I. Ukuqaliswa kwevalve
Ivalve yevacuum sisixokelelwano sevacuum yecandelo elisetyenziselwa ukutshintsha indlela yokuhamba komoya, ukulungelelanisa ubungakanani bokuhamba kwerhasi, ukunqunyulwa okanye ukudibanisa umbhobho kwindlela yokufunxa.Iindawo zokuvala zevalve yevacuum zitywinwe ngesitywina serabha okanye isitywina sentsimbi.
II.Ukusetyenziswa kwevalve yevacuum eqhelekileyo.
Vacuum valves
Isetyenziswe kwisixhobo se-vacuum ephezulu okanye ephezulu kakhulu xa i-vacuum kufuneka igcinwe kwindlela yokuphatha i-vacuum evaliweyo.Iivalve ze-vacuum zisetyenziselwa ukulawula ukuhamba komoya kwigumbi lokuhlambela, ukuhlukanisa, ukukhupha umoya, ukubonelela ngokunciphisa uxinzelelo okanye ukuqhuba ukulawula.Iivalve zesango, iivalve ezingaphakathi kunye nee-angle ze-engile zezona ntlobo zixhaphakileyo ze-vacuum valves ezisetyenziselwa ukusetyenziswa kwe-vacuum ephezulu okanye ephezulu kakhulu.Iindidi zevalve ezongezelelweyo ziquka iivalve zebhabhathane, iivalve zokudlulisa, iivalve zebhola, iivalve zependulum, ivalve yentsimbi yonke, ivacuum valves, i-aluminiyam ivalve, iTeflon-coated vacuum valves kunye neevalvu ezithe ngqo.
Iivalve zebhabhathane
Ziivalvu ezivula ngokukhawuleza ezibandakanya iidiski zentsimbi okanye iivalvu ezijikelezayo kwii-engile ezichanekileyo ukuya kwicala lokuhamba kumbhobho kwaye xa zijikeleziswa kwiasi yazo, ivalve itywina isihlalo kumzimba wevalvu.
Iivalvu zokutshintshela (iivalvu zesango ezixande)
Iivalve zokwahlula zilungele ukusetyenziswa phakathi kwamagumbi okufunxa avaliweyo kunye namagumbi okutshintshela, naphakathi kwamagumbi okutshintshela kunye namagumbi okusebenza kwizixhobo zokuvelisa i-semiconductor.
Vacuum Ball Valves
Ziivalvu zokuqukuqela ezijikayo zekota ezinendibano evalayo esetyhula enezihlalo ezijikelezayo ezihambelanayo zoxinzelelo lokutywina olufanayo.
Iivalvu zependulum
sisivalo esikhulu sombhobhozo esifakwe phakathi kwenkqubo yokufunxa igumbi kunye ne-turbomolecular pump inlet.Ezi zivalo ze-vacuum pendulum zidla ngokuyilwa njengesango okanye i-pendulum valves ukwenzela izicelo ezibandakanya i-OLED, i-FPD kunye ne-PV yokuvelisa iinkqubo zoshishino.
Iivalvu zentsimbi zonke
Yenzelwe ukusetyenziswa kwiindawo ze-vacuum ze-ultra-high apho amaqondo okushisa aphezulu angavumeli ukusetyenziswa kwe-elastomers kunye ne-cryogenic gasket metals.Iivalvu zesinyithi ezibhakwayo zibonelela ngokutywinwa kobushushu obuphezulu obuthembekileyo ukusuka kuxinzelelo lomoya ukuya ngaphantsi kwe-10-11 mbar.
Vacuum valves
Sebenza ngokuthembekileyo kwiinkqubo zokuvelisa i-semiconductor kunye nakwizicelo ezinemichiza kunye ne-particle.Zingasetyenziswa kwivacuum erhabaxa, ivacuum ephezulu okanye i-vacuum ephezulu kakhulu.
Iivalvu ze-aluminiyam
Indawo yokungena kunye nokuphuma kwezi zivalo zikwiengile ezichanekileyo enye kwenye.Ezi zivalo ze-engile zenziwe nge-aluminium A6061-T6 kwaye zisetyenziswa kwi-semiconductor kunye ne-instrumentation ye-instrumentation, i-R & D kunye neenkqubo zokutshayela ze-industrial kwi-rough to vacuum applications ephezulu.
Ivalve yevacuum egqunywe ngeTeflon sisixhobo sokufunxa esinobunjineli obupheleleyo sentsimbi engenasiphene esinokwaleka okuhlala ixesha elide kunye nokumelana neekhemikhali.
III.Iimpawu zevacuum valves.
Uxinzelelo lungaphantsi koxinzelelo lwe-atmospheric kunye nokuhla koxinzelelo kwi-valve flap ayikwazi ukudlula i-1 kg force / cm.Iqondo lokushisa elisebenzayo lephakathi lixhomekeke kwinkqubo yesixhobo esisetyenzisiweyo.Iqondo lobushushu ngokuqhelekileyo aligqithi kuluhlu lwe -70 ~ 150°C.Eyona mfuneko isisiseko kwiivalve ezinjalo kukuqinisekisa iqondo eliphezulu lokuqina koqhagamshelwano kunye nobuninzi besakhiwo kunye nezinto ze-gasket.
Ngokoxinzelelo oluphakathi iivalvu zevacuum zinokwahlulwa zibe ngamaqela amane.
1) Iivalve zevacuum eziphantsi: uxinzelelo oluphakathi p = 760 ~ 1 mmHg.
2)Iivalvu zokufunxa eziphakathi: p=1×10-3 mmHg.
3)Iivalvu eziphezulu zevacuum: p=1×10-4 ~1×10-7 mmHg.
4)Ivalve yevacuum ephezulu kakhulu: p≤1×10-8 mmHg.
Njengevalve evaliweyo ejikelezayo enobubanzi obungaphantsi kwe-250 mm, isiqu esisetyenziswa ngokubanzi yivalve yokuvala ivacuum enentshukumo yomgca.Iivalve zesango, nangona kunjalo, zithintelwe ngakumbi, kodwa oku ikakhulu kububanzi obukhulu.Zikwafumaneka iivalve zeplagi ezingqukuva (iivalvu zebhola), iivalve zeplunger kunye nebhabhathane.Iiplagi zeplagi ze-vacuum valves azizange ziphakanyiswe ngenxa yokuba zifuna i-oil lubrication, okwenza kube lula ukuba umphunga weoli ungene kwinkqubo yokucoca, engavumelekanga.Iivalvu zevacuum zinokulawulwa ngesandla kunye nokude kwintsimi, kunye nombane, i-electromagnetic (i-solenoid valves), i-pneumatically kunye ne-hydraulically.
Ixesha lokuposa: Aug-11-2022