Vacuum Solenoid Valves - Ultra-high Vacuum Pneumatic Gate Valve, CF Flange – Super Q

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Vacuum Solenoid Valves - Ultra-high Vacuum Pneumatic Gate Valve, CF Flange – Super Q Detail:

EVCCQ SeriesUltra-high Vacuum Pneumatic Gate Valve

EVCCQ Series ultra-high vacuum plug-in valve is driven by cylinder rod up and down to open or close the valve plate.

Valves are suitable for cutting off or connecting air flow in ultra-high vacuum system. It has the advantages of reasonable structure design, stable operation, small size, reliable use, good sealing performance and long service life.

The suitable working medium is clean air and non-corrosive gas.

Technical Parameters of EVCCQ SeriesUltra-high Vacuum Pneumatic Gate Valve

Model		EVCCQ-63B(CF)	EVCCQ-80B(CF)	EVCCQ-100B(CF)	EVCCQ-160B(CF)	EVCCQ-200B(CF)	EVCCQ-250B(CF)
Pressure range	Pa	1.3×10-7～1.2×105
Inside nominal diameter	mm	63	80	100	150	200	250
Leak rate	Pa·L/s	1.3×10-7
Differentpressure in opening direction	Pa	3000(arbitrary)
Connection flange	—	CF、ISO-K、GB-LP、ISO-F
Service life until first maintenance	times	10000
Heating temperature(Valve body)	℃	Closed≤120, opend≤150
Supply voltage	V	220±10 %(Other specifications can be customized )
Opening / closing time	s	≤ 6
Compressed air	MPa	0.4~0.7						0.5~0.7
Positionindicator of the valve	—	Magnetic switch
Installation orientation	—	any
Ambient temperature	℃	5~40