo e tloaelehileng (Pholiso ea moea e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve(phallo e nyane) | A3130-A | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane) | |||
| Likarolo tse pholileng tsa metsi | A3130-B | Pompo e tloaelehileng + Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
| Hlatsoa lisebelisoa tsa valve (phallo e nyane), Likarolo tse pholileng tsa metsi | A3130-C | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve (phallo e nyane)+ Likarolo tse pholileng tsa metsi (Fetola likarolo tse pholileng tsa moea) | |||
|
7 |
EVFB-160/701(LF) |
A3139 | pompo e tloaelehileng ea limolek'hule | A3139 | Pompo e tloaelehileng (Pholiso ea metsike maemo a kamehla) |
| Hlatsoa lisebelisoa tsa valve | A3139-A | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa | |||
| Likarolo tsa fan | A3139-B | Pompo e tloaelehileng + Fan | |||
| Lisebelisoa tsa ho hloekisa valve,Likarolo tsa fan | A3139-C | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa + Likarolo tsa Fan | |||
|
8 |
EVFB-160/701(CF) |
A3140 | pompo e tloaelehileng ea limolek'hule | A3140 | Pompo e tloaelehileng (Pholiso ea metsike maemo a kamehla) |
| Hlatsoa lisebelisoa tsa valve | A3140-A | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa | |||
| Likarolo tsa fan | A3140-B | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Lisebelisoa tsa ho hloekisa valve,Likarolo tsa fan | A3140-C | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa + Likarolo tsa Fan | |||
|
9 |
EVFB-200/1401(LF) |
A3135 | pompo e tloaelehileng ea limolek'hule | A3135 | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3135-A | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa | |||
| Likarolo tsa fan | A3135-B | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Lisebelisoa tsa ho hloekisa valve, | A3135-C | Pompo e tloaelehileng + Hlatsoa valve |
| Likarolo tsa fan | lisebelisoa + Likarolo tsa Fan | ||||
|
10 |
EVFB-200/1401(CF) |
A3136 | pompo e tloaelehileng ea limolek'hule | A3136 | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3136-A | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa | |||
| Likarolo tsa fan | A3136-B | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Hlatsoa lisebelisoa tsa valve, | A3136-C | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa + Likarolo tsa Fan | |||
|
11 |
EVFB-250/2201(LF) |
A3141 | pompo e tloaelehileng ea limolek'hule | A3141 | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3141-A | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa | |||
| Likarolo tsa fan | A3141-B | Pompo e tloaelehileng + Fan | |||
| Hlatsoa lisebelisoa tsa valve、 Likarolo tsa fan | A3141-C | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa + Likarolo tsa Fan | |||
|
12 |
EVFB-250/2201(CF) |
A3142 | pompo e tloaelehileng ea limolek'hule | A3142 | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3142-A | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa | |||
| Likarolo tsa fan | A3142-B | Pompo e tloaelehileng + Fan | |||
| Hlatsoa lisebelisoa tsa valve, | A3142-C | Pompo e tloaelehileng + Hlatsoa valvelisebelisoa + Likarolo tsa Fan | |||
| 13 | EVFB-II | A3261 | - | A3261 | Taolo ea pompo ea limolek'hule (E loketse lipompo tsa limolek'hule tse kang EVFB-100/301, EVFB-160/401, EVFB-100/450D) |
| 14 | EVFB-III-A | A3263 | - | A3263 | Molaoli oa pompo ea limolek'hule (E loketse lipompo tsa limolek'hule tse kang EVFB-160/701, EVFB-200/1401, EVFB-250/2201) |
Lipompompo tse arohaneng tsa Motsoako oa molek'hule
Lintlha tse ka sehloohong tsa letoto lena la lihlahisoa:
(1) Selaoli se arohaneng: phepelo ea motlakase ea AC220V, senotlolo sa ho qala;
(2) Ho tšepahala ho phahameng: li-rotor ka kakaretso, theknoloji ea ho khanna ea BLDC;
(3) Ho roala ka mokhoa o nepahetseng: Ho roala bolo ea ceramic e nepahetseng, E kentsoe ka Angle efe kapa efe (Mefuta e tlositsoeng ka mafura feela);
(4) Phapang e sebetsang: Lethathamo le felletseng la lisebelisoa, litharollo tse ikhethileng lia fumaneha;
(5) Fana ka ts'ebetso ea lebelo le fetohang, Ho fihlela litlhoko tsa mefuta e fapaneng ea lebelo la ho pompa; Letoto lena la lihlahisoa li sebetsa haholo ho PVD, CVD, poleiti ea kristale ea metsi le tse ling.
ho koahela indasteri, lipatlisiso tsa mahlale le likarolo tse ling.
Litekanyetso tsa tekheniki ea pompo ea limolek'hule
| Mohlala | EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | EVFB-400/3600 | EVFB-400/4500 | |||||
| ☑The vacuum mekhahlelo | ||||||||||
| Ultimatepressure(Pa) | <5x10-6(LF);<5x10-7(CF) | |||||||||
| Ho pompa lebelo (L/s) | N2 | He | N2 | He | N2 | H | N2 | He | N2 | He |
| 650 | 550 | 1350 | 1200 | 2050 | 1800 | 3600 | 3000 | 4800 | 3500 | |
| Khatello | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | >1x108 | >6x102 | >1x108 | >8x103 |
| Boholo tswelang pele ho kenakhatello (Pa) | 2 | 1 | 2 | 1 | 2 | 1 | 0.05 | 0.02 | 0.03 | 0.01 |
| Boholotswelang pele Foreline | 300 | 200 | 300 | 200 | 200 | 100 | 50 | 35 | 40 | 30 |
| Maxforelinepressuretolerance(Pa) | 1000 | 500 | 1000 | 500 | 500 | 200 | 340 | 160 | 160 | 80 |
| ☑Ea nama paramethara | ||||||||||
| Inlet flange | DN160 ISO-K (LF) orCF | DN200 ISO-K (LF) kapa CF | DN250 ISO-K (LF) kapa CF | DN400 ISO-K (LF) orCF | DN400 ISO-K (LF) orCF | |||||
| Foreline flange | DN25 ISO-KF,KF40 (Ka boikhethelo) | DN40 ISO-KF,KF50(Ho ikhethela) | DN100 ISO-K (LF) | DN100 ISO-K (LF)orKF50 (Boikhethelo) | ||||||
| Hloekisa flange | DN16 ISO-KF | / | DN16 ISO-KF | |||||||
| E khothalelitsoe | 4~10 L/s | 8~16 L/s | 16~24 L/s | 30~70 L/s | ||||||
| Boima ba 'mele（kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ≈ 100 ISO-K(LF) | ≈ 83 ISO-K(LF) | |
| 23 (CF) | 34 (CF) | 45 (CF) | ≈ 105 (CF) | ≈ 88 (CF) | ||
| Ho thothomela | ≤ 0.05 | ≤ 0.3 | ||||
| Lerata (dB) | ≤50 | ≤60 | ||||
| Bearing | Tlosa bolo ea ceramic e tlotsitsoeng e tlositsoeng | Ho roala bolo ea ceramic | ||||
| Ho sebetsa boemo | Leha e le efe | E eme ±5° | ||||
| Oper.Ambient Sebaka sa Magnetic | ≤ 3mT (E kholo ka ho fetisisa 10mT, E hloka ho e etsa) | ≤ 3mT | ||||
| Oper.ambient mocheso | Moea phodiso | 5 ~ 35oC | / | / | ||
| Pholiso ea metsi | 5 ~ 40oC | |||||
| Ho phodisa metsi ditlhoko | Mocheso oa metsi: 15-25 ℃; pre sure:0.15Mpa; phallo: ≥1.5L/min | phallo: ≥ 3L / min | ||||
| ☑Molaoli mekhahlelo | ||||||
| Arohane molaoli | EVFB-III-B (2U) | EVFB-VI (4U) | ||||
| Hole taolo | Taolo ea hole haholo (ka kopo ikopanye le baenjiniere ba rona) | |||||
| Puisano mokgoa | RS-485 | |||||
| Palo ea li-volts（V） | Ho tloha ho 100 ho isa ho 240VAC (± | 220VAC (± 10%) | ||||
| Khafetsa（Hz） | 50/60Hz±5% | |||||
| Maximuminputpower（W） | 1000 | 1500 | ||||
| Qala/ emisa taolo mokgoa | Likonopo tsa taolo li laola qala le ho emisa / RS485 molaoli oa qala le ho emisa / DB15 Laola qala le ho emisa | |||||
| Tshireletso | Controller overcurrent, overvoltage, undervoltage, overheating tshireletso, molecular pump overcurrent,overload, overheating tshireletso, joalo-joalo | |||||
| E potolohang lebelo (r/mots) | 36000±0.1% | 30000±0.1% | 24000±0.1% | 13500±0.1% | 16200±0.1% | |
| Tlase lebelo (r/mots) | 25200±0.1% | 21000±0.1% | 16800±0.1% | / | ||
| Hona joale（A） | ≤ 0.6 | ≤1 | ≤1 | ≤5 | ||
| Tshireletso fuse（A） | 6.5 | 6.5 | 6.5 | 12 | ||
| E qalang nako（min） | ~5 | ~6 | ~7 | ~20 | ||
| Nako ea ho phomola（min） | ~5 | ~10 | ~12 | ~30 | ||
| Oper. ambient boemo | Ha ho likhase tse senyang le likaroloana tse hlakileng tsa lerōle; mocheso oa tikoloho: -10 ℃ ~ 50 ℃;tikolohomongobo: ≤ 90%, matla a ho sisinyeha: ≤ 0.5g | |||||
0Dimension ka kakaretso
| Mohlala | D N | d1 | d2 | h | h1 | h3 | L |
| EVFB-160/700 EVFB-160/701 | 160 LF | 180 | 218.5 | 241.8 | 336.8 | 201.8 | 124.8 |
| 160CF | 202 | 218.5 | 268.8 | 359.8 | 224.8 | 124.8 | |
| EVFB-200/1400 EVFB-200/1401 | 200 LF | 240 | 267 | 257.5 | 352.5 | 231.5 | 155.1 |
| 200CF | 253 | 267 | 274.5 | 369.5 | 248.5 | 155.1 | |
| EVFB-250/2200 EVFB-250/2201 | 250 LF | 290 | 296 | 229.8 | 324.8 | 203.8 | 165.3 |
| 250CF | 305 | 296 | 259.8 | 354.8 | 233.8 | 165.3 |
EVFB-400/3600 Turbomolecular pompo litekanyo
EVFB-400/4500 Turbomolecular pompo litekanyo
Ponahalo ya molaodi ya arohaneng
EVFB-III-B (2U) e arohaneng le molaoli
EVFB-VI (4U) e arohaneng le molaoli
Taelo Boitsebiso
| palo | Sehlahisoa mohlala | sehlahisoa khoutu | Lisebelisoa | Taelo palo | Hlalosa |
|
1 |
EVFB-160/701(LF) |
A3139-F | Pompo e tloaelehileng ea limolek'hule | A3139-F | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3139-FA | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve | |||
| Likarolo tsa fan | A3139-FB | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Hlatsoa lisebelisoa tsa li-valve, Lisebelisoa tsa fan | A3139-FC | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve + Lisebelisoa tsa Fan | |||
|
2 |
EVFB-160/701(CF) |
A3140-F | pompo e tloaelehileng ea limolek'hule | A3140-F | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3140-FA | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve | |||
| Likarolo tsa fan | A3140-FB | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Hlatsoa lisebelisoa tsa li-valve, Lisebelisoa tsa fan | A3140-FC | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve + Lisebelisoa tsa Fan | |||
|
3 |
EVFB-200/1401(LF) |
A3135-F | pompo e tloaelehileng ea limolek'hule | A3135-F | Pompo e tloaelehileng (Pholiso ea metsi ke e tloaelehileng ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3135-FA | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve | |||
| Likarolo tsa fan | A3135-FB | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Hlatsoa lisebelisoa tsa li-valve, Lisebelisoa tsa fan | A3135-FC | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve + Lisebelisoa tsa Fan | |||
|
4 |
EVFB-200/1401(CF) |
A3136-F | pompo e tloaelehileng ea limolek'hule | A3136-F | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3136-FA | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve | |||
| Likarolo tsa fan | A3136-FB | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Hlatsoa lisebelisoa tsa li-valve, Lisebelisoa tsa fan | A3136-FC | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve + Lisebelisoa tsa Fan | |||
|
5 |
EVFB-250/2201(LF) |
A3141-F | pompo e tloaelehileng ea limolek'hule | A3141-F | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3141-FA | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve | |||
| Likarolo tsa fan | A3141-FB | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Hlatsoa lisebelisoa tsa li-valve, Lisebelisoa tsa fan | A3141-FC | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve + Lisebelisoa tsa Fan | |||
|
6 |
EVFB-250/2201(CF) |
A3142-F | pompo e tloaelehileng ea limolek'hule | A3142-F | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3142-FA | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve | |||
| Likarolo tsa fan | A3142-FB | Pompo e tloaelehileng + Likarolo tsa Fan | |||
| Hlatsoa lisebelisoa tsa valve | A3142-FC | Pompo e tloaelehileng + Hlatsoa valve |
| Likarolo tsa fan | lisebelisoa + Likarolo tsa Fan | ||||
| 7 | EVFB-400/3600(LF) | A3187 | pompo e tloaelehileng ea limolek'hule | A3187 | Pompo e tloaelehileng (Pholiso ea metsi ke maemo a kamehla) |
| 8 | EVFB-400/3600(CF) | A3188 | pompo e tloaelehileng ea limolek'hule | A3188 | Pompo e tloaelehileng (Pholiso ea metsi ke maemo a kamehla) |
|
9 |
EVFB-400/4500(LF) |
A3185 | pompo e tloaelehileng ea limolek'hule | A3185 | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3185-A | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve | |||
|
10 |
EVFB-400/4500(CF) |
A3186 | pompo e tloaelehileng ea limolek'hule | A3186 | Pompo e tloaelehileng (Pholiso ea metsi e tloaelehile ka ho sa feleng) |
| Hlatsoa lisebelisoa tsa valve | A3186-A | Pompo e tloaelehileng + Hlatsoa lisebelisoa tsa valve | |||
|
11 |
EVFB-III-HMI |
A3261-1 |
Phanele e sebetsang ka letsoho |
A3261-1 | Moreki ka boikhethelo, E loketse lipompo tsa molek'hule tse kang EVFB-160/701 、 EVFB-200/1401 、 EVFB-250/2201 |
| 12 | EVFB-VI | A3270 | Selaoli se arohaneng (4U) | A3270 | E loketse lipompo tsa limolek'hule tsa Turbo tse kang EVFB-400/3600, EVFB-400/450 |
| 13 | EVFB-III-B | A3264 | Selaoli se arohaneng (2U) | A3264 | E loketse lipompo tsa limolek'hule tse kang EVFB-160/701 、 EVFB- 200/1401 、 EVFB-250/2201 (mofuta o arohaneng) |
