Lipompo tse sebelisoang hangata lits'ebetsong tsa vacuum tse phahameng haholo

I. Lipompo tsa mechine
Mosebetsi o ka sehloohong oa pompo ea mochini ke ho fana ka vacuum e hlokahalang pele ho sethaleng bakeng sa ho qala pompo ea turbomolecular.Lipompo tsa mochini tse sebelisoang hangata li kenyelletsa haholo lipompo tse omeletseng tsa vortex, lipompo tsa diaphragm le lipompo tsa mochini tse tiisitsoeng ka oli.
Lipompompo tsa diaphragm li na le lebelo le tlase la ho pompa 'me hangata li sebelisoa bakeng sa lisebelisoa tse nyane tsa pompo ea molek'hule ka lebaka la boholo bo bonyenyane.
Pompo ea mochini e tiisitsoeng ka oli ke pompo ea mochini e neng e sebelisoa ka ho fetesisa nakong e fetileng, e tšoauoa ka lebelo le leholo la ho pompa le vacuum e ntle ea ho qetela, bothata ke boteng ba kakaretso ea ho khutla ha oli, lits'ebetsong tsa vacuum tse phahameng haholo hangata li hloka ho ba le valve ea solenoid. (bakeng sa ho thibela ho hloleha ha matla ka phoso ho bakoang ke ho khutla ha oli) le sieve ea molek'hule (adsorption effect).
Lilemong tsa morao tjena, ho sebelisoa haholo ke scroll dry pump.Molemo o bonolo ho o sebelisa ebile ha o khutlele ho oli, feela lebelo la ho pompa le vacuum ea ho qetela e mpe haholo ho feta ea lipompo tsa mochini tse tiisitsoeng ka oli.
Lipompo tsa mechine ke mohloli o ka sehloohong oa lerata le ho thothomela ka laboratoring 'me ho molemo ho khetha pompo ea lerata le tlaase le ho e beha pakeng tsa lisebelisoa moo ho khonehang, empa hangata ha ho bonolo ho e finyella ka lebaka la lithibelo tsa sebaka sa ho sebetsa.
II.Lipompo tsa turbomolecular
Lipompo tsa limolek'hule tsa Turbo li itšetlehile ka li-vanes tse potolohang ka lebelo le phahameng (hangata li pota-potileng 1000 revolutions ka motsotso) ho finyella phallo e lebisang ea khase.Karo-karolelano ea khatello ea ho tsoa ha pompo ho khatello ea ho kena e bitsoa "compression ratio".Karo-karolelano ea khatello e amana le palo ea mekhahlelo ea pompo, lebelo le mofuta oa khase, boima ba limolek'hule tse akaretsang tsa khatello ea khase e batla e phahame.Sekheo sa ho qetela sa pompo ea turbomolecular hangata se nkoa e le 10-9-10-10 mbar, 'me lilemong tsa morao tjena, ka tsoelo-pele e tsoelang pele ea theknoloji ea pompo ea molek'hule, vacuum ea ho qetela e ntlafalitsoe le ho feta.
Joalo ka melemo ea pompo ea turbomolecular e bonoa feela maemong a phallo ea limolek'hule (boemo ba phallo eo ho eona palo ea mahala ea limolek'hule tsa khase e leng kholo haholo ho feta boholo ba karolo ea duct cross-section), pompo ea pre-stage vacuum. ka khatello ea ts'ebetso ea 1 ho 10-2 Pa e hlokahalang.Ka lebaka la lebelo le phahameng la ho potoloha ha li-vanes, pompo ea molek'hule e ka senyeha kapa ea senngoa ke lintho tse tsoang linaheng tse ling, jitter, impact, resonance kapa khase ea khase.Bakeng sa ba qalang, sesosa se atileng haholo sa tšenyo ke ts'oaetso ea khase e bakoang ke liphoso tsa ts'ebetso.Tšenyo ea pompo ea molek'hule e ka boela ea bakoa ke resonance e bakoang ke pompo ea mochine.Boemo bona ha bo fumanehe ka seoelo empa bo hloka tlhokomelo e khethehileng hobane bo bolotsana haholoanyane ’me ha bo lemohuoe habonolo.

III.Pompo ea ion ea sputtering
Molao-motheo oa ts'ebetso oa pompo ea sputtering ion ke ho sebelisa li-ion tse hlahisoang ke phepelo ea Penning ho phatloha poleiti ea titanium ea cathode ho etsa filimi e ncha ea titanium, ka hona e khahla likhase tse sebetsang le ho ba le phello e itseng ea lepato ho likhase tse inert. .Melemo ea lipompo tsa ion tsa sputtering ke vacuum e ntle ea ho qetela, ha ho na ho sisinyeha, ha ho lerata, ha ho na tšilafalo, ts'ebetso e holileng le e tsitsitseng, ha ho tlhokomelo le ka lebelo le ts'oanang la ho pompa (ntle le likhase tse sa sebetseng), litšenyehelo tsa tsona li tlase haholo ho feta lipompo tsa molek'hule, e etsang hore li sebelisoe haholo lits'ebetsong tsa vacuum tse phahameng haholo.Hangata, potoloho e tloaelehileng ea ts'ebetso ea lipompo tsa ion tsa sputtering e feta lilemo tse 10.
Lipompo tsa Ion ka kakaretso li hloka ho ba kaholimo ho 10-7 mbar ho sebetsa hantle (ho sebetsa libakeng tse mpe ka ho fetesisa ho fokotsa bophelo ba bona haholo) ka hona ho hloka sete ea pompo ea limolek'hule ho fana ka vacuum e ntle ea pele ho sethala.Ho tloaelehile ho sebelisa pompo ea ion + TSP ka kamoreng e kholo le pompo e nyenyane ea molek'hule e behiloeng ka kamoreng ea ho kena.Ha u baka, bula valve ea ho kenya e hokahaneng 'me u lumelle sete e nyane ea pompo ea molek'hule e fane ka vacuum e ka pele.
Hoa lokela ho hlokomeloa hore lipompo tsa ion ha li khone ho kenya likhase tse sa sebetseng 'me lebelo la tsona le phahameng la ho pompa le fapane ka mokhoa o itseng le oa lipompo tsa limolek'hule, e le hore bakeng sa likhase tse kholo tsa ho tsoa kapa likhase tse ngata tse sa sebetseng, ho hlokahala sete ea pompo ea molek'hule.Ntle le moo, pompo ea ion e hlahisa sebaka sa motlakase nakong ea ts'ebetso, se ka sitisang lits'ebetso tse hlokolosi haholo.
IV.Lipompompo tsa "Titanium sublimation".
Lipompompo tsa "titanium sublimation" li sebetsa ka ho itšetleha ka ho tsoa mouoane ha titanium ea tšepe ho etsa filimi ea titanium maboteng a kamore bakeng sa chemisorption.Melemo ea lipompo tsa titanium sublimation ke kaho e bonolo, theko e tlase, tlhokomelo e bonolo, ha ho na mahlaseli ebile ha ho lerata la vibrate.
Hangata lipompo tsa "titanium sublimation" li na le li-titanium filaments tse 3 (ho thibela ho tuka) 'me li sebelisoa hammoho le lipompo tsa limolek'hule kapa tsa ion ho fana ka ho tlosoa ha haedrojene ka tsela e babatsehang.Ke lipompo tsa vacuum tsa bohlokoa ka ho fetisisa sebakeng sa 10-9-10-11 mbar 'me li kentsoe ka har'a likamore tsa vacuum tse phahameng haholo moo ho hlokahalang maemo a phahameng a vacuum.
Bobebe ba lipompo tsa titanium sublimation ke tlhokahalo ea ho fafatsa kamehla ka titanium, vacuum e senyeha ka boholo ba litaelo tse ka bang 1-2 nakong ea sputtering (ka metsotso e seng mekae), ka hona, likamore tse ling tse nang le litlhoko tse khethehileng li hloka tšebeliso ea NEG.hape, bakeng sa disampole / lisebelisoa tse bonolo tsa titanium, tlhokomelo e lokela ho nkoa ho qoba sebaka sa pompo ea titanium sublimation.
V. lipompo tsa Cryogenic
Lipompompo tsa cryogenic haholo-holo li itšetleha ka ho ba le mocheso o tlase oa 'mele ho fumana vacuum, ka melemo ea lebelo le phahameng la ho pompa, ha ho na tšilafalo le vacuum e phahameng haholo.Lintlha tse ka sehloohong tse amang lebelo la ho pompa lipompo tsa cryogenic ke mocheso le sebaka se ka holim'a pompo.Lits'ebetsong tse kholo tsa limolek'hule tsa epitaxy, lipompo tsa cryogenic li sebelisoa haholo ka lebaka la litlhoko tse phahameng tsa vacuum.
Mefokolo ea lipompo tsa cryogenic ke tšebeliso e phahameng ea metsi a naetrojene le litšenyehelo tse phahameng tsa ts'ebetso.Litsamaiso tse nang le li-chillers tsa recirculating li ka sebelisoa ntle le ho ja naetrojene ea metsi, empa sena se tlisa mathata a tšoanang a tšebeliso ea matla, ho thothomela le lerata.Ka lebaka lena, lipompo tsa cryogenic ha li sebelisoe hangata lisebelisoa tse tloaelehileng tsa laboratori.
VI.Lipompo tsa aspirator (NEG)
Pompe ea suction agent ke e 'ngoe ea lipompo tsa vacuum tse sebelisoang haholo lilemong tsa morao tjena, molemo oa eona ke ts'ebeliso e felletseng ea adsorption ea lik'hemik'hale, ha ho na mouoane plating le tšilafalo ea motlakase, hangata e sebelisoang hammoho le lipompo tsa molek'hule ho nka sebaka sa lipompo tsa titanium sublimation le ion ea sputtering. lipompo, bofokoli ke litšenyehelo tse phahameng le palo e lekanyelitsoeng ea nchafatso, hangata e sebelisoang lits'ebetsong tse nang le litlhoko tse phahameng bakeng sa botsitso ba vacuum kapa tse amehang haholo masimong a motlakase.
Ho phaella moo, kaha pompo ea aspirator e hloka hore ho se ke ha e-ba le khokahanyo ea motlakase e eketsehileng ho feta ts'ebetsong ea pele, e boetse e sebelisoa hangata ka mekhoa e meholo e le pompo e thusang ho eketsa lebelo la ho pompa le ho ntlafatsa boemo ba ho hloekisa, bo ka nolofatsang tsamaiso ka katleho.

Setšoantšo: Khatello ea ho sebetsa bakeng sa mefuta e fapaneng ea lipompo.Metsu e sootho e bonts'a boholo bo lumelletsoeng ba khatello ea ts'ebetso le likarolo tse tala tse nang le sebete li bonts'a mefuta e tloaelehileng ea khatello ea ho sebetsa.