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Thermal gas Mass Flow Controller (MFC)

Short Description:

Thermal gas mass flow controller (MFC) not only has the function of mass flow meter, but also more important it can control the gas flow automatically that means the user can set the flow as request. MFC will fix the flow on the set value automatically. The set value will be not deviated even if the system pressure fluctuations or surrounding temperature changes. In short, the mass flow controller is a flow stable device, is a gas flow stable device can be programmed manually or controlled by a computer automatically.

 


Product Detail

Product Tags

Thermalgasmassflowmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpressure,donot needthecompensationoftemperatureandpressure.

Model SQC-100
Ranges of Flow (N2) 0~5,10,20,30 ,50 ,100 ,200,500SCCM
0~1, 2, 3, 5, 10, 15, 20, 30SLM
Accuracy ±1%F.S.(≤15SLM);±2%F.S.(>15SLM)
Valve Drive Type Normal Closed
Linearity ±1%F.S.(≤15SLM);±2%F.S.(>15SLM)
Repeatability ±0.2%F.S.
Response Time ≤1sec
Input/output Signal 0~5V
Electric Joint DB15 pin (needle)
Operation Tem. 5~45℃
Differential Pre. 0.05~0.5MPa (MFC); 0.03~3.0MPa (MFM)
Leak Rate 1×10-8SCCS (He)
Max. Pressure 3MPa
Medium Material 316L SS and sealing material
Sealing Material Viton, Silicone rubber, NBR, Teflon, Metal seal.
Joint Size VCR 1/4”;Swagelok 1/8” 、1/4”;φ3、 φ6mm
Power Supply +15V,50mA;-15V,200mA
Model SQC-200
Ranges of Flow (N2) MFC:0~20,30 ,50 ,100 ,150, 200SLM
MFM:0~20 ,30 ,50,100 ,150, 200 ,250,300SLM
Accuracy ±2%F.S.
Valve Drive Type Normal Closed
Linearity ±2%F.S.
Repeatability ±0.2%F.S.
Response Time ≤5sec
Input/output Signal 1~5V;4~20mA
Electric Joint DB15 pin (needle)
Operation Tem. 5~45℃
Differential Pre. 0.1~0.3MPa(MFC); 0.05~3.0MPa (MFM)
Leak Rate 1×10-8SCCS (He)
Max. Pressure 3MPa
Medium Material 316L SS and sealing material
Sealing Material Viton, Silicone rubber, NBR, ERP, Teflon
Joint Size Swagelok 3/8” 、1/2”; φ8、φ10、φ12mm
Power Supply 24V,0.5A

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