I-Mass Flow Controller Imitha yokugeleza kweMisa CS200
Izici
1. Ukunemba Okuphezulu kanye Nempendulo Esheshayo
Ukunemba kwe-CS200 MFC kuthuthukisiwe kwaba ngu-±1.0% we-SP, futhi amamodeli athuthuke kakhulu anesikhathi sokuphendula esincishisiwe esingaphansi kwamasekhondi angu-0.8.
2. I-low Zero Drift kanye ne-Temperature Coefficient
Ukusungulwa kobuchwepheshe bezinzwa obusha kwenza i-CS200 MFC ikwazi ukugcina uzinzo futhi imelane nokuguquguquka kwezinga lokushisa.Ngaphandle kwe-auto-zero amplifier, i-zero drift elindelwe ingaphansi kuka-0.6%FS/ngonyaka, futhi izinga lokushisa lingaphansi kuka-0.02%FS/℃(zero)，0.05%FS/ ℃ (i-span).
3. Amamodeli Avalwe Ngensimbi Nesici Sokuhlanzeka Okuphezulu
Indlela yokugeleza emanzi yomugqa we-CS200 MFC yakhiwe ngensimbi engenasici.Wonke ama-CS200 MFCs ahlanganiswe kumagumbi okuhlanza ekilasi le-100 le-Sevenstar le-ultraclean ngokuya ngawo womabili amazinga e-SEMI kanye ne-ISO 9001.
4. Izixhumanisi Ezivumelanayo
I-CS200 MFC ihambisana nezixhumi ezibonakalayo ezilandelayo, ezingase zikhethwe ikhasimende: ±8V-±16V ugesi ophuma kabili kanye +14V-+28V ugesi wesiphetho esisodwa;okokufaka kanye nokuphumayo kwesignali yedijithali noma ye-analog;Ubukhulu bemishini obujwayelekile be-SEMI;kanye ne-RS-485 noma imojuli yezokuxhumana ye-DeviceNet.
5. Imisebenzi Ehlukahlukene
Isofthiwe yekhasimende enamandla iza indinganiso ngemodeli ngayinye, kuyilapho imisebenzi eyengeziwe efana ne-multi-gas, i-multi-range, i-auto-zero, ama-alamu, isiqalo esithambile, nokubambezeleka kuyatholakala njengokukhethwa kwamakhasimende.
Ukucaciswa
| CS200 | |||||||
| Uhlobo | CS200A | I-CS200C | I-CS200D | ||||
| Ibanga lesikali esigcwele (N2) | ( 0～5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Ukunemba | ±1.0% SP (≥35% FS) ±0.35% FS?(＜35% FS) | ||||||
| Umugqa | ±0.5% FS | ||||||
| Ukuphindaphinda | ±0.2% FS | ||||||
| Isikhathi sokuphendula | ≤1sec | ≤0.8 isekhondi (SEMI E17-0600) | |||||
| I-Valve Rest Position | Ngokujwayelekile Kuvaliwe noma | Ayikho iValve | Ngokujwayelekile Kuvaliwe noma | Ayikho iValve | Ngokujwayelekile Kuvaliwe noma | Ayikho iValve | |
| Ivamise Ukuvula (100 sccm≤FS≤5 slm) | Ivamise Ukuvula (100 sccm≤FS≤5 slm) | Ivamise Ukuvula (100 sccm≤FS≤5 slm) | |||||
| Ukucindezela Okuhlukile | 0.05～0.35MPa (Ukugeleza≤10slm) | ＜0.02MPa | (0.05–0.35) MPa (≤10slm) | ＜0.02MPa | (0.05–0.35) MPa (≤10slm) | ＜0.02MPa | |
| 0.1 - 0.35MPa (10slm) Flow≤30slm) | (0.1–0.35) MPa ((＞10slm) | (0.1–0.35) MPa ((＞10slm) | |||||
| 0.2–0.45MPa (Ukugeleza) 30slm) | |||||||
| Ingcindezi Yokusebenza Ephezulu | 0.45MPa | |||||
| Izinga lokushisa | Uziro:≤±0.05% FS/℃; | Uziro:≤±0.02% FS/℃;Isikhathi:≤±0.05% FS/℃ | ||||
| I-Coefficient | Isikhathi: ≤±0.1% FS/℃ (Ukugeleza≤30slm) | |||||
| Isikhathi: ≤±0.2% FS/℃ (Ukugeleza>30slm) | ||||||
| Ingcindezi Yobufakazi | I-3MPa (435pisg) | |||||
| I-Zero Drift | ＜0.6%FS ngonyaka ngaphandle kwe-autozero | |||||
| Ukuvuza ubuqotho | 1×10-9 atm · cc / sec He | 1×10-10atm · cc / umzuzwana He | ||||
| Izinto Ezimanzi | Viton; | Insimbi?(Insimbi Engagqwali V/V, 5Ra) | Insimbi | |||
| I-Surface Chemistry | —- | Isilinganiso se-Cr/Fe ＞2.0;Ubukhulu be-CrO ＞20 Angstroms | ||||
| I-Surface Qeda | 25Ra | 10Ra | 25Ra | |||
| Operation Temperature | (5～45℃ | (0～50）℃ | ||||
| Isiginali Yokufaka | Idijithali: RS485 noma i-ProfiBus | N/A | Idijithali: I-RS485 noma i-ProfiBus noma i-DeviceNetTM | N/A | Idijithali:RS485 noma i-ProfiBus noma i-DeviceNetTM | N/A |
| noma i-DeviceNetTM | I-Analog:(0～5)VDC noma (4～20)mA noma (0～20)mA | I-Analog:(0～5)VDC noma (4～20)mA?noma (0～20)mA | |||||
| I-Analog:(0～5)VDC noma (4～20)mA noma(0～20)mA | |||||||
| Isiginali yokuphumayo | Idijithali: RS485 noma i-DeviceNetTM noma i-ProfiBus Analog:(0～5)VDC noma (4～20)mA noma (0～20)mA | ||||||
| Ukunikezwa kwamandla kagesi | ±8 ~ ±16 VDC noma +14 ~ +28 VDC(400mA) | ||||||
| Isixhumi sikagesi | 9 ophini owesilisa sub-D ,15 pin owesilisa sub-D ，DeviceNetTM,I-ProfiBus, i-Analog | ||||||
| Ukufakwa | VCR1/4” M; VCO1/4” M; | VCR1/4” M; | |||||
| I-Compression FittingΦ10;I-Compression FittingΦ6; | I-Compression FittingΦ6, | ||||||
| I-Compress Fitting 3/8";I-Compress Fitting1/4”; | I-Compression FittingΦ3, | ||||||
| Ukucindezelwa Fitting1/8”;I-Compression FittingΦ3; | Ukucindezelwa Fitting1/4”, | ||||||
| Ф6(ngaphakathi)×1hose;ф5(ngaphakathi)×1.5hose;ф4(ngaphakathi)×1hose; | I-W-seal, | ||||||
| A-sael ; | I-C-seal | ||||||
| Isisindo | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | |
