Amaphampu avame ukusetshenziswa kumasistimu e-vacuum aphezulu kakhulu

I. Amaphampu kamishini
Umsebenzi oyinhloko wephampu engumshini ukuhlinzeka ngesikhala esidingekayo sangaphambi kwesiteji sokuqalisa kwepompo ye-turbomolecular.Amaphampu ayimishini asetshenziswa kakhulu ahlanganisa ikakhulukazi amaphampu omile e-vortex, amaphampu e-diaphragm namaphampu emishini evalwe ngowoyela.
Amaphampu e-diaphragm anejubane eliphansi lokumpompa futhi ngokuvamile asetshenziselwa amasethi amaphampu amangqamuzana amancane ngenxa yosayizi omncane.
Iphampu yomshini evalwe ngowoyela iyipompo yomshini eyayisetshenziswa kakhulu esikhathini esidlule, ebonakala ngesivinini esikhulu sokumpompa kanye ne-vacuum enhle yokugcina, okubi ukuba khona okujwayelekile kokubuya kukawoyela, ezinhlelweni ze-vacuum ephezulu kakhulu ngokuvamile zidinga ukuhlonywa i-solenoid valve. (ukuvimbela ukwehluleka kwamandla ngephutha okubangelwa ukubuya kukawoyela) kanye nesisefo se-molecular (umphumela we-adsorption).
Eminyakeni yamuva, okusetshenziswa kakhulu iphampu eyomile yokuskrola.Inzuzo ilula ukuyisebenzisa futhi ayibuyeli emafutheni, isivinini sokumpompa kanye ne-vacuum yokugcina imbi kakhulu kunaleyo yamaphampu ayimishini evalwe uwoyela.
Amaphampu emishini awumthombo oyinhloko womsindo nokudlidliza elabhorethri futhi kungcono ukhethe iphampu yomsindo ophansi futhi uyibeke phakathi kwemishini lapho kungenzeka khona, kodwa lokhu kwakamuva ngokuvamile akulula ukukufeza ngenxa yemikhawulo yebanga lokusebenza.
II.Amaphampu e-Turbomolecular
Amaphampu wamangqamuzana e-Turbo ancike kuma-vanes ajikelezayo ngesivinini esikhulu (imvamisa azungeze ama-revolution angu-1000 ngomzuzu) ukuze athole ukugeleza okuqondile kwegesi.Isilinganiso sokucindezela kokukhipha iphampu kungcindezi yokungena kubizwa ngokuthi isilinganiso sokucindezela.Isilinganiso sokucindezela sihlobene nenani lezigaba zephampu, isivinini kanye nohlobo lwegesi, isisindo samangqamuzana esivamile sokucindezelwa kwegesi siphezulu kakhulu.I-vacuum yokugcina yepompo ye-turbomolecular ngokuvamile ibhekwa njenge-10-9-10-10 mbar, futhi eminyakeni yamuva nje, ngokuqhubeka okuqhubekayo kobuchwepheshe bephampu yamangqamuzana, i-vacuum yokugcina iye yathuthukiswa nakakhulu.
Njengoba izinzuzo zephampu ye-turbomolecular zibonakala kuphela esimweni sokugeleza kwamangqamuzana (isimo sokugeleza lapho isilinganiso samahhala se-molecule yegesi sikhulu kakhulu kunobukhulu obukhulu besigaba esiphambanayo se-duct), iphampu ye-vacuum yangaphambi kwesiteji. ngengcindezi yokusebenza ye-1 kuya ku-10-2 Pa iyadingeka.Ngenxa yesivinini esiphezulu sokujikeleza kwama-vanes, iphampu ye-molecular ingalimala noma ichithwe izinto zangaphandle, i-jitter, umthelela, i-resonance noma ukushaqeka kwegesi.Kwabaqalayo, imbangela evame kakhulu yomonakalo ukushaqeka kwegesi okubangelwa amaphutha okusebenza.Ukulimala kwephampu yamangqamuzana kungase kubangelwe ukuzwakala kwe-resonance okubangelwa iphampu engumshini.Lesi simo asivamile kodwa sidinga ukunakwa okukhethekile ngoba sicashile futhi asitholakali kalula.

III.Iphampu ye-ion ye-sputtering
Umgomo wokusebenza wephampu ye-ion e-sputtering ukusebenzisa ama-ion akhiqizwe ukukhishwa kwe-Penning ukuze kuqhume ipuleti le-titanium le-cathode ukwenza ifilimu ye-titanium entsha, ngaleyo ndlela kukhangise amagesi asebenzayo futhi kube nomthelela othile wokungcwaba kumagesi angenayo futhi. .Izinzuzo zamaphampu e-sputtering ion ziyi-vacuum enhle yokugcina, akukho ukudlidliza, akukho msindo, akukho ukungcola, inqubo evuthiwe futhi ezinzile, akukho ukulungiswa kanye nesivinini sokupompa esifanayo (ngaphandle kwamagesi angenayo), izindleko zabo ziphansi kakhulu kunamaphampu amangqamuzana, okwenza zisetshenziswe kabanzi kakhulu kumasistimu we-vacuum aphezulu kakhulu.Ngokuvamile umjikelezo ojwayelekile wokusebenza wamaphampu e-sputtering ion ungaphezu kweminyaka eyi-10.
Amaphampu e-ion ngokuvamile adinga ukuba ngaphezu kuka-10-7 mbar ukuze asebenze kahle (ukusebenza ezindaweni ezingenalutho ezimbi kakhulu kunciphisa kakhulu impilo yawo) futhi ngenxa yalokho adinga isethi yephampu yamangqamuzana ukuze ahlinzeke ngesikhala esihle sangaphambi kwesiteji.Kuwumkhuba ovamile ukusebenzisa iphampu ye-ion + TSP ekamelweni eliyinhloko kanye nephampu ye-molecular encane ebekwe ekamelweni lokungena.Lapho ubhaka, vula i-valve yokufaka exhunyiwe futhi uvumele isethi yephampu ye-molecular encane inikeze i-vacuum yangaphambili.
Kufanele kuqashelwe ukuthi amaphampu e-ion awakwazi ukukhangisa amagesi angenayo futhi isivinini sawo sokumpompa esikhulu sihluka kancane kuleso samaphampu amangqamuzana, ukuze kuvolumu enkulu yokukhipha umoya noma inani elikhulu lamagesi angenayo, isethi yephampu yemolekyuli iyadingeka.Ngaphezu kwalokho, iphampu ye-ion ikhiqiza insimu ye-electromagnetic ngesikhathi sokusebenza, engaphazamisa amasistimu abucayi kakhulu.
IV.Amaphampu we-Titanium sublimation
Amaphampu e-Titanium sublimation asebenza ngokuthembela ekuhwamukeni kwe-metallic titanium ukuze akhe ifilimu ye-titanium ezindongeni zegumbi ukuze kusetshenziswe i-chemisorption.Izinzuzo zamaphampu we-titanium sublimation ukwakhiwa okulula, izindleko eziphansi, ukulungiswa okulula, akukho misebe futhi akukho msindo wokudlidliza.
Amaphampu e-Titanium sublimation ngokuvamile anemicu ye-titanium engu-3 (ukuvimbela ukusha) futhi asetshenziswa ngokuhlangene namaphampu amangqamuzana noma ama-ion ukuze anikeze ukukhishwa kwe-hydrogen okuhle kakhulu.Amaphampu evacuum abaluleke kakhulu ebangeni le-10-9-10-11 mbar futhi afakwe emakamelweni evacuum amaningi kakhulu lapho kudingeka khona amazinga aphezulu e-vacuum.
Ububi bamaphampu e-titanium sublimation yisidingo sokufafaza njalo kwe-titanium, i-vacuum iwohloka cishe ngama-oda we-1-2 wobukhulu ngesikhathi sokufafaza (phakathi nemizuzu embalwa), ngakho-ke amakamelo athile anezidingo ezithile adinga ukusetshenziswa kwe-NEG.futhi, kumasampula/amadivayisi azwelayo we-titanium, kufanele kuqashelwe ukugwema indawo yepompo ye-titanium sublimation.
V. Amaphampu e-Cryogenic
Amaphampu e-Cryogenic ikakhulukazi ancike ekukhangisweni kwamazinga okushisa aphansi ukuze athole i-vacuum, ngezinzuzo zesivinini sokumpompa, akukho ukungcola kanye ne-vacuum ephezulu kakhulu.Izici eziyinhloko ezithinta ijubane lokupompa lamaphampu e-cryogenic izinga lokushisa kanye nendawo engaphezulu yepompo.Ezinhlelweni ezinkulu ze-molecular beam epitaxy, amaphampu e-cryogenic asetshenziswa kabanzi ngenxa yezidingo eziphezulu zokugcina ze-vacuum.
Ukungalungi kwamaphampu e-cryogenic ukusetshenziswa okuphezulu kwe-nitrogen ewuketshezi kanye nezindleko eziphezulu zokusebenza.Amasistimu anama-chiller ajikelezayo angasetshenziswa ngaphandle kokusebenzisa i-nitrogen ewuketshezi, kodwa lokhu kuletha izinkinga ezihambisanayo zokusetshenziswa kwamandla, ukudlidliza nomsindo.Ngenxa yalesi sizathu, amaphampu e-cryogenic awasetshenziswa kakhulu emishinini evamile yaselabhorethri.
VI.Amaphampu we-Aspirator (NEG)
Iphampu ye-agent yokudonsa ingenye yamaphampu evacuum asetshenziswa kakhulu eminyakeni yamuva nje, inzuzo yawo ukusetshenziswa okuphelele kwe-chemical adsorption, akukho plating yomhwamuko kanye nokungcola kwe-electromagnetic, okuvame ukusetshenziswa kanye namaphampu wamangqamuzana ukuthatha indawo yamaphampu e-titanium sublimation kanye ne-sputtering ion. amaphampu, ububi izindleko eziphezulu kanye nenani elilinganiselwe lokuvuselela, ngokuvamile elisetshenziswa kumasistimu anezidingo eziphezulu zokuzinza kwe-vacuum noma azwela kakhulu izinkambu zikagesi.
Ukwengeza, njengoba iphampu ye-aspirator idinga uxhumano lwe-vacuum eyengeziwe ngaphezu kokusebenza kokuqala, iphinde isetshenziswe kumasistimu amakhulu njengephampu elisizayo ukuze kukhuliswe isivinini sokupompa kanye nokuthuthukisa izinga le-vacuum, elingenza uhlelo lube lula ngempumelelo.

Umfanekiso :Izingcindezi zokusebenza zezinhlobo ezahlukene zamaphampu.Imicibisholo ensundu ikhombisa ububanzi bengcindezi yokusebenza okuphezulu okuvunyelwe kanye nezingxenye ezigqamile eziluhlaza zikhombisa ububanzi bengcindezi yokusebenza evamile.