Iimpompo eziqhele ukusetyenziswa kwiinkqubo ze-vacuum eziphezulu

I. Iimpompo zoomatshini
Umsebenzi oyintloko wempompo yomatshini kukubonelela nge-vacuum efunekayo yangaphambi kwesigaba sokuqala kwepompo ye-turbomolecular.Iimpompo zoomatshini eziqhelekileyo ezisetyenziswayo ziquka iimpompo ezomileyo ze-vortex, iimpompo ze-diaphragm kunye neempompo zoomatshini ezitywinwe ngeoyile.
Iimpompo ze-diaphragm zinesantya esisezantsi sokumpompa kwaye ngokuqhelekileyo zisetyenziselwa iiseti zempompo ye-molecular encinci ngenxa yobukhulu obuncinci.
Impompo yomatshini etywinwe ngeoyile yeyona nto isetyenziswayo kwimpompo yomatshini kwixesha elidlulileyo, ephawulwa ngesantya esikhulu sokumpompa kunye ne-vacuum efanelekileyo yokugqibela, into engalunganga kubukho ngokubanzi bokubuyiswa kweoyile, kwiinkqubo zokucoca eziphakamileyo kakhulu kufuneka zixhotyiswe ngevalve ye-solenoid. (ukuthintela ukusilela kwamandla ngengozi okubangelwa kukubuya kweoyile) kunye nesefo yemolekyuli (impembelelo yeadsorption).
Kwiminyaka yakutshanje, eyona isetyenziswa kakhulu yimpompo eyomileyo eyomileyo.Inzuzo ilula ukuyisebenzisa kwaye ayibuyeli kwi-oyile, isantya sokumpompa nje kunye ne-vacuum yokugqibela imbi kancinane kuneempompo zoomatshini ezitywinwe ngeoyile.
Iimpompo ze-Mechanical zingumthombo oyintloko wengxolo kunye nokungcangcazela kwibhubhoratri kwaye kungcono ukhethe impompo yengxolo ephantsi kwaye uyibeke phakathi kwezixhobo apho kunokwenzeka khona, kodwa okokugqibela kaninzi akulula ukufezekisa ngenxa yezithintelo zomgama wokusebenza.
II.Iimpompo ze-Turbomolecular
Iimpompo ze-Turbo zemolekyuli zixhomekeke kwisantya esiphezulu esijikelezayo i-vanes (ngokuqhelekileyo malunga ne-1000 revolutions ngomzuzu) ukuphumeza ukuhamba kwegesi.Umlinganiselo wempompo yokukhupha uxinzelelo kwi-inlet yoxinzelelo ibizwa ngokuba yi-compression ratio.Umlinganiselo woxinzelelo unxulumene nenani lezigaba zempompo, isantya kunye nohlobo lwegesi, ubunzima bemolekyuli jikelele boxinzelelo lwegesi luphezulu kakhulu.I-vacuum yokugqibela yepompo ye-turbomolecular ngokuqhelekileyo ithathwa njenge-10-9-10-10 mbar, kwaye kwiminyaka yamuva, kunye nenkqubela phambili eqhubekayo ye-teknoloji yepompo ye-molecular, i-vacuum yokugqibela iphuculwe ngakumbi.
Njengoko iingenelo zepompo ye-turbomolecular zibonwa kuphela kwimeko yokuhamba kwemolekyuli (imeko yokuhamba apho umyinge okhululekileyo weeathomu zegesi zikhulu kakhulu kunobungakanani obukhulu becandelo le-duct cross-section), impompo ye-vacuum yangaphambili. ngoxinzelelo olusebenzayo lwe-1 ukuya kwi-10-2 Pa iyadingeka.Ngenxa yesantya esiphezulu sokujikeleza kwee-vanes, ipompo ye-molecular inokonakala okanye ichithwe zizinto zangaphandle, i-jitter, impembelelo, i-resonance okanye i-gas shock.Kwabaqalayo, eyona nto ixhaphakileyo yomonakalo kukutshatyalaliswa kwegesi okubangelwa iimpazamo zokusebenza.Ukonakaliswa kwempompo ye-molecular nako kunokubangelwa yi-resonance eyenziwa yimpompo yomatshini.Le meko inqabile ngokwentelekiso kodwa ifuna ingqalelo ekhethekileyo kuba inobuqhophololo kwaye ayibonakali lula.

III.Impompo ye-ion yokutshiza
Umgaqo wokusebenza wepompo ye-sputtering ion kukusebenzisa iiyoni eziveliswe kukukhutshwa kwePenning ukubhobhoza ipleyiti ye-titanium yecathode ukwenza ifilimu entsha ye-titanium, ngaloo ndlela ibhengeza iigesi ezisebenzayo kunye nokuba nefuthe elithile lokungcwaba kwiigesi ezingenayo. .Izibonelelo ze-sputtering ion pumps zilungile i-vacuum yokugqibela, akukho vibration, akukho ngxolo, akukho ngcoliseko, inkqubo evuthiweyo kunye nezinzile, akukho kugcinwa kunye nesantya esifanayo sokupompa (ngaphandle kweegesi ze-inert), iindleko zabo ziphantsi kakhulu kuneempompo ze-molecular, nto leyo eyenza ukuba zisetyenziswe ngokubanzi kakhulu kwiinkqubo ze-vacuum eziphezulu.Ngokuqhelekileyo umjikelo wokusebenza oqhelekileyo weempompo ze-ion ze-sputtering ungaphezulu kweminyaka eyi-10.
Iimpompo ze-Ion ngokubanzi kufuneka zibe ngaphezu kwe-10-7 mbar ukuze zisebenze ngokufanelekileyo (ukusebenza kwiindawo zokuhlambela ezimbi kakhulu kunciphisa kakhulu ubomi babo) kwaye ngoko ke zifuna i-molecular pump set ukubonelela nge-vacuum efanelekileyo yangaphambili.Kuyinto eqhelekileyo ukusebenzisa ipompo ye-ion + i-TSP kwigumbi eliphambili kunye nepompo encinci ye-molecular ebekwe kwigumbi lokungena.Xa ubhaka, vula i-valve yokufaka edibeneyo kwaye uvumele ipompo encinci ye-molecular iseti inike i-vacuum yangaphambili.
Kufuneka kuqatshelwe ukuba iimpompo ze-ion azinako ukubhengezwa kwiigesi ezingasebenziyo kwaye isantya sazo esikhulu sokumpompa sahluke ngandlel' ithile kwimpompo zemolekyuli, ukwenzela ukuba imiqulu emikhulu yokukhupha okanye iigesi ezinkulu ze-inert, iseti yempompo yemolekyuli iyafuneka.Ukongeza, impompo ye-ion ivelisa indawo ye-electromagnetic ngexesha lokusebenza, enokuphazamisana neenkqubo ezibuthathaka ngakumbi.
IV.Iimpompo ze-Titanium sublimation
Iimpompo ze-Titanium sublimation zisebenza ngokuthembela ku-evaporation ye-metallic titanium ukwenza ifilimu ye-titanium kwiindonga zegumbi le-chemisorption.Izinto eziluncedo kwiimpompo ze-titanium sublimation kukwakhiwa okulula, ixabiso eliphantsi, ukugcinwa lula, akukho mitha kwaye akukho ngxolo yokungcangcazela.
Iimpompo ze-Titanium sublimation zidla ngokuba ne-3 titanium filaments (ukuthintela ukutsha) kwaye zisetyenziselwa ukudibanisa ne-molecular okanye i-ion pumps ukubonelela ngokugqwesa ukususwa kwe-hydrogen.Zizona zimpompo ze-vacuum ezibaluleke kakhulu kwi-10-9-10-11 uluhlu lwe-mbar kwaye lufakwe kwiindawo ezininzi ze-vacuum apho amanqanaba aphezulu e-vacuum afunekayo.
Ukungalungi kweempompo ze-titanium sublimation ziyimfuneko yokutshiza rhoqo i-titanium, i-vacuum iyancipha malunga ne-1-2 imiyalelo yobukhulu ngexesha lokutshiza (ngaphakathi kwemizuzu embalwa), ngoko ke amagumbi athile aneemfuno ezithile afuna ukusetyenziswa kwe-NEG.kwakhona, iisampulu ezibuthathaka titanium / izixhobo, kufuneka kuthathwe unonophelo ukuphepha indawo impompo sublimation titanium.
V. Iimpompo zeCryogenic
Iimpompo ze-Cryogenic ikakhulu zithembele kwi-adsorption yeqondo eliphantsi lobushushu bomzimba ukufumana i-vacuum, kunye nezibonelelo zesantya sokumpompa okuphezulu, akukho ngcoliseko kunye ne-vacuum ephezulu.Izinto eziphambili ezichaphazela isantya sokupompa iipompo ze-cryogenic ziqondo lokushisa kunye nommandla wompompo.Kwiinkqubo ezinkulu ze-epitaxy ze-molecular beam, iimpompo ze-cryogenic zisetyenziswa ngokubanzi ngenxa yeemfuno eziphezulu ze-vacuum.
Ukungalungi kweepompo ze-cryogenic kukusetyenziswa okuphezulu kwe-nitrogen engamanzi kunye neendleko eziphezulu zokusebenza.Iinkqubo kunye recirculating chillers zingasetyenziswa ngaphandle kokutya ulwelo nitrogen, kodwa oku kuzisa iingxaki ezihambelanayo ukusetyenziswa kwamandla, vibration kunye nengxolo.Ngenxa yesi sizathu, iimpompo ze-cryogenic aziqhelekanga ukusetyenziswa kwizixhobo eziqhelekileyo zebhubhoratri.
VI.Iimpompo zeAspirator (NEG)
Impompo ye-agent yokufunxa yenye yezona zisetyenziswa kakhulu iimpompo zokufunxa kule minyaka yamva nje, inzuzo yayo kukusetyenziswa ngokupheleleyo kweekhemikhali ze-adsorption, akukho plating yomphunga kunye nongcoliseko lwe-electromagnetic, ehlala isetyenziswa kunye neempompo zemolekyuli ukuthatha indawo yeempompo ze-titanium sublimation kunye ne-sputtering ion. iimpompo, isithintelo lixabiso eliphezulu kunye nenani elilinganiselweyo lohlaziyo, oludla ngokusetyenziswa kwiinkqubo ezineemfuno eziphezulu zozinzo lwevacuum okanye uvakalelo oluphezulu kumasimi ombane.
Ukongezelela, njengoko ipompo ye-aspirator ifuna ukuba akukho xhulumaniso lokunikezelwa kwamandla ongezelelweyo ngaphaya kokusebenza kokuqala, iphinda isetyenziswe rhoqo kwiinkqubo ezinkulu njengempompo encedisayo ukunyusa isantya sokupompa kunye nokuphucula inqanaba le-vacuum, elinokuthi lenze lula inkqubo.

Umzobo:Uxinzelelo olusebenzayo lweentlobo ezahlukeneyo zeempompo.Iintolo ezimdaka zibonisa ubungakanani boxinzelelo oluphezulu oluvumelekileyo kwaye iindawo eziluhlaza ezingqindilili zibonisa uluhlu oluqhelekileyo loxinzelelo olusebenzayo.