IsiLawuli sokuHamba koManinzi imitha ye-CS200
Iimbonakalo
1. Ukuchaneka okuphezulu kunye nokuPhendula ngokukhawuleza
Ukuchaneka kwe-CS200 MFC kuphuculwe ukuya kwi-± 1.0% ye-SP, kwaye iimodeli eziphambili kakhulu zinexesha elincitshisiweyo lokuphendula elingaphantsi kwe-0.8 sec.
2. I-low Zero Drift kunye ne-Temperature Coefficient
Ukuveliswa kweteknoloji entsha ye-sensor yenza ukuba i-CS200 MFC igcine uzinzo kunye nokumelana nokuguquguquka kweqondo lokushisa.Ngaphandle kwe-auto-zero amplifier, i-zero drift elindelekileyo ingaphantsi kwe-0.6%FS/ngonyaka, kwaye i-coefficient yobushushu ingaphantsi kwe-0.02%FS/℃(zero)，0.05%FS/ ℃ (ixesha).
3. Iimodeli ezitywinwe ngesinyithi kunye neNqaku eliPhezulu loBusulungekileyo
Indlela yokuqukuqela emanzi yomgca we-CS200 MFC yakhiwe ngesinyithi esingenasici.Zonke ii-MFCs ze-CS200 zidityaniswe kumagumbi acocekileyo eKlasi ye-100 ye-ultraclean ye-Sevenstar ngokungqinelana nemigangatho yomibini ye-SEMI kunye ne-ISO 9001.
4. Ii-Interface ezihambelanayo
I-CS200 MFC iyahambelana nojongano olulandelayo, olunokuthi lukhethwe ngumthengi: ± 8V-± 16V unikezelo lwamandla oluphindwe kabini kunye +14V-+28V umbane wesiphelo esinye;igalelo lomqondiso wedijithali okanye we-analog kunye nemveliso;Imilinganiselo ye-SEMI esemgangathweni yomatshini;kunye ne-RS-485 okanye imodyuli yonxibelelwano yeDeviceNet.
5. Imisebenzi eyahlukeneyo
Isoftware yomthengi onamandla iza nemodeli nganye, ngelixa imisebenzi eyongezelelweyo efana negesi eninzi, uluhlu oluninzi, i-auto-zero, i-alamu, isiqalo esithambileyo, kunye nokulibaziseka ziyafumaneka njengokhetho lwabathengi.
Inkcazo
| CS200 | |||||||
| Uhlobo | CS200A | CS200C | CS200D | ||||
| Uluhlu olupheleleyo lwesikali (N2) | ( 0～5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Ukuchaneka | ±1.0% SP (≥35% FS) ±0.35% FS?(＜35% FS) | ||||||
| Umgca | ±0.5% FS | ||||||
| Ukuphindaphinda | ±0.2% FS | ||||||
| Ixesha lokuphendula | ≤1umzuzwana | ≤0.8 imizuzwana (SEMI E17-0600) | |||||
| Isikhundla sokuphumla seValve | Ngokuqhelekileyo Valiwe okanye | Akukho Valve | Ngokuqhelekileyo Valiwe okanye | Akukho Valve | Ngokuqhelekileyo Valiwe okanye | Akukho Valve | |
| Ngokuqhelekileyo ivuliwe (100 sccm≤FS≤5 slm) | Ngokuqhelekileyo ivuliwe (100 sccm≤FS≤5 slm) | Ngokuqhelekileyo ivuliwe (100 sccm≤FS≤5 slm) | |||||
| Uxinzelelo olwahlukileyo | 0.05～0.35MPa (Ukuhamba≤10slm) | ＜0.02MPa | (0.05～0.35) MPa (≤10slm) | ＜0.02MPa | (0.05～0.35) MPa (≤10slm) | ＜0.02MPa | |
| 0.1 ~ 0.35MPa (10slm＜Flow≤30slm) | (0.1–0.35) MPa (＞10slm) | (0.1–0.35) MPa (＞10slm) | |||||
| 0.2 - 0.45MPa (Ukuhamba) = 30slm) | |||||||
| Uxinzelelo olukhulu lokuSebenza | 0.45MPa | |||||
| Ubushushu | Unothi:≤±0.05% FS/℃; | Unothi:≤±0.02% FS/℃;Isithuba:≤±0.05% FS/℃ | ||||
| I-Coefficient | Isithuba: ≤±0.1% FS/℃ (Ukuhamba≤30slm) | |||||
| Isithuba: ≤±0.2% FS/℃ (Ukuhamba>30slm) | ||||||
| Uxinzelelo lobungqina | 3MPa (435pisg) | |||||
| Zero Drift | ＜0.6%FS ngonyaka ngaphandle autozero | |||||
| Ukuvuza ingqibelelo | 1 × 10-9 atm · cc / umzuzwana Yena | 1 × 10-10atm · cc / umzuzwana Yena | ||||
| Izinto ezimanzisiweyo | Viton; | Isinyithi?(Intsimbi eNgatyiwayo V/V, 5Ra) | Isinyithi | |||
| I-Surface Chemistry | —- | Umlinganiselo weCr/Fe ＞2.0;Ubukhulu beCro ＞20 Angstroms | ||||
| Umphezulu Gqiba | 25Ra | 10Ra | 25Ra | |||
| Ubushushu bokusebenza | (5～45℃ | (0～50）℃ | ||||
| Ungeniso loMqondiso | Idijithali: RS485 okanye iProfiBus | N / A | Idijithali: RS485 okanye iProfiBus okanye iDeviceNetTM | N / A | Idijithali: RS485 okanye iProfiBus okanye iDeviceNetTM | N / A |
| okanye iDeviceNetTM | I-Analog:(0～5)VDC okanye (4～20)mA okanye (0～20)mA | I-Analog:(0～5)VDC okanye (4～20)mA?okanye (0～20)mA | |||||
| I-Analog:(0～5)VDC okanye (4～20)mA okanye(0～20)mA | |||||||
| Umqondiso wePhulo | Idijithali: RS485 okanye iDeviceNetTM okanye iProfiBus Analog:(0～5)VDC okanye (4～20)mA okanye (0～20)mA | ||||||
| Ukunikezwa Amandla | ±8 ~ ±16 VDC okanye +14 ~ +28 VDC(400mA) | ||||||
| Isidibanisi sombane | Izikhonkwane ezi-9 zenkunzi ye-sub-D , i-15 ye-pin eyindoda sub-D ，DeviceNetTM,I-ProfiBus, iAnalog | ||||||
| Izifakelo | VCR1/4” M; VCO1/4” M; | VCR1/4” M; | |||||
| ukuFaka ngokuNxinzelelaΦ10;uFakelo lweCompressionΦ6; | ukuFaka ngokuFakamisaΦ6, | ||||||
| UkuFaniswa koxinzelelo 3/8";UFatting Fitting1/4”; | ukuFaka ngokuFanekaΦ3, | ||||||
| ukuFaniswa koxinzelelo1/8”;ukuFakwa ngokuFakwayoΦ3; | UFatting Fitting1/4”, | ||||||
| Ф6(ngaphakathi)×1hose;ф5(ngaphakathi)×1.5hose;ф4(ngaphakathi)×1hose; | W-seal, | ||||||
| A-sael ; | C-itywina | ||||||
| Ubunzima | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | |
