Super Purchasing for Vacuum Use Iso-F Bolted Flange - Thermal gas Mass Flow Controller (MFC) – Super Q

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Super Purchasing for Vacuum Use Iso-F Bolted Flange - Thermal gas Mass Flow Controller (MFC) – Super Q Detail:

Thermalgasmassflowmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpressure,donot needthecompensationoftemperatureandpressure.

Model	SQC-100
Ranges of Flow (N2)	0～5，10，20，30 ，50 ，100 ，200，500SCCM
Ranges of Flow (N2)	0～1, 2, 3, 5, 10, 15, 20, 30SLM
Accuracy	±1％F.S.(≤15SLM)；±2％F.S.(＞15SLM)
Valve Drive Type	Normal Closed
Linearity	±1％F.S.(≤15SLM)；±2％F.S.(＞15SLM)
Repeatability	±0.2％F.S.
Response Time	≤1sec
Input/output Signal	0～5V
Electric Joint	DB15 pin (needle)
Operation Tem.	5～45℃
Differential Pre.	0.05～0.5MPa （MFC）； 0.03～3.0MPa （MFM）
Leak Rate	1×10-8SCCS （He）
Max. Pressure	3MPa
Medium Material	316L SS and sealing material
Sealing Material	Viton, Silicone rubber, NBR, Teflon, Metal seal.
Joint Size	VCR 1/4”；Swagelok 1/8” 、1/4”；φ3、 φ6mm
Power Supply	+15V,50mA；-15V,200mA

Model	SQC-200
Ranges of Flow (N2)	MFC：0～20，30 ，50 ，100 ，150， 200SLM
Ranges of Flow (N2)	MFM：0～20 ，30 ，50，100 ，150， 200 ，250，300SLM
Accuracy	±2％F.S.
Valve Drive Type	Normal Closed
Linearity	±2％F.S.
Repeatability	±0.2％F.S.
Response Time	≤5sec
Input/output Signal	1～5V；4～20mA
Electric Joint	DB15 pin (needle)
Operation Tem.	5～45℃
Differential Pre.	0.1～0.3MPa（MFC）； 0.05～3.0MPa （MFM）
Leak Rate	1×10-8SCCS （He）
Max. Pressure	3MPa
Medium Material	316L SS and sealing material
Sealing Material	Viton, Silicone rubber, NBR, ERP, Teflon
Joint Size	Swagelok 3/8” 、1/2”； φ8、φ10、φ12mm
Power Supply	24V,0.5A