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Ulwazi – Vacuum Valves

I. Ukwethulwa kwe-valve
I-vacuum valve ingxenye yesistimu ye-vacuum esetshenziselwa ukushintsha indlela yokuhamba komoya, ukulungisa usayizi wokugeleza kwegesi, ukusika noma ukuxhuma ipayipi ohlelweni lwe-vacuum.Izingxenye zokuvala ze-vacuum valve zivaliwe ngophawu lwerabha noma uphawu lwensimbi.

II.Izicelo ezivamile ze-vacuum vacuum.
Ama-vacuum valves
Isetshenziswa kumishini ye-vacuum ephezulu noma ephezulu kakhulu lapho i-vacuum kufanele igcinwe kusistimu yokubamba i-vacuum evaliwe.Ama-vacuum valves asetshenziselwa ukulawula ukugeleza komoya egumbini le-vacuum, ukuhlukanisa, ukuphuma, ukuhlinzeka ngokunciphisa ingcindezi noma ukulawula ukuqhutshwa.Amavalvu esango, ama-vacuum aphakathi nendawo nama-engeli yizinhlobo ezivame kakhulu zamavalvu e-vacuum asetshenziselwa ukufakwa kwe-vacuum ephezulu noma ephezulu kakhulu.Izinhlobo zama-valve ezengeziwe zifaka ama-butterfly valves, ama-vacuum valves, ama-vacuum valves, ama-pendulum valves, ama-all-metal valves, ama-vacuum valves, ama-engeli e-aluminium, ama-vacuum ahlanganiswe ne-Teflon nama-valve aqondile.

Ama-valve e-Butterfly
ama-valve avula ngokushesha anamadiski ensimbi noma ama-vanes azungeza kuma-engeli angakwesokudla aye lapho kugeleza khona epayipini futhi lapho ezungeziswa e-eksisi yawo, i-valve ivala isihlalo emzimbeni wamavalvu.

Amavalvu okudlulisa (amavalvu esango elingunxande)
Ama-valve okuhlukanisa alungele ukusetshenziswa phakathi kwamagumbi okuvala akhiywe ngomthwalo kanye namagumbi okudlulisa, naphakathi kwamagumbi okudlulisa kanye namagumbi okucubungula kumishini yokukhiqiza i-semiconductor.

Vacuum Ball Valves
ama-valve okugeleza aqondile anekota enokuhlanganiswa kokuvala okuyindilinga enezihlalo eziyindilinga ezifanayo zokucindezela kokuvala okufanayo.

Ama-valve e-pendulum
iyi-valve enkulu ye-throttle efakwe phakathi kwegumbi le-vacuum yenqubo kanye ne-turbomolecular pump inlet.Lawa mavalvu e-vacuum pendulum ngokuvamile aklanywa njengesango noma ama-pendulum valves okusebenza okuhlanganisa i-OLED, FPD kanye nezinhlelo zokukhiqiza zezimboni ze-PV.

Ama-valve ensimbi yonke
Idizayinelwe ukusetshenziswa ezindaweni ze-vacuum eziphezulu kakhulu lapho izinga lokushisa eliphezulu lingavumeli ukusetshenziswa kwama-elastomers nezinsimbi ze-cryogenic gasket.Ama-valve ensimbi angabhakwayo ahlinzeka ngokuvaleka okuthembekile kwezinga lokushisa eliphezulu ukusuka kungcindezi yomoya kuya ngaphansi kuka-10-11 mbar.

Ama-vacuum valves
Isebenza ngokuthembekile ezinhlelweni zokukhiqiza ze-semiconductor kanye nasezinhlelweni ezinokungcola kwamakhemikhali nezinhlayiyana.Zingasetshenziswa ku-vacuum enamandla, i-vacuum ephezulu noma ezindaweni ze-vacuum eziphezulu kakhulu.

Ama-valve e-Aluminium angle
I-inlet nokuphuma kwalawa ma-valve kuma-engeli angakwesokudla komunye nomunye.Lawa ma-engeli valve enziwe nge-aluminium A6061-T6 futhi asetshenziswa ekwenziweni kwe-semiconductor kanye nezinsimbi, i-R&D kanye nezinhlelo ze-vacuum zezimboni ukuze kufakwe i-vacuum enamandla kuya phezulu.

Ivalvu yevacuum ehlanganiswe ne-Teflon iyisisetshenziswa esifakwe ngokugcwele sensimbi engenasici esinoqweqwe oluqinile futhi olumelana namakhemikhali.

III.Izici ze-vacuum valves.
Ingcindezi ingaphansi kwengcindezi yasemkhathini futhi ukwehla kwengcindezi kuyo yonke i-valve flap ayikwazi ukudlula amandla angu-1 kg/cm.Izinga lokushisa elisebenzayo le-medium lincike kwinqubo yedivayisi esetshenzisiwe.Izinga lokushisa ngokuvamile alidluli ibanga lika -70 ~ 150°C.Imfuneko eyisisekelo kakhulu yama-valve anjalo ukuqinisekisa izinga eliphezulu lokuqina kokuxhumeka kanye nokushuba kwesakhiwo kanye nempahla ye-gasket.

Ngokusho kwe-medium pressure vacuum valves ingahlukaniswa ngamaqembu amane.
1) Ama-vacuum valves aphansi: ukucindezela okuphakathi p=760~1 mmHg.
2) Amavalvu evacuum amaphakathi: p=1×10-3 mmHg.
3) Amavalvu e-vacuum aphezulu: p=1×10-4 ~1×10-7 mmHg.
4) Ivalvu yevacuum ephezulu kakhulu: p≤1×10-8 mmHg.

Njenge-valve yesiyingi esivalekile enobubanzi bokudlula obungaphansi kuka-250 mm, isiqu esisetshenziswa kabanzi ivacuum bellows valve shut-off valve with linear movement.Ama-valve esango, noma kunjalo, akhawulelwe kakhulu, kodwa lokhu ikakhulukazi kububanzi obukhulu.Okunye okutholakalayo ama-valve epulaki ayindilinga (amavalvu ebhola), ama-plunger valves nama-butterfly valves.Ama-valve okuxhuma ama-vacuum valve awazange athuthukiswe ngoba adinga ukugcotshwa kwamafutha, okwenza kube lula ukuthi umhwamuko kawoyela ungene ohlelweni lwe-vacuum, okungavunyelwe.Ama-vacuum valves angalawulwa ngesandla nangokude ensimini, kanye nakagesi, ngozibuthe (ama-solenoid valves), nge-pneumatically and hydraulically.
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Isikhathi sokuthumela: Aug-11-2022