Turbo Molecular Pump - High Vacuum Manual Straight Valve, DN16-DN50 – Super Q

Mode

EVGD-16B(KF)S

EVGD-25B(KF)S

EVGD-40B(KF)S

EVGD-50B(KF)S

Pressure range

Pa

1×10^-6Pa～1.2×10⁵Pa (sealed with bellows)
1×10^-5Pa～1.2×10⁵Pa (sealed with fluorine rubber ring)

Inside nominal diameter

mm

16

25

40

50

Leak rate

Pa·L/s

≤1.3×10^-7

Service life until first maintenance

time

200000

Heating temperature

(Valve body)

℃

≤120

Opening / closing time

s

Manual operation time

Position indicator of the valve

—

Mechanical instructions

Installation orientation

—

Any

Ambient temperature

℃

5~40