Ultra-high Vacuum Pneumatic Gate Valve, CF Flange

Short Description:

This series of valves is divided into manual, pneumatic and electric drive modes.

Featured with smooth operation, small size, reliable application, good sealing performance and long service life. It can be widely used in high vacuum equipment.

The valve is powered by a manual rotating handle, a compressed gas pushing cylinder and a motor driving torque. The driving rod pushes (pulls) the moving link mechanism, and the driving body moves along the axial direction, and the driving body passes through the swing rod or the rigid ball and the valve plate.

Connect to complete the valve plate opening and closing action. The medium of the valve is air and non- corrosive gas.

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EVCCQ SeriesUltra-high Vacuum Pneumatic Gate Valve

EVCCQ Series ultra-high vacuum plug-in valve is driven by cylinder rod up and down to open or close the valve plate.

Valves are suitable for cutting off or connecting air flow in ultra-high vacuum system. It has the advantages of reasonable structure design, stable operation, small size, reliable use, good sealing performance and long service life.

The suitable working medium is clean air and non-corrosive gas.

Technical Parameters of EVCCQ SeriesUltra-high Vacuum Pneumatic Gate Valve

Model		EVCCQ-63B(CF)	EVCCQ-80B(CF)	EVCCQ-100B(CF)	EVCCQ-160B(CF)	EVCCQ-200B(CF)	EVCCQ-250B(CF)
Pressure range	Pa	1.3x10-7～1.2x105
Inside nominal diameter	mm	63	80	100	150	200	250
Leak rate	Pa·L/s	1.3x10-7
Differentpressure in opening direction	Pa	3000(arbitrary)
Connection flange	—	CF、ISO-K、GB-LP、ISO-F
Service life until first maintenance	times	10000
Heating temperature(Valve body)	℃	Closed≤120, opend≤150
Supply voltage	V	220±10 %(Other specifications can be customized )
Opening / closing time	s	≤ 6
Compressed air	MPa	0.4~0.7						0.5~0.7
Positionindicator of the valve	—	Magnetic switch
Installation orientation	—	any
Ambient temperature	℃	5~40