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Iyunithi yephampu ye-Turbo eyenziwe ngokwezifiso

Incazelo emfushane:

I-EVT series high vacuum exhaust unit iyisisetshenziswa sokutholwa kwe-vacuum ephezulu kakhulu esakhiwe yi-EV series composite turbo pump, iphampu yomshini wangaphambili, ukunikezwa kwamandla okulawula iyunithi, igeji ye-vacuum composite vacuum ephezulu, i-ultra-high vacuum plate valve, i-pre-pumping angle valve kanye njalonjalo.Kulula ukufaka, kulula ukuyisebenzisa, ukusebenza okuthembekile.Ingasetshenziswa kabanzi kumishini ye-semiconductor, amadivaysi e-vacuum kagesi, ama-accelerator, ukuhlaziywa kwendawo, i-plasma kanye nobunye ubuchwepheshe be-vacuum.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Isimiso sokusebenza

Iyunithi yephampu ye-Turbo (2)

Uhlelo lwegesi lwephampu yengqamuzana, njengoba kukhonjisiwe esithombeni esingenhla, luvame ukusetshenziswa ekuhlolweni kokusebenza kwephampu yamangqamuzana noma amathuluzi okuthola isayensi ahlukahlukene, futhi libonakala ngokuthi izinsiza zegumbi le-vacuum kanye nezinto ezisetshenziswayo zilinganiselwe, futhi I-vacuum chamber ayidingeki ukuthi ivulwe njalo ukuze isebenze endlini.Uma isiteji sangaphambili sisebenzisa iphampu yemishini ye-rotary blade yendawo kawoyela, kuzofakwa ivalvu yokukhulula umoya.Ivalvu yokungenisa umoya yokwahlukanisa kufanele ihlanganiswe nephampu yangaphambili ukuze kuqinisekiswe ukuthi umhwamuko kawoyela ngisho nowoyela ngeke kudonseleke empompini yemolekyuli ngemva kokuvalwa kwephampu kawoyela.Amanye amaphampu ayimishini ye-rotary-blade anamavalvu azikhiphayo emoyeni ukuze agweme ukusetshenziswa isikhathi eside, futhi amapayipi angaphambili agcwele uwoyela futhi ukungcola kubi kakhulu.

Izinkomba zobuchwepheshe

1.Iyunithi iyisakhiwo setroli esinyakazayo, esingahlangabezana nezidingo ze-exhaust ezindaweni ezahlukene.

2.I-vacuum degree yemishini ingcono kune-8×10-4pa ngemva kokuba iphampu yamangqamuzana iqalwe ifike ku-400HZ, ingcono kune-5×10-5pa phakathi nemizuzu engama-30, kanti i-vacuum yokugcina ingu-8×10-7pa.

3.Iyunithi ifakwe isistimu yokukhipha ngaphambili, engakwazi ukubona ukushintshwa, i-vacuum yangaphambili kanye nokugeleza kwe-vacuum ephezulu ngaphandle kokumisa iphampu yamangqamuzana, enciphisa isikhathi sokuqeda futhi ithuthukise ngempumelelo ukusebenza kahle kokusebenza.

Iyunithi yephampu ye-Turbo (2)
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