Thermal gas Mass Flow Controller (MFC)
Angrmalgasmpuwetfmababameter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvalueserenotcontrolledbyfluctuationsintemperatureorpressure, hindi kailanganthecompensationoftemperatureandpressure.
Modelo | SQC-100 |
Mga Saklaw ng Daloy (N2) | 0~5,10,20,30,50,100,200,500SCCM |
0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
Katumpakan | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Uri ng Valve Drive | Normal Sarado |
Linearity | ±1%FS(≤15SLM);±2%FS(>15SLM) |
Pag-uulit | ±0.2%FS |
Oras ng pagtugon | ≤1seg |
Input/output Signal | 0~5V |
Electric Joint | DB15 pin (karayom) |
Operation Tem. | 5~45℃ |
Differential Pre. | 0.05~0.5MPa (MFC); 0.03~3.0MPa (MFM) |
Rate ng Leak | 1×10-8SCCS (Siya) |
Max.Presyon | 3MPa |
Katamtamang Materyal | 316L SS at sealing material |
Materyal ng Pagtatak | Viton, Silicone rubber, NBR, Teflon, Metal seal. |
Sukat ng Pinagsanib | VCR 1/4”;Swagelok 1/8” 、1/4”;φ3、 φ6mm |
Power Supply | +15V,50mA;-15V,200mA |
Modelo | SQC-200 |
Mga Saklaw ng Daloy (N2) | MFC:0~20,30,50,100,150,200SLM |
MFM:0~20 ,30 ,50,100,150,200,250,300SLM | |
Katumpakan | ±2%FS |
Uri ng Valve Drive | Normal Sarado |
Linearity | ±2%FS |
Pag-uulit | ±0.2%FS |
Oras ng pagtugon | ≤5seg |
Input/output Signal | 1~5V;4~20mA |
Electric Joint | DB15 pin (karayom) |
Operation Tem. | 5~45℃ |
Differential Pre. | 0.1~0.3MPa(MFC); 0.05~3.0MPa (MFM) |
Rate ng Leak | 1×10-8SCCS (Siya) |
Max.Presyon | 3MPa |
Katamtamang Materyal | 316L SS at sealing material |
Materyal ng Pagtatak | Viton, Silicone na goma, NBR, ERP, Teflon |
Sukat ng Pinagsanib | Swagelok 3/8” 、1/2”; φ8、φ10、φ12mm |
Power Supply | 24V,0.5A |
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